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Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor
(26th International Conference on Microelectronics, Proceedings, MIEL 2008, 2008)
The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser ...
Sputtered nickel coverage of the SiO2 nano-step
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we give a survey of the problems that we encountered during deposition and examination of the Ni layers on SiO2 nano-step. We made nano-layer Of SiO2 and deposited Ni film on top of it thus making particular ...
Photoacoustic elastic bending method: Investigation of the surface recombination states
(26th International Conference on Microelectronics, Proceedings, MIEL 2008, 2008)
The recombination processes of surface modified Si samples by the PA elastic bending method were investigated. The experimental PA elastic bending signals were measured by using special constructed PA cell (the gas-microphone ...
Metal-dielectric photonic crystal for the enhancement of solar-blind ultraviolet silicon photodiodes
(Institute of Electrical and Electronics Engineers Inc., 2008)
We report the fabrication of metal-dielectric photonic crystals as bandpass filter for the UV riadiation with a sidelobe suppression in excess of 4 orders of magnitude. The metal-dielectrics were designed for the enhcancement ...
Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we present a contactless technique for thickness measurement of chemically etched Si membranes. This technique is based on low-coherence interferometry performed by single-mode fiber-optic sensing configuration. ...
A consideration of optical noise figures of adsorption-based nanophotonic sensors
(Institute of Electrical and Electronics Engineers Inc., 2008)
We consider some intrinsic noise mechanisms appearing in nanophotonic sensors based on plasmonic structures and surface plasmon-polaritons. We analyze the photonic Johnson-Nyquist fluctuations and the adsorption and ...
Preparation of silver(I) complexes with itaconic acid-based hydrogels for biomedical application
(Materials and Manufacturing Processes, 2009)
Silver(I) complexes based on itaconic acid hydrogel were prepared and characterized in order to examine the potential use of these materials. FTIR, AFM, in vitro fluid-uptake, metal sorption, and antibacterial activity ...
Sulphation of CaO-based sorbent modified in CO2 looping cycles
(Proceedings of the 20th International Conference on Fluidized Bed Combustion, 2009)
CaO-based looping cycles for CO2 capture at high temperatures are based on cyclical carbonation of CaO and regeneration of CaCO3. The main limitation of natural sorbents is the loss of carrying capacity with increasing ...
Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer ...
Fabrication and characterization of AFM golden microcantilevers and measurement of small electromagnetic forces
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents results of research oriented towards developing a method for measurement of small electromagnetic forces using atomic force microscope (AFM). The method is based on the measurement of cantilever deflection ...