Fabrication and characterization of AFM golden microcantilevers and measurement of small electromagnetic forces
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AuthorsĐurić, Zoran G.
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This paper presents results of research oriented towards developing a method for measurement of small electromagnetic forces using atomic force microscope (AFM). The method is based on the measurement of cantilever deflection due to influence of Lorentz force and enables determination of magnetic force and magnetic induction of various magnets and conductors carrying electric current. Design and fabrication of a cantilevers with "U" and "V" shape is presented. A homogenous composition of the microcantilever made of a conductive material (gold) is chosen in order to avoid the adverse bimaterial effect. Preliminary experimental results obtained by measuring interaction between a permanent magnet and current carrying cantilever are given.
Source:26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 363-366
- Institute of Electrical and Electronics Engineers Inc.