The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser beam) in different diaphragms and the generated elastic vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal vibration frequency spectra were measured and analyzed for different types of diaphragms with a different concentric boss and each type of diaphragms on the different technological level of production. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of sensors.
Source:
26th International Conference on Microelectronics, Proceedings, MIEL 2008, 2008, 325-328
TY - CONF
AU - Todorović, D. M.
AU - Cretin, B.
AU - Song, Y.Q.
AU - Smiljanić, Milče
AU - Lazić, Žarko
AU - Radulović, Katarina
PY - 2008
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/468
AB - The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser beam) in different diaphragms and the generated elastic vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal vibration frequency spectra were measured and analyzed for different types of diaphragms with a different concentric boss and each type of diaphragms on the different technological level of production. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of sensors.
C3 - 26th International Conference on Microelectronics, Proceedings, MIEL 2008
T1 - Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor
SP - 325
EP - 328
DO - 10.1109/ICMEL.2008.4559287
ER -
@conference{
author = "Todorović, D. M. and Cretin, B. and Song, Y.Q. and Smiljanić, Milče and Lazić, Žarko and Radulović, Katarina",
year = "2008",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/468",
abstract = "The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser beam) in different diaphragms and the generated elastic vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal vibration frequency spectra were measured and analyzed for different types of diaphragms with a different concentric boss and each type of diaphragms on the different technological level of production. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of sensors.",
journal = "26th International Conference on Microelectronics, Proceedings, MIEL 2008",
title = "Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor",
pages = "325-328",
doi = "10.1109/ICMEL.2008.4559287"
}
Todorović, D. M., Cretin, B., Song, Y.Q., Smiljanić, M., Lazić, Ž.,& Radulović, K. (2008). Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor.
26th International Conference on Microelectronics, Proceedings, MIEL 2008, 325-328.
https://doi.org/10.1109/ICMEL.2008.4559287
Todorović DM, Cretin B, Song Y, Smiljanić M, Lazić Ž, Radulović K. Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor. 26th International Conference on Microelectronics, Proceedings, MIEL 2008. 2008;:325-328
Todorović D. M., Cretin B., Song Y.Q., Smiljanić Milče, Lazić Žarko, Radulović Katarina, "Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor" 26th International Conference on Microelectronics, Proceedings, MIEL 2008 (2008):325-328,
https://doi.org/10.1109/ICMEL.2008.4559287 .
