Vacuum MEMS sensor based on thermopiles - Simple model and experimental results

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2008
Authors
Ranđelović, Danijela
Jovanov, V.
Lazić, Žarko
Đurić, Zoran G.
Matic, A.
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Abstract
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.
Source:
26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 367-370
Publisher:
  • Institute of Electrical and Electronics Engineers Inc.

DOI: 10.1109/ICMEL.2008.4559298

ISSN: 2159-1660

WoS: 000257432600076

Scopus: 2-s2.0-51749124672
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/381
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IHTM