This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.
Source:
26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 367-370
Publisher:
Institute of Electrical and Electronics Engineers Inc.
TY - CONF
AU - Ranđelović, Danijela
AU - Jovanov, V.
AU - Lazić, Žarko
AU - Đurić, Zoran G.
AU - Matic, A.
PY - 2008
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/381
AB - This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.
PB - Institute of Electrical and Electronics Engineers Inc.
C3 - 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
T1 - Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
SP - 367
EP - 370
DO - 10.1109/ICMEL.2008.4559298
ER -
@conference{
author = "Ranđelović, Danijela and Jovanov, V. and Lazić, Žarko and Đurić, Zoran G. and Matic, A.",
year = "2008",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/381",
abstract = "This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "26th International Conference on Microelectronics, Vols 1 and 2, Proceedings",
title = "Vacuum MEMS sensor based on thermopiles - Simple model and experimental results",
pages = "367-370",
doi = "10.1109/ICMEL.2008.4559298"
}
Ranđelović, D., Jovanov, V., Lazić, Ž., Đurić, Z. G.,& Matic, A. (2008). Vacuum MEMS sensor based on thermopiles - Simple model and experimental results.
26th International Conference on Microelectronics, Vols 1 and 2, Proceedings
Institute of Electrical and Electronics Engineers Inc.., 367-370.
https://doi.org/10.1109/ICMEL.2008.4559298
Ranđelović D, Jovanov V, Lazić Ž, Đurić ZG, Matic A. Vacuum MEMS sensor based on thermopiles - Simple model and experimental results. 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings. 2008;:367-370
Ranđelović Danijela, Jovanov V., Lazić Žarko, Đurić Zoran G., Matic A., "Vacuum MEMS sensor based on thermopiles - Simple model and experimental results" 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings (2008):367-370,
https://doi.org/10.1109/ICMEL.2008.4559298 .
