Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
Authorized Users Only
Conference object (Published version)
MetadataShow full item record
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.
Source:26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 367-370
- Institute of Electrical and Electronics Engineers Inc.