Metal-dielectric photonic crystal for the enhancement of solar-blind ultraviolet silicon photodiodes
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We report the fabrication of metal-dielectric photonic crystals as bandpass filter for the UV riadiation with a sidelobe suppression in excess of 4 orders of magnitude. The metal-dielectrics were designed for the enhcancement of the operation of UV photodiodes and for the use of Si PIN photodiodes as solar-blind devices. The bandpass filters were fabricated by RF sputtering of alternating SiO2 and silver layers.
Source:26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 121-124
- Institute of Electrical and Electronics Engineers Inc.