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Fabrication and characterization of AFM golden microcantilevers and measurement of small electromagnetic forces
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents results of research oriented towards developing a method for measurement of small electromagnetic forces using atomic force microscope (AFM). The method is based on the measurement of cantilever deflection ...
Optimization of micro/nanooscillator parameters for analysis of transient adsorption processes
(Institute of Electrical and Electronics Engineers Inc., 2008)
We consider optimization of parameters of micro/nanooscillators intended for investigation of adsorptiondesorption (AD) processes, which are fast in comparison with the response rate of the oscillator itself. We consider ...
Metal-dielectric photonic crystal for the enhancement of solar-blind ultraviolet silicon photodiodes
(Institute of Electrical and Electronics Engineers Inc., 2008)
We report the fabrication of metal-dielectric photonic crystals as bandpass filter for the UV riadiation with a sidelobe suppression in excess of 4 orders of magnitude. The metal-dielectrics were designed for the enhcancement ...
Metal nanowire arrays with ultralow or negative effective permittivity for adsorption-based chemical sensing
(Institute of Electrical and Electronics Engineers Inc., 2008)
We investigated wire-mesh media with plasma-like dispersion of dielectric permittivity as a potential medium for nanoplasmonic sensors utilizing adsorption of chemical, biochemical or biological analytes. Such structures ...
Sputtered nickel coverage of the SiO2 nano-step
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we give a survey of the problems that we encountered during deposition and examination of the Ni layers on SiO2 nano-step. We made nano-layer Of SiO2 and deposited Ni film on top of it thus making particular ...
Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer ...
A consideration of optical noise figures of adsorption-based nanophotonic sensors
(Institute of Electrical and Electronics Engineers Inc., 2008)
We consider some intrinsic noise mechanisms appearing in nanophotonic sensors based on plasmonic structures and surface plasmon-polaritons. We analyze the photonic Johnson-Nyquist fluctuations and the adsorption and ...
Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we present a contactless technique for thickness measurement of chemically etched Si membranes. This technique is based on low-coherence interferometry performed by single-mode fiber-optic sensing configuration. ...
Investigation of silicon anisotropic etching in alkaline solutions with propanol addition
(Institute of Electrical and Electronics Engineers Inc., 2008)
Different propanol isomers additives to 26 wt. % KOH water solution have been studied. It was stated that addition of both isomers result in changing etching anisotropy of (110) oriented corners on Si LT 100 >. For the ...