Optimization of micro/nanooscillator parameters for analysis of transient adsorption processes
Abstract
We consider optimization of parameters of micro/nanooscillators intended for investigation of adsorptiondesorption (AD) processes, which are fast in comparison with the response rate of the oscillator itself. We consider the choice of the values of the Q-factor, the resonant frequency of the micro/nanocantilever and the excitation frequency, in order to ensure that experimentally obtained micro/nanooscillator tirne response can be used for extraction of information about the AD process parameters. It is shown that a very small cantilever, which has a very high resonant frequency, can be used for investigation of AD processes whose time constant is as short as 10(-5) s.
Source:
26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 359-362Publisher:
- Institute of Electrical and Electronics Engineers Inc.
DOI: 10.1109/ICMEL.2008.4559296
ISSN: 2159-1660