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Investigation of silicon anisotropic etching in alkaline solutions with propanol addition
(Institute of Electrical and Electronics Engineers Inc., 2008)
Different propanol isomers additives to 26 wt. % KOH water solution have been studied. It was stated that addition of both isomers result in changing etching anisotropy of (110) oriented corners on Si LT 100 >. For the ...
Sulphation of CaO-based sorbent modified in CO2 looping cycles
(Proceedings of the 20th International Conference on Fluidized Bed Combustion, 2009)
CaO-based looping cycles for CO2 capture at high temperatures are based on cyclical carbonation of CaO and regeneration of CaCO3. The main limitation of natural sorbents is the loss of carrying capacity with increasing ...
Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer ...
A consideration of optical noise figures of adsorption-based nanophotonic sensors
(Institute of Electrical and Electronics Engineers Inc., 2008)
We consider some intrinsic noise mechanisms appearing in nanophotonic sensors based on plasmonic structures and surface plasmon-polaritons. We analyze the photonic Johnson-Nyquist fluctuations and the adsorption and ...
Sputtered nickel coverage of the SiO2 nano-step
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we give a survey of the problems that we encountered during deposition and examination of the Ni layers on SiO2 nano-step. We made nano-layer Of SiO2 and deposited Ni film on top of it thus making particular ...
Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we present a contactless technique for thickness measurement of chemically etched Si membranes. This technique is based on low-coherence interferometry performed by single-mode fiber-optic sensing configuration. ...
Metal nanowire arrays with ultralow or negative effective permittivity for adsorption-based chemical sensing
(Institute of Electrical and Electronics Engineers Inc., 2008)
We investigated wire-mesh media with plasma-like dispersion of dielectric permittivity as a potential medium for nanoplasmonic sensors utilizing adsorption of chemical, biochemical or biological analytes. Such structures ...
Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor
(26th International Conference on Microelectronics, Proceedings, MIEL 2008, 2008)
The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser ...
Preparation of silver(I) complexes with itaconic acid-based hydrogels for biomedical application
(Materials and Manufacturing Processes, 2009)
Silver(I) complexes based on itaconic acid hydrogel were prepared and characterized in order to examine the potential use of these materials. FTIR, AFM, in vitro fluid-uptake, metal sorption, and antibacterial activity ...
Photoacoustic elastic bending method: Investigation of the surface recombination states
(26th International Conference on Microelectronics, Proceedings, MIEL 2008, 2008)
The recombination processes of surface modified Si samples by the PA elastic bending method were investigated. The experimental PA elastic bending signals were measured by using special constructed PA cell (the gas-microphone ...