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Microfabrication by Mask-maskless wet Anisotropic Etching for Realization of Multilevel Structures in {100} Oriented Si
(Institute of Electrical and Electronics Engineers Inc., 2012)
Step-like structures oriented along LT 110 > or LT 110 > directions on {100} oriented Si substrates are first etched with mask following maskless etching in 30 wt. % KOH solution in water at 80 degrees C. The step ...
Modelling of temperature distribution in thermal microsensors on sandwich thermally isolated structures
(13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microele, 2012)
The paper presents a modelling of temperature distribution in the sandwich thermally isolated structures used in thermal microsensors. The two cases are considered: 1) the temperature distribution along the thickness of a ...
Helium Sensing Using Multipurpose Thermopile-Based MEMS devices
(Institute of Electrical and Electronics Engineers Inc., 2012)
In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities ...
Fabrication and characterization of AFM golden microcantilevers and measurement of small electromagnetic forces
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents results of research oriented towards developing a method for measurement of small electromagnetic forces using atomic force microscope (AFM). The method is based on the measurement of cantilever deflection ...
Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement ...
Examples of Wide Microwave Bandpass Microstrip Filters on Felt Substrate
(Belgrade : Institute of Electrical and Electronics Engineers Inc., 2021)
Application of one type of wide bandpass filter on felt (textile) substrate is introduced. Copper tape and conductive textile are used for metallization (conductive layer). It is an initial work. The patterns were done in ...
Optimization of micro/nanooscillator parameters for analysis of transient adsorption processes
(Institute of Electrical and Electronics Engineers Inc., 2008)
We consider optimization of parameters of micro/nanooscillators intended for investigation of adsorptiondesorption (AD) processes, which are fast in comparison with the response rate of the oscillator itself. We consider ...
Bioremediation - innovative solutions for old environmental challenges
(Japan Society for Environmental Chemistry, 2018)
Until recently, we considered natural recycling capacities unlimited. However, industrial development, usage of fossil fuels and production of manmade compounds has led to the situation were the amount of generated waste ...
Preparation of silver(I) complexes with itaconic acid-based hydrogels for biomedical application
(Materials and Manufacturing Processes, 2009)
Silver(I) complexes based on itaconic acid hydrogel were prepared and characterized in order to examine the potential use of these materials. FTIR, AFM, in vitro fluid-uptake, metal sorption, and antibacterial activity ...
Printed Antenna Arrays with Cylindrical Parabolic Reflector
(20th Telecommunications Forum, TELFOR 2012 - Proceedings, 2012)
Concept of design and realization of high gain printed antenna structures is presented. They consist of antenna array, subreflector, feeding network and bal-un, all printed on the same dielectric substrate. Linear array ...