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Modelling of temperature distribution in thermal microsensors on sandwich thermally isolated structures

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2012
Authors
Kozlov, A.G.
Ranđelović, Danijela
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Abstract
The paper presents a modelling of temperature distribution in the sandwich thermally isolated structures used in thermal microsensors. The two cases are considered: 1) the temperature distribution along the thickness of a thermally isolated structure; 2) the temperature distribution over the area of a thermally isolated structure. The basis for modeling is the eigenfunction method which is modified for the structure including several regions with homogeneous parameters. The model is applied to the concrete microsensors with sandwich thermally isolated structure. The relative error in determining the temperature distribution in replacing the two-layer structure (Si/SiO 2) by the structure with homogeneous parameters is evaluated. The temperature distributions in the regions with the thermopiles and heater and along the line of disposition of hot thermojunctions of the thermopile are determined.
Source:
13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microele, 2012
Projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)

DOI: 10.1109/ESimE.2012.6191765

Scopus: 2-s2.0-84861412720
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/1144
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IHTM

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