In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.
Source:
28th International Conference on Microelectronics - Proceedings, MIEL 2012, 2012, 147-150
Publisher:
Institute of Electrical and Electronics Engineers Inc.
TY - CONF
AU - Ranđelović, Danijela
AU - Lazić, Žarko
AU - Popović, M.
AU - Matic, M.
PY - 2012
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/1096
AB - In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.
PB - Institute of Electrical and Electronics Engineers Inc.
C3 - 28th International Conference on Microelectronics - Proceedings, MIEL 2012
T1 - Helium Sensing Using Multipurpose Thermopile-Based MEMS devices
SP - 147
EP - 150
DO - 10.1109/MIEL.2012.6222819
ER -
@conference{
author = "Ranđelović, Danijela and Lazić, Žarko and Popović, M. and Matic, M.",
year = "2012",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/1096",
abstract = "In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities of broadening of its field of application towards gas sensing. Simulation data are given for the study of gas type and binary gas mixture composition detection. Experimental results considering air and helium detection are in good agreement with theoretical predictions.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "28th International Conference on Microelectronics - Proceedings, MIEL 2012",
title = "Helium Sensing Using Multipurpose Thermopile-Based MEMS devices",
pages = "147-150",
doi = "10.1109/MIEL.2012.6222819"
}
Ranđelović, D., Lazić, Ž., Popović, M.,& Matic, M. (2012). Helium Sensing Using Multipurpose Thermopile-Based MEMS devices.
28th International Conference on Microelectronics - Proceedings, MIEL 2012
Institute of Electrical and Electronics Engineers Inc.., 147-150.
https://doi.org/10.1109/MIEL.2012.6222819
Ranđelović D, Lazić Ž, Popović M, Matic M. Helium Sensing Using Multipurpose Thermopile-Based MEMS devices. 28th International Conference on Microelectronics - Proceedings, MIEL 2012. 2012;:147-150
Ranđelović Danijela, Lazić Žarko, Popović M., Matic M., "Helium Sensing Using Multipurpose Thermopile-Based MEMS devices" 28th International Conference on Microelectronics - Proceedings, MIEL 2012 (2012):147-150,
https://doi.org/10.1109/MIEL.2012.6222819 .
