In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.
Source:
27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010, 217-220
TY - CONF
AU - Ranđelović, Danijela
AU - Tsamis, C.
AU - Kaltsas, G.
AU - Petropoulos, A.
AU - Lazić, Žarko
PY - 2010
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/756
AB - In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.
C3 - 27th International Conference on Microelectronics, MIEL 2010 - Proceedings
T1 - Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
SP - 217
EP - 220
DO - 10.1109/MIEL.2010.5490495
ER -
@conference{
author = "Ranđelović, Danijela and Tsamis, C. and Kaltsas, G. and Petropoulos, A. and Lazić, Žarko",
year = "2010",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/756",
abstract = "In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement with simulation data obtained both with the self developed 1D analytical model as well as the commercial simulation software package CoventorWare. With the aid of the simulation tools optimization of sensor design and fabrication procedure can be achieved.",
journal = "27th International Conference on Microelectronics, MIEL 2010 - Proceedings",
title = "Modelling of thermopile-based MEMS sensors using analytical and numerical techniques",
pages = "217-220",
doi = "10.1109/MIEL.2010.5490495"
}
Ranđelović D, Tsamis C, Kaltsas G, Petropoulos A, Lazić Ž. Modelling of thermopile-based MEMS sensors using analytical and numerical techniques. 27th International Conference on Microelectronics, MIEL 2010 - Proceedings. 2010;:217-220
Ranđelović, D., Tsamis, C., Kaltsas, G., Petropoulos, A.,& Lazić, Ž. (2010). Modelling of thermopile-based MEMS sensors using analytical and numerical techniques.
27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 217-220.
https://doi.org/10.1109/MIEL.2010.5490495
Ranđelović Danijela, Tsamis C., Kaltsas G., Petropoulos A., Lazić Žarko, "Modelling of thermopile-based MEMS sensors using analytical and numerical techniques" (2010):217-220,
https://doi.org/10.1109/MIEL.2010.5490495 .
