TY  - CONF
AU  - Bošković, Marko
AU  - Vasiljević-Radović, Dana
AU  - Smiljanić, Milče
AU  - Cvetanović, Katarina
AU  - Milinković, Evgenija
AU  - Sarajlić, Milija
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7133
AB  - In this work, a self-powered relative humidity sensor based on RF energy harvesting is presented.
PB  - Niš, Serbia : Faculty of Electronic Engineering, University of Niš
C3  - ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia
T1  - Self-powered relative humidity sensor based on RF energy harvesting
SP  - 45
EP  - 45
UR  - https://hdl.handle.net/21.15107/rcub_cer_7133
ER  - 

@conference{
author = "Bošković, Marko and Vasiljević-Radović, Dana and Smiljanić, Milče and Cvetanović, Katarina and Milinković, Evgenija and Sarajlić, Milija",
year = "2023",
abstract = "In this work, a self-powered relative humidity sensor based on RF energy harvesting is presented.",
publisher = "Niš, Serbia : Faculty of Electronic Engineering, University of Niš",
journal = "ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia",
title = "Self-powered relative humidity sensor based on RF energy harvesting",
pages = "45-45",
url = "https://hdl.handle.net/21.15107/rcub_cer_7133"
}

Bošković, M., Vasiljević-Radović, D., Smiljanić, M., Cvetanović, K., Milinković, E.,& Sarajlić, M.. (2023). Self-powered relative humidity sensor based on RF energy harvesting. in ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia
Niš, Serbia : Faculty of Electronic Engineering, University of Niš., 45-45.
https://hdl.handle.net/21.15107/rcub_cer_7133

Bošković M, Vasiljević-Radović D, Smiljanić M, Cvetanović K, Milinković E, Sarajlić M. Self-powered relative humidity sensor based on RF energy harvesting. in ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia. 2023;:45-45.
https://hdl.handle.net/21.15107/rcub_cer_7133 .

Bošković, Marko, Vasiljević-Radović, Dana, Smiljanić, Milče, Cvetanović, Katarina, Milinković, Evgenija, Sarajlić, Milija, "Self-powered relative humidity sensor based on RF energy harvesting" in ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia (2023):45-45,
https://hdl.handle.net/21.15107/rcub_cer_7133 .

TY  - CONF
AU  - Lazić, Žarko
AU  - Smiljanić, Milče
AU  - Tanasković, Dragan
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović, Katarina
AU  - Milinković, Evgenija
AU  - Bošković, Marko V.
AU  - Andrić, Stevan
AU  - Poljak, Predrag
AU  - Frantlović, Miloš
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7419
AB  - The existing instruments for aerodynamic pressure measurements are usually built around
an array of discrete pressure sensors, placed in the same housing together with a few discrete
temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing.
PB  - MDPI
C3  - Engineering proceedings
T1  - Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements
VL  - 58
IS  - 1
SP  - 52
DO  - 10.3390/ecsa-10-16071
ER  - 

@conference{
author = "Lazić, Žarko and Smiljanić, Milče and Tanasković, Dragan and Rašljić Rafajilović, Milena and Cvetanović, Katarina and Milinković, Evgenija and Bošković, Marko V. and Andrić, Stevan and Poljak, Predrag and Frantlović, Miloš",
year = "2023",
abstract = "The existing instruments for aerodynamic pressure measurements are usually built around
an array of discrete pressure sensors, placed in the same housing together with a few discrete
temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing.",
publisher = "MDPI",
journal = "Engineering proceedings",
title = "Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements",
volume = "58",
number = "1",
pages = "52",
doi = "10.3390/ecsa-10-16071"
}

Lazić, Ž., Smiljanić, M., Tanasković, D., Rašljić Rafajilović, M., Cvetanović, K., Milinković, E., Bošković, M. V., Andrić, S., Poljak, P.,& Frantlović, M.. (2023). Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements. in Engineering proceedings
MDPI., 58(1), 52.
https://doi.org/10.3390/ecsa-10-16071

Lazić Ž, Smiljanić M, Tanasković D, Rašljić Rafajilović M, Cvetanović K, Milinković E, Bošković MV, Andrić S, Poljak P, Frantlović M. Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements. in Engineering proceedings. 2023;58(1):52.
doi:10.3390/ecsa-10-16071 .

Lazić, Žarko, Smiljanić, Milče, Tanasković, Dragan, Rašljić Rafajilović, Milena, Cvetanović, Katarina, Milinković, Evgenija, Bošković, Marko V., Andrić, Stevan, Poljak, Predrag, Frantlović, Miloš, "Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements" in Engineering proceedings, 58, no. 1 (2023):52,
https://doi.org/10.3390/ecsa-10-16071 . .

Smiljanić, M. M., Vorkapić, M., Cvetanović, K., Milinković, E., Lazić, Ž., Bošković, M. V.,& Svorcan, J.. (2023). Metoda za posmatranje i analizu protoka fluida u Si-Pyrex staklo opto-mikrofluidnim platformama. 
University of Belgrade - Institute of Chemistry, Technology and Metallurgy..
https://hdl.handle.net/21.15107/rcub_cer_6659

Smiljanić MM, Vorkapić M, Cvetanović K, Milinković E, Lazić Ž, Bošković MV, Svorcan J. Metoda za posmatranje i analizu protoka fluida u Si-Pyrex staklo opto-mikrofluidnim platformama. 2023;.
https://hdl.handle.net/21.15107/rcub_cer_6659 .

Smiljanić, Milče M., Vorkapić, Miloš, Cvetanović, Katarina, Milinković, Evgenija, Lazić, Žarko, Bošković, Marko V., Svorcan, Jelena, "Metoda za posmatranje i analizu protoka fluida u Si-Pyrex staklo opto-mikrofluidnim platformama" (2023),
https://hdl.handle.net/21.15107/rcub_cer_6659 .

TY  - CONF
AU  - Rašljić Rafajilović, Milena
AU  - Vasiljević-Radović, Dana
AU  - Vorkapić, Miloš
AU  - Pergal, Marija
AU  - Smiljanić, Milče M.
AU  - Živković, Ljiljana
PY  - 2022
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5749
AB  - Microreactors are microfluidic devices with a network of channels where chemical reactions can take place. The diameter of those channels is less than 1 millimeter. Advances of such devices are reduction of the time required for the synthesis, better control of the reaction and the size of nanoparticles. There are different materials from which microreactors can be fabricated. The most common are silicon (Si), polymers, glass, ceramics and metals. In this study, we used Si/Pyrex glass and poly(dimethylsiloxane) (PDMS) materials to fabricate two types of microreactors. Both types of microreactors had integrated heaters but different length and width of microchannels. Reaction was performed on the same temperature (80⁰C) and with the same reaction time in both microreactors. Synthesis of titanium (IV)-oxide nanoparticles was performed in these microreactors, in order to show how dimension of microchannels can affect the size of nanoparticles. Size distribution of nanoparticles was determined with dynamic light scattering (DLS). It was concluded that dimensions of microchannels had great influence on the size of the nanoparticles.
PB  - Belgrade : Serbian  Ceramic Society
C3  - Program and the book of abstracts - Serbian Ceramic Society Conference - Advanced Ceramics and Application X - New Frontiers in Multifunctional Material Science and Processing, 26-27. September 2022, Belgrade, Serbia
T1  - Nanoparticle synthesis in microreactors
SP  - 86
EP  - 86
UR  - https://hdl.handle.net/21.15107/rcub_cer_5749
ER  - 

@conference{
author = "Rašljić Rafajilović, Milena and Vasiljević-Radović, Dana and Vorkapić, Miloš and Pergal, Marija and Smiljanić, Milče M. and Živković, Ljiljana",
year = "2022",
abstract = "Microreactors are microfluidic devices with a network of channels where chemical reactions can take place. The diameter of those channels is less than 1 millimeter. Advances of such devices are reduction of the time required for the synthesis, better control of the reaction and the size of nanoparticles. There are different materials from which microreactors can be fabricated. The most common are silicon (Si), polymers, glass, ceramics and metals. In this study, we used Si/Pyrex glass and poly(dimethylsiloxane) (PDMS) materials to fabricate two types of microreactors. Both types of microreactors had integrated heaters but different length and width of microchannels. Reaction was performed on the same temperature (80⁰C) and with the same reaction time in both microreactors. Synthesis of titanium (IV)-oxide nanoparticles was performed in these microreactors, in order to show how dimension of microchannels can affect the size of nanoparticles. Size distribution of nanoparticles was determined with dynamic light scattering (DLS). It was concluded that dimensions of microchannels had great influence on the size of the nanoparticles.",
publisher = "Belgrade : Serbian  Ceramic Society",
journal = "Program and the book of abstracts - Serbian Ceramic Society Conference - Advanced Ceramics and Application X - New Frontiers in Multifunctional Material Science and Processing, 26-27. September 2022, Belgrade, Serbia",
title = "Nanoparticle synthesis in microreactors",
pages = "86-86",
url = "https://hdl.handle.net/21.15107/rcub_cer_5749"
}

Rašljić Rafajilović, M., Vasiljević-Radović, D., Vorkapić, M., Pergal, M., Smiljanić, M. M.,& Živković, L.. (2022). Nanoparticle synthesis in microreactors. in Program and the book of abstracts - Serbian Ceramic Society Conference - Advanced Ceramics and Application X - New Frontiers in Multifunctional Material Science and Processing, 26-27. September 2022, Belgrade, Serbia
Belgrade : Serbian  Ceramic Society., 86-86.
https://hdl.handle.net/21.15107/rcub_cer_5749

Rašljić Rafajilović M, Vasiljević-Radović D, Vorkapić M, Pergal M, Smiljanić MM, Živković L. Nanoparticle synthesis in microreactors. in Program and the book of abstracts - Serbian Ceramic Society Conference - Advanced Ceramics and Application X - New Frontiers in Multifunctional Material Science and Processing, 26-27. September 2022, Belgrade, Serbia. 2022;:86-86.
https://hdl.handle.net/21.15107/rcub_cer_5749 .

Rašljić Rafajilović, Milena, Vasiljević-Radović, Dana, Vorkapić, Miloš, Pergal, Marija, Smiljanić, Milče M., Živković, Ljiljana, "Nanoparticle synthesis in microreactors" in Program and the book of abstracts - Serbian Ceramic Society Conference - Advanced Ceramics and Application X - New Frontiers in Multifunctional Material Science and Processing, 26-27. September 2022, Belgrade, Serbia (2022):86-86,
https://hdl.handle.net/21.15107/rcub_cer_5749 .

TY  - CONF
AU  - Lazić, Žarko
AU  - Smiljanić, Milče M.
AU  - Nešić, Dušan
AU  - Zeković, Ljubiša
PY  - 2022
UR  - https://www.etran.rs/2022/zbornik/ICETRAN-22_radovi/044-MOI1.1.pdf
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5640
AB  - In this paper, two color detector based on silicon 
photodiodes is studied and fabricated. Standard IHTM 
photodiode’s design is modified to allow mounting one 
photodiode above another using special micromachined carrier. 
The carrier is fabricated using wet silicon etching in 25% TMAH 
water solution and anodic bonding of etched silicon and Pyrex 
glass. The fabricated carrier also allows easy wire 
thermocompression bonding from the photodiode’s pads to TO-5 
housing. Output currents of the photodiodes were measured by 
applying light of 900 nm and 1060 nm. Obtained results verify 
applicability of the new packaging for two color detector.
PB  - Belgrade : ETRAN Society
C3  - Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia
T1  - Two Color Photodiodes Mounted on the Micromachined Carrier
SP  - 391
EP  - 394
UR  - https://hdl.handle.net/21.15107/rcub_cer_5640
ER  - 

@conference{
author = "Lazić, Žarko and Smiljanić, Milče M. and Nešić, Dušan and Zeković, Ljubiša",
year = "2022",
abstract = "In this paper, two color detector based on silicon 
photodiodes is studied and fabricated. Standard IHTM 
photodiode’s design is modified to allow mounting one 
photodiode above another using special micromachined carrier. 
The carrier is fabricated using wet silicon etching in 25% TMAH 
water solution and anodic bonding of etched silicon and Pyrex 
glass. The fabricated carrier also allows easy wire 
thermocompression bonding from the photodiode’s pads to TO-5 
housing. Output currents of the photodiodes were measured by 
applying light of 900 nm and 1060 nm. Obtained results verify 
applicability of the new packaging for two color detector.",
publisher = "Belgrade : ETRAN Society",
journal = "Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia",
title = "Two Color Photodiodes Mounted on the Micromachined Carrier",
pages = "391-394",
url = "https://hdl.handle.net/21.15107/rcub_cer_5640"
}

Lazić, Ž., Smiljanić, M. M., Nešić, D.,& Zeković, L.. (2022). Two Color Photodiodes Mounted on the Micromachined Carrier. in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia
Belgrade : ETRAN Society., 391-394.
https://hdl.handle.net/21.15107/rcub_cer_5640

Lazić Ž, Smiljanić MM, Nešić D, Zeković L. Two Color Photodiodes Mounted on the Micromachined Carrier. in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia. 2022;:391-394.
https://hdl.handle.net/21.15107/rcub_cer_5640 .

Lazić, Žarko, Smiljanić, Milče M., Nešić, Dušan, Zeković, Ljubiša, "Two Color Photodiodes Mounted on the Micromachined Carrier" in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia (2022):391-394,
https://hdl.handle.net/21.15107/rcub_cer_5640 .

TY  - CONF
AU  - Svorcan, Jelena
AU  - Smiljanić, Milče M.
AU  - Vorkapić, Miloš
PY  - 2022
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5642
AB  - Microfluidic devices are excessively used for various biomedical, chemical, and engineering 
applications. The most common microfluidic platforms are obtained from 
polydimethylsiloxane (PDMS). Platforms based on etched silicon wafers anodically bonded to 
Pyrex glass are more mechanically rigid, have better sealing and there is no gas permeability 
compared to those obtained from PDMS [1,2]. The aim of our work is to numerically analyze 
fluid flow in anisotropically etched silicon microchannels sealed with Pyrex glass. We present 
simulations of fluid flow in Y-bifurcated microchannels fabricated from the etched {100} 
silicon in 25 wt% tetramethylammonium hydroxide (TMAH) water solution at the temperature 
of 80°C [3]. We have explored two symmetrical Y-bifurcations that are defined with acute 
angles of 36.8° and 19° with the sides that are along the <310> and <610> crystallographic 
directions in the masking layer [3], respectively. The angles between obtained sidewalls and 
{100} silicon of two ingoing microchannels for the first and second Y-bifurcation are 72.5° 
and 80.7°, respectively. The sidewalls of outgoing microchannel in both cases are defined with 
<100> crystallographic directions and they are orthogonal to the surface of {100} silicon wafer. 
The appropriate widths of ingoing and outgoing microchannels are 300 and 400 μm, 
respectively. The depth of microchannels is 55 μm. All simulated flows are three-dimensional 
(3D), steady and laminar [4], while the investigated fluid is water. Velocities and pressure 
values are defined at the inlet and outlet boundaries, respectively. The resulting flows are 
illustrated by velocity contours. The obtained conclusions from fluid flow simulations of 
presented simple Y-bifurcations provide guidance for future fabrication of complex 
microfluidic platforms by a cost-effective process with good control over microchannel 
dimensions
PB  - Belgrade : University of Belgrade - Faculty of Mechanical Engineering
C3  - Booklet of Abstracts - 1st International Conference on Mathematical  Modelling in Mechanics and Engineering, 08.-10. September 2022., Belgrade, Serbia
T1  - Simulating flow in silicon Y-bifurcated microchannels
SP  - 46
EP  - 46
UR  - https://hdl.handle.net/21.15107/rcub_cer_5642
ER  - 

@conference{
author = "Svorcan, Jelena and Smiljanić, Milče M. and Vorkapić, Miloš",
year = "2022",
abstract = "Microfluidic devices are excessively used for various biomedical, chemical, and engineering 
applications. The most common microfluidic platforms are obtained from 
polydimethylsiloxane (PDMS). Platforms based on etched silicon wafers anodically bonded to 
Pyrex glass are more mechanically rigid, have better sealing and there is no gas permeability 
compared to those obtained from PDMS [1,2]. The aim of our work is to numerically analyze 
fluid flow in anisotropically etched silicon microchannels sealed with Pyrex glass. We present 
simulations of fluid flow in Y-bifurcated microchannels fabricated from the etched {100} 
silicon in 25 wt% tetramethylammonium hydroxide (TMAH) water solution at the temperature 
of 80°C [3]. We have explored two symmetrical Y-bifurcations that are defined with acute 
angles of 36.8° and 19° with the sides that are along the <310> and <610> crystallographic 
directions in the masking layer [3], respectively. The angles between obtained sidewalls and 
{100} silicon of two ingoing microchannels for the first and second Y-bifurcation are 72.5° 
and 80.7°, respectively. The sidewalls of outgoing microchannel in both cases are defined with 
<100> crystallographic directions and they are orthogonal to the surface of {100} silicon wafer. 
The appropriate widths of ingoing and outgoing microchannels are 300 and 400 μm, 
respectively. The depth of microchannels is 55 μm. All simulated flows are three-dimensional 
(3D), steady and laminar [4], while the investigated fluid is water. Velocities and pressure 
values are defined at the inlet and outlet boundaries, respectively. The resulting flows are 
illustrated by velocity contours. The obtained conclusions from fluid flow simulations of 
presented simple Y-bifurcations provide guidance for future fabrication of complex 
microfluidic platforms by a cost-effective process with good control over microchannel 
dimensions",
publisher = "Belgrade : University of Belgrade - Faculty of Mechanical Engineering",
journal = "Booklet of Abstracts - 1st International Conference on Mathematical  Modelling in Mechanics and Engineering, 08.-10. September 2022., Belgrade, Serbia",
title = "Simulating flow in silicon Y-bifurcated microchannels",
pages = "46-46",
url = "https://hdl.handle.net/21.15107/rcub_cer_5642"
}

Svorcan, J., Smiljanić, M. M.,& Vorkapić, M.. (2022). Simulating flow in silicon Y-bifurcated microchannels. in Booklet of Abstracts - 1st International Conference on Mathematical  Modelling in Mechanics and Engineering, 08.-10. September 2022., Belgrade, Serbia
Belgrade : University of Belgrade - Faculty of Mechanical Engineering., 46-46.
https://hdl.handle.net/21.15107/rcub_cer_5642

Svorcan J, Smiljanić MM, Vorkapić M. Simulating flow in silicon Y-bifurcated microchannels. in Booklet of Abstracts - 1st International Conference on Mathematical  Modelling in Mechanics and Engineering, 08.-10. September 2022., Belgrade, Serbia. 2022;:46-46.
https://hdl.handle.net/21.15107/rcub_cer_5642 .

Svorcan, Jelena, Smiljanić, Milče M., Vorkapić, Miloš, "Simulating flow in silicon Y-bifurcated microchannels" in Booklet of Abstracts - 1st International Conference on Mathematical  Modelling in Mechanics and Engineering, 08.-10. September 2022., Belgrade, Serbia (2022):46-46,
https://hdl.handle.net/21.15107/rcub_cer_5642 .

TY  - JOUR
AU  - Smiljanić, Milče M.
AU  - Radjenović, Branislav
AU  - Lazić, Žarko
AU  - Radmilović Radjenović, Marija
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović Zobenica, Katarina
AU  - Milinković, Evgenija
AU  - Filipović, Ana
PY  - 2021
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4453
AB  - In  this  paper,  fabrication  of  silicon  microchannels  with  integrated  obstacles  by  using  25 wt.% tetramethylammonium  hydroxide  (TMAH)  aqueous  solution  at  the  temperature  of  80 C  is presented  and  analysed.  We  studied  basic  island  patterns,  which present  union  of  two symmetrical parallelograms with the sides along predetermined crystallographic directions <n10> (2<n<8) and <100>. Acute angles of the parallelograms were smaller than 45o. We have derived analytical  relations  for  determining  dimensions  of  the  integrated  obstacles.  The  developed etching  technique  provides  reduction  of  the  distance  between  the  obstacles.  Before  the experiments, we performed simulations of pattern etching based on the level set method and presented  evolution  of  the  etched basic  patterns  for  the  predetermined  crystallographic directions  <n10>.  Combination  of  basic  patterns  with  sides  along  the  <610>  and  <100> crystallographic  directions  is  used  to  fabricate  a  matrix  of  two  row  of  silicon  obstacles  in  a microchannel.   We   obtained   a   good   agreement   between   the   experimental   results   and simulations.   Our   results   enable   simple  and   cost-effective  fabrication   of  various   complex microfluidic silicon platforms with integrated obstacles.
AB  - U ovom radu je prezentovana i analizirana izrada silicijumskih mikrokanala sa integrisanim preprekama u vodenom rastvoru 25 mas.% tetrametilamonijum hidroksida (TMAH) na temperaturi od 80 oC. Proučavani su osnovni oblici maski koji predstavljaju uniju dva simetrična ostrva u obliku paralelograma čije su stranice duž unapred određenih kristalografskih pravaca (2<n<8) i <100>. Oštri uglovi paralelograma su manji od 45˚. Izvedene su formule za izračunavanje dimenzija integrisanih prepreka. Razvijena je tehnika nagrizanja koja smanjuje rastojanje između prepreka. Pre eksperimenata izvršene su simulacije osnovnih oblika koje se baziraju na metodi implicitno definisanih nivoa (engl. level set method). Prezentovan je razvoj nagrizanih osnovnih oblika maski za unapred određene kristalografske pravce <n10>. Kombinacija osnovnih oblika maski čije su stranice duž kristalografskih pravaca <610> i <100> je iskorišćena za izradu dva reda matrice silicijumskih prepreka u mikrokanalu. Dobijeno je dobro slaganje između eksperimenata i simulacija. Dobijeni rezultati omogućavaju jednostavnu i jeftinu izradu različitih kompleksnih mikrofluidnih silicijumskih platformi sa integrisanim preprekama.
PB  - Association of Chemical Engeneers of Serbia
T2  - Hemijska industrija
T1  - Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH
T1  - Kontrolisan raspored integrisanih prepreka u silicijumskim mikrokanalima nagrizanim u 25 mas.% rastvoru tetrametilamonijum hidroksida
VL  - 75
IS  - 1
SP  - 15
EP  - 24
DO  - 10.2298/HEMIND200807005S
ER  - 

@article{
author = "Smiljanić, Milče M. and Radjenović, Branislav and Lazić, Žarko and Radmilović Radjenović, Marija and Rašljić Rafajilović, Milena and Cvetanović Zobenica, Katarina and Milinković, Evgenija and Filipović, Ana",
year = "2021",
abstract = "In  this  paper,  fabrication  of  silicon  microchannels  with  integrated  obstacles  by  using  25 wt.% tetramethylammonium  hydroxide  (TMAH)  aqueous  solution  at  the  temperature  of  80 C  is presented  and  analysed.  We  studied  basic  island  patterns,  which present  union  of  two symmetrical parallelograms with the sides along predetermined crystallographic directions <n10> (2<n<8) and <100>. Acute angles of the parallelograms were smaller than 45o. We have derived analytical  relations  for  determining  dimensions  of  the  integrated  obstacles.  The  developed etching  technique  provides  reduction  of  the  distance  between  the  obstacles.  Before  the experiments, we performed simulations of pattern etching based on the level set method and presented  evolution  of  the  etched basic  patterns  for  the  predetermined  crystallographic directions  <n10>.  Combination  of  basic  patterns  with  sides  along  the  <610>  and  <100> crystallographic  directions  is  used  to  fabricate  a  matrix  of  two  row  of  silicon  obstacles  in  a microchannel.   We   obtained   a   good   agreement   between   the   experimental   results   and simulations.   Our   results   enable   simple  and   cost-effective  fabrication   of  various   complex microfluidic silicon platforms with integrated obstacles., U ovom radu je prezentovana i analizirana izrada silicijumskih mikrokanala sa integrisanim preprekama u vodenom rastvoru 25 mas.% tetrametilamonijum hidroksida (TMAH) na temperaturi od 80 oC. Proučavani su osnovni oblici maski koji predstavljaju uniju dva simetrična ostrva u obliku paralelograma čije su stranice duž unapred određenih kristalografskih pravaca (2<n<8) i <100>. Oštri uglovi paralelograma su manji od 45˚. Izvedene su formule za izračunavanje dimenzija integrisanih prepreka. Razvijena je tehnika nagrizanja koja smanjuje rastojanje između prepreka. Pre eksperimenata izvršene su simulacije osnovnih oblika koje se baziraju na metodi implicitno definisanih nivoa (engl. level set method). Prezentovan je razvoj nagrizanih osnovnih oblika maski za unapred određene kristalografske pravce <n10>. Kombinacija osnovnih oblika maski čije su stranice duž kristalografskih pravaca <610> i <100> je iskorišćena za izradu dva reda matrice silicijumskih prepreka u mikrokanalu. Dobijeno je dobro slaganje između eksperimenata i simulacija. Dobijeni rezultati omogućavaju jednostavnu i jeftinu izradu različitih kompleksnih mikrofluidnih silicijumskih platformi sa integrisanim preprekama.",
publisher = "Association of Chemical Engeneers of Serbia",
journal = "Hemijska industrija",
title = "Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH, Kontrolisan raspored integrisanih prepreka u silicijumskim mikrokanalima nagrizanim u 25 mas.% rastvoru tetrametilamonijum hidroksida",
volume = "75",
number = "1",
pages = "15-24",
doi = "10.2298/HEMIND200807005S"
}

Smiljanić, M. M., Radjenović, B., Lazić, Ž., Radmilović Radjenović, M., Rašljić Rafajilović, M., Cvetanović Zobenica, K., Milinković, E.,& Filipović, A.. (2021). Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH. in Hemijska industrija
Association of Chemical Engeneers of Serbia., 75(1), 15-24.
https://doi.org/10.2298/HEMIND200807005S

Smiljanić MM, Radjenović B, Lazić Ž, Radmilović Radjenović M, Rašljić Rafajilović M, Cvetanović Zobenica K, Milinković E, Filipović A. Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH. in Hemijska industrija. 2021;75(1):15-24.
doi:10.2298/HEMIND200807005S .

Smiljanić, Milče M., Radjenović, Branislav, Lazić, Žarko, Radmilović Radjenović, Marija, Rašljić Rafajilović, Milena, Cvetanović Zobenica, Katarina, Milinković, Evgenija, Filipović, Ana, "Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH" in Hemijska industrija, 75, no. 1 (2021):15-24,
https://doi.org/10.2298/HEMIND200807005S . .

TY  - GEN
AU  - Sarajlić, Milija
AU  - Smiljanić, Milče M.
AU  - Frantlović, Miloš
AU  - Rašljić, Milena
AU  - Cvetanović, Katarina
AU  - Lazić, Žarko
AU  - Vasiljević-Radović, Dana
PY  - 2021
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4750
AB  - Ovo tehničko rešenje obuhvata razvoj i realizaciju senzora temperature čiji se princip rada zasniva na razlici temperaturnih koeficijenata električne otpornosti (TCR) četiri tankoslojna otpornika povezana u konfiguraciju Vitstonovog mosta. Ovo je nov pristup koji nije ranije korišćen. Sva četiri otpornika su izložena istoj temperaturi sa jedinom razlikom da su dva otpornika prekrivena tvrdo zapečenim (umreženim) fotorezistom debljine 2,3 mm dok su druga dva otvorena i izložena spoljnjem vazduhu. Ovo pravi temperaturnu razliku između otpornika a takođe i razliku temperaturnih koeficijenata otpornosti što u konfiguraciji Vitstonovog mosta daje signal proporcionalan ovoj razlici.
PB  - IHTM-Centar za mikroelektronske tehnologije
T2  - Tehničko rešenje
T1  - Senzor temperature za merenja u vazduhu zasnovan na razlici temperaturnih koeficijenata tankoslojnih otpornika
UR  - https://hdl.handle.net/21.15107/rcub_cer_4750
ER  - 

@misc{
author = "Sarajlić, Milija and Smiljanić, Milče M. and Frantlović, Miloš and Rašljić, Milena and Cvetanović, Katarina and Lazić, Žarko and Vasiljević-Radović, Dana",
year = "2021",
abstract = "Ovo tehničko rešenje obuhvata razvoj i realizaciju senzora temperature čiji se princip rada zasniva na razlici temperaturnih koeficijenata električne otpornosti (TCR) četiri tankoslojna otpornika povezana u konfiguraciju Vitstonovog mosta. Ovo je nov pristup koji nije ranije korišćen. Sva četiri otpornika su izložena istoj temperaturi sa jedinom razlikom da su dva otpornika prekrivena tvrdo zapečenim (umreženim) fotorezistom debljine 2,3 mm dok su druga dva otvorena i izložena spoljnjem vazduhu. Ovo pravi temperaturnu razliku između otpornika a takođe i razliku temperaturnih koeficijenata otpornosti što u konfiguraciji Vitstonovog mosta daje signal proporcionalan ovoj razlici.",
publisher = "IHTM-Centar za mikroelektronske tehnologije",
journal = "Tehničko rešenje",
title = "Senzor temperature za merenja u vazduhu zasnovan na razlici temperaturnih koeficijenata tankoslojnih otpornika",
url = "https://hdl.handle.net/21.15107/rcub_cer_4750"
}

Sarajlić, M., Smiljanić, M. M., Frantlović, M., Rašljić, M., Cvetanović, K., Lazić, Ž.,& Vasiljević-Radović, D.. (2021). Senzor temperature za merenja u vazduhu zasnovan na razlici temperaturnih koeficijenata tankoslojnih otpornika. in Tehničko rešenje
IHTM-Centar za mikroelektronske tehnologije..
https://hdl.handle.net/21.15107/rcub_cer_4750

Sarajlić M, Smiljanić MM, Frantlović M, Rašljić M, Cvetanović K, Lazić Ž, Vasiljević-Radović D. Senzor temperature za merenja u vazduhu zasnovan na razlici temperaturnih koeficijenata tankoslojnih otpornika. in Tehničko rešenje. 2021;.
https://hdl.handle.net/21.15107/rcub_cer_4750 .

Sarajlić, Milija, Smiljanić, Milče M., Frantlović, Miloš, Rašljić, Milena, Cvetanović, Katarina, Lazić, Žarko, Vasiljević-Radović, Dana, "Senzor temperature za merenja u vazduhu zasnovan na razlici temperaturnih koeficijenata tankoslojnih otpornika" in Tehničko rešenje (2021),
https://hdl.handle.net/21.15107/rcub_cer_4750 .

TY  - CONF
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Milinković, Evgenija
AU  - Cvetanović, Katarina
AU  - Rašljić Rafajilović, Milena
PY  - 2021
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4855
AB  - In this paper, a new concave corner compensation for etching of (100) silicon substrates in 25 wt % TMAH water solution at the temperature of 80°C is presented and analysed. The aim of developed technique is to reduce area of the etched {111} planes when there is a need to obtain 3D silicon structures with sidewalls vertical to substrate's surface. Appearance of the slow etching {111} planes cannot be eliminated. All crystallographic planes that appeared during evolution of etched compensations are determined. All the parameters necessary to apply developed concave corner compensation in various designs are provided. As a result, the side along the [removed] crystallographic direction in the masking layer of the unwanted {111} planes is reduced approximately 3 times.
PB  - Belgrade : Institute of Electrical and Electronics Engineers Inc.
C3  - 32nd IEEE International Conference on Microelectronics, MIEL 2021
T1  - A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution
SP  - 193
EP  - 196
DO  - 10.1109/MIEL52794.2021.9569186
ER  - 

@conference{
author = "Smiljanić, Milče M. and Lazić, Žarko and Milinković, Evgenija and Cvetanović, Katarina and Rašljić Rafajilović, Milena",
year = "2021",
abstract = "In this paper, a new concave corner compensation for etching of (100) silicon substrates in 25 wt % TMAH water solution at the temperature of 80°C is presented and analysed. The aim of developed technique is to reduce area of the etched {111} planes when there is a need to obtain 3D silicon structures with sidewalls vertical to substrate's surface. Appearance of the slow etching {111} planes cannot be eliminated. All crystallographic planes that appeared during evolution of etched compensations are determined. All the parameters necessary to apply developed concave corner compensation in various designs are provided. As a result, the side along the [removed] crystallographic direction in the masking layer of the unwanted {111} planes is reduced approximately 3 times.",
publisher = "Belgrade : Institute of Electrical and Electronics Engineers Inc.",
journal = "32nd IEEE International Conference on Microelectronics, MIEL 2021",
title = "A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution",
pages = "193-196",
doi = "10.1109/MIEL52794.2021.9569186"
}

Smiljanić, M. M., Lazić, Ž., Milinković, E., Cvetanović, K.,& Rašljić Rafajilović, M.. (2021). A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution. in 32nd IEEE International Conference on Microelectronics, MIEL 2021
Belgrade : Institute of Electrical and Electronics Engineers Inc.., 193-196.
https://doi.org/10.1109/MIEL52794.2021.9569186

Smiljanić MM, Lazić Ž, Milinković E, Cvetanović K, Rašljić Rafajilović M. A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution. in 32nd IEEE International Conference on Microelectronics, MIEL 2021. 2021;:193-196.
doi:10.1109/MIEL52794.2021.9569186 .

Smiljanić, Milče M., Lazić, Žarko, Milinković, Evgenija, Cvetanović, Katarina, Rašljić Rafajilović, Milena, "A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution" in 32nd IEEE International Conference on Microelectronics, MIEL 2021 (2021):193-196,
https://doi.org/10.1109/MIEL52794.2021.9569186 . .

TY  - JOUR
AU  - Andrić, Stevan
AU  - Tomašević-Ilić, Tijana
AU  - Bošković, Marko V.
AU  - Sarajlić, Milija
AU  - Vasiljević-Radović, Dana
AU  - Smiljanić, Milče M.
AU  - Spasenović, Marko
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3993
AB  - Humidity sensing is important to a variety of technologies and industries, ranging from environmental and industrial monitoring to medical applications. Although humidity sensors abound, few available solutions are thin, transparent, compatible with large-area sensor production and flexible, and almost none are fast enough to perform human respiration monitoring through breath detection or real-time finger proximity monitoring via skin humidity sensing. This work describes chemiresistive graphene-based humidity sensors produced in few steps with facile liquid phase exfoliation followed by Langmuir–Blodgett assembly that enables active areas of practically any size. The graphene sensors provide a unique mix of performance parameters, exhibiting resistance changes up to 10% with varying humidity, linear performance over relative humidity (RH) levels between 8% and 95%, weak response to other constituents of air, flexibility, transparency of nearly 80%, and response times of 30 ms. The fast response to humidity is shown to be useful for respiration monitoring and real-time finger proximity detection, with potential applications in flexible touchless interactive panels.
PB  - IOP Publishing
T2  - Nanotechnology
T1  - Ultrafast humidity sensor based on liquid phase exfoliated graphene
VL  - 32
IS  - 2
SP  - 025505
DO  - 10.1088/1361-6528/abb973
ER  - 

@article{
author = "Andrić, Stevan and Tomašević-Ilić, Tijana and Bošković, Marko V. and Sarajlić, Milija and Vasiljević-Radović, Dana and Smiljanić, Milče M. and Spasenović, Marko",
year = "2020",
abstract = "Humidity sensing is important to a variety of technologies and industries, ranging from environmental and industrial monitoring to medical applications. Although humidity sensors abound, few available solutions are thin, transparent, compatible with large-area sensor production and flexible, and almost none are fast enough to perform human respiration monitoring through breath detection or real-time finger proximity monitoring via skin humidity sensing. This work describes chemiresistive graphene-based humidity sensors produced in few steps with facile liquid phase exfoliation followed by Langmuir–Blodgett assembly that enables active areas of practically any size. The graphene sensors provide a unique mix of performance parameters, exhibiting resistance changes up to 10% with varying humidity, linear performance over relative humidity (RH) levels between 8% and 95%, weak response to other constituents of air, flexibility, transparency of nearly 80%, and response times of 30 ms. The fast response to humidity is shown to be useful for respiration monitoring and real-time finger proximity detection, with potential applications in flexible touchless interactive panels.",
publisher = "IOP Publishing",
journal = "Nanotechnology",
title = "Ultrafast humidity sensor based on liquid phase exfoliated graphene",
volume = "32",
number = "2",
pages = "025505",
doi = "10.1088/1361-6528/abb973"
}

Andrić, S., Tomašević-Ilić, T., Bošković, M. V., Sarajlić, M., Vasiljević-Radović, D., Smiljanić, M. M.,& Spasenović, M.. (2020). Ultrafast humidity sensor based on liquid phase exfoliated graphene. in Nanotechnology
IOP Publishing., 32(2), 025505.
https://doi.org/10.1088/1361-6528/abb973

Andrić S, Tomašević-Ilić T, Bošković MV, Sarajlić M, Vasiljević-Radović D, Smiljanić MM, Spasenović M. Ultrafast humidity sensor based on liquid phase exfoliated graphene. in Nanotechnology. 2020;32(2):025505.
doi:10.1088/1361-6528/abb973 .

Andrić, Stevan, Tomašević-Ilić, Tijana, Bošković, Marko V., Sarajlić, Milija, Vasiljević-Radović, Dana, Smiljanić, Milče M., Spasenović, Marko, "Ultrafast humidity sensor based on liquid phase exfoliated graphene" in Nanotechnology, 32, no. 2 (2020):025505,
https://doi.org/10.1088/1361-6528/abb973 . .

TY  - CONF
AU  - Cvetanović Zobenica, Katarina
AU  - Tadić, Nenad
AU  - Lačnjevac, Uroš
AU  - Milinković, Evgenija
AU  - Rašljić Rafajilović, Milena
AU  - Smiljanić, Milče M.
AU  - Vasiljević-Radović, Dana
AU  - Stanisavljev, Dragomir
PY  - 2020
UR  - https://www.etran.rs/2020/IcETRAN/About_Conference/
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4001
AB  - Dye Sensitized Solar cells (DSSC) are very attractive due to their low cost fabricating methods and used materials. One of the most important parts of the cells is the photoanode. Many semiconducting materials are used for this purpose, but most common one is titanium dioxide (TiO2). Optimal sintering temperature of anode plays important role in performance of TiO2 layer in DSSC, since it provides good electrical contact between particles, which consequently leads to better electron transfer through the cell, but still restricts unfavorable phase transformation. In this paper two identical cells with natural pigment hypericin as sensitizer were assembled with anodes sintered on two different temperatures (500 °C and 600 °C), so their performance parameters could be compared. The ratios between the maximal power densities (Pmax) and solar to electrical energy conversion efficiencies (η) for the two measured cells are 5 times in favor for the cell sintered at 600 °C, which shows the importance of temperature treatment of TiO2 electrodes for better performance of solar cells.
PB  - Belgrade : ETRAN Society
C3  - Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020
T1  - Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin
UR  - https://hdl.handle.net/21.15107/rcub_cer_4001
ER  - 

@conference{
author = "Cvetanović Zobenica, Katarina and Tadić, Nenad and Lačnjevac, Uroš and Milinković, Evgenija and Rašljić Rafajilović, Milena and Smiljanić, Milče M. and Vasiljević-Radović, Dana and Stanisavljev, Dragomir",
year = "2020",
abstract = "Dye Sensitized Solar cells (DSSC) are very attractive due to their low cost fabricating methods and used materials. One of the most important parts of the cells is the photoanode. Many semiconducting materials are used for this purpose, but most common one is titanium dioxide (TiO2). Optimal sintering temperature of anode plays important role in performance of TiO2 layer in DSSC, since it provides good electrical contact between particles, which consequently leads to better electron transfer through the cell, but still restricts unfavorable phase transformation. In this paper two identical cells with natural pigment hypericin as sensitizer were assembled with anodes sintered on two different temperatures (500 °C and 600 °C), so their performance parameters could be compared. The ratios between the maximal power densities (Pmax) and solar to electrical energy conversion efficiencies (η) for the two measured cells are 5 times in favor for the cell sintered at 600 °C, which shows the importance of temperature treatment of TiO2 electrodes for better performance of solar cells.",
publisher = "Belgrade : ETRAN Society",
journal = "Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020",
title = "Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin",
url = "https://hdl.handle.net/21.15107/rcub_cer_4001"
}

Cvetanović Zobenica, K., Tadić, N., Lačnjevac, U., Milinković, E., Rašljić Rafajilović, M., Smiljanić, M. M., Vasiljević-Radović, D.,& Stanisavljev, D.. (2020). Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin. in Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020
Belgrade : ETRAN Society..
https://hdl.handle.net/21.15107/rcub_cer_4001

Cvetanović Zobenica K, Tadić N, Lačnjevac U, Milinković E, Rašljić Rafajilović M, Smiljanić MM, Vasiljević-Radović D, Stanisavljev D. Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin. in Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020. 2020;.
https://hdl.handle.net/21.15107/rcub_cer_4001 .

Cvetanović Zobenica, Katarina, Tadić, Nenad, Lačnjevac, Uroš, Milinković, Evgenija, Rašljić Rafajilović, Milena, Smiljanić, Milče M., Vasiljević-Radović, Dana, Stanisavljev, Dragomir, "Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin" in Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020 (2020),
https://hdl.handle.net/21.15107/rcub_cer_4001 .

TY  - JOUR
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović Zobenica, Katarina
AU  - Milinković, Evgenija
AU  - Filipović, Ana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4002
AB  - In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.
PB  - IOP Publishing
T2  - Journal of Micromechanics and Microengineering
T1  - Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
VL  - 31
SP  - 017001
DO  - 10.1088/1361-6439/abcb67
ER  - 

@article{
author = "Smiljanić, Milče M. and Lazić, Žarko and Rašljić Rafajilović, Milena and Cvetanović Zobenica, Katarina and Milinković, Evgenija and Filipović, Ana",
year = "2020",
abstract = "In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.",
publisher = "IOP Publishing",
journal = "Journal of Micromechanics and Microengineering",
title = "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution",
volume = "31",
pages = "017001",
doi = "10.1088/1361-6439/abcb67"
}

Smiljanić, M. M., Lazić, Ž., Rašljić Rafajilović, M., Cvetanović Zobenica, K., Milinković, E.,& Filipović, A.. (2020). Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering
IOP Publishing., 31, 017001.
https://doi.org/10.1088/1361-6439/abcb67

Smiljanić MM, Lazić Ž, Rašljić Rafajilović M, Cvetanović Zobenica K, Milinković E, Filipović A. Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering. 2020;31:017001.
doi:10.1088/1361-6439/abcb67 .

Smiljanić, Milče M., Lazić, Žarko, Rašljić Rafajilović, Milena, Cvetanović Zobenica, Katarina, Milinković, Evgenija, Filipović, Ana, "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution" in Journal of Micromechanics and Microengineering, 31 (2020):017001,
https://doi.org/10.1088/1361-6439/abcb67 . .

TY  - JOUR
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović Zobenica, Katarina
AU  - Milinković, Evgenija
AU  - Filipović, Ana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4003
AB  - In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.
PB  - IOP Publishing
T2  - Journal of Micromechanics and Microengineering
T1  - Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
VL  - 31
SP  - 017001
DO  - 10.1088/1361-6439/abcb67
ER  - 

@article{
author = "Smiljanić, Milče M. and Lazić, Žarko and Rašljić Rafajilović, Milena and Cvetanović Zobenica, Katarina and Milinković, Evgenija and Filipović, Ana",
year = "2020",
abstract = "In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.",
publisher = "IOP Publishing",
journal = "Journal of Micromechanics and Microengineering",
title = "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution",
volume = "31",
pages = "017001",
doi = "10.1088/1361-6439/abcb67"
}

Smiljanić, M. M., Lazić, Ž., Rašljić Rafajilović, M., Cvetanović Zobenica, K., Milinković, E.,& Filipović, A.. (2020). Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering
IOP Publishing., 31, 017001.
https://doi.org/10.1088/1361-6439/abcb67

Smiljanić MM, Lazić Ž, Rašljić Rafajilović M, Cvetanović Zobenica K, Milinković E, Filipović A. Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering. 2020;31:017001.
doi:10.1088/1361-6439/abcb67 .

Smiljanić, Milče M., Lazić, Žarko, Rašljić Rafajilović, Milena, Cvetanović Zobenica, Katarina, Milinković, Evgenija, Filipović, Ana, "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution" in Journal of Micromechanics and Microengineering, 31 (2020):017001,
https://doi.org/10.1088/1361-6439/abcb67 . .

TY  - JOUR
AU  - Rašljić Rafajilović, Milena
AU  - Radulović, Katarina
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Jakšić, Zoran
AU  - Stanisavljev, Dragomir
AU  - Vasiljević-Radović, Dana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4009
AB  - We present the design, simulation, fabrication and characterization of monolithically
integrated high resistivity p-type boron-di used silicon two-zone heaters in a model high temperature
microreactor intended for nanoparticle fabrication. We used a finite element method for simulations
of the heaters’ operation and performance. Our experimental model reactor structure consisted of
a silicon wafer anodically bonded to a Pyrex glass wafer with an isotropically etched serpentine
microchannels network. We fabricated two separate spiral heaters with di erent temperatures,
mutually thermally isolated by barrier apertures etched throughout the silicon wafer. The heaters
were characterized by electric measurements and by infrared thermal vision. The obtained results
show that our proposed procedure for the heater fabrication is robust, stable and controllable, with a
decreased sensitivity to random variations of fabrication process parameters. Compared to metallic or
polysilicon heaters typically integrated into microreactors, our approach o ers improved control over
heater characteristics through adjustment of the Boron doping level and profile. Our microreactor is
intended to produce titanium dioxide nanoparticles, but it could be also used to fabricate nanoparticles
in di erent materials as well, with various parameters and geometries. Our method can be generally
applied to other high-temperature microsystems.
PB  - MDPI
T2  - Micromachines
T1  - Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.
VL  - 11
IS  - 9
SP  - 818
DO  - 10.3390/mi11090818
ER  - 

@article{
author = "Rašljić Rafajilović, Milena and Radulović, Katarina and Smiljanić, Milče M. and Lazić, Žarko and Jakšić, Zoran and Stanisavljev, Dragomir and Vasiljević-Radović, Dana",
year = "2020",
abstract = "We present the design, simulation, fabrication and characterization of monolithically
integrated high resistivity p-type boron-di used silicon two-zone heaters in a model high temperature
microreactor intended for nanoparticle fabrication. We used a finite element method for simulations
of the heaters’ operation and performance. Our experimental model reactor structure consisted of
a silicon wafer anodically bonded to a Pyrex glass wafer with an isotropically etched serpentine
microchannels network. We fabricated two separate spiral heaters with di erent temperatures,
mutually thermally isolated by barrier apertures etched throughout the silicon wafer. The heaters
were characterized by electric measurements and by infrared thermal vision. The obtained results
show that our proposed procedure for the heater fabrication is robust, stable and controllable, with a
decreased sensitivity to random variations of fabrication process parameters. Compared to metallic or
polysilicon heaters typically integrated into microreactors, our approach o ers improved control over
heater characteristics through adjustment of the Boron doping level and profile. Our microreactor is
intended to produce titanium dioxide nanoparticles, but it could be also used to fabricate nanoparticles
in di erent materials as well, with various parameters and geometries. Our method can be generally
applied to other high-temperature microsystems.",
publisher = "MDPI",
journal = "Micromachines",
title = "Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.",
volume = "11",
number = "9",
pages = "818",
doi = "10.3390/mi11090818"
}

Rašljić Rafajilović, M., Radulović, K., Smiljanić, M. M., Lazić, Ž., Jakšić, Z., Stanisavljev, D.,& Vasiljević-Radović, D.. (2020). Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.. in Micromachines
MDPI., 11(9), 818.
https://doi.org/10.3390/mi11090818

Rašljić Rafajilović M, Radulović K, Smiljanić MM, Lazić Ž, Jakšić Z, Stanisavljev D, Vasiljević-Radović D. Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.. in Micromachines. 2020;11(9):818.
doi:10.3390/mi11090818 .

Rašljić Rafajilović, Milena, Radulović, Katarina, Smiljanić, Milče M., Lazić, Žarko, Jakšić, Zoran, Stanisavljev, Dragomir, Vasiljević-Radović, Dana, "Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects." in Micromachines, 11, no. 9 (2020):818,
https://doi.org/10.3390/mi11090818 . .

TY  - JOUR
AU  - Bošković, Marko V.
AU  - Sarajlić, Milija
AU  - Frantlović, Miloš
AU  - Smiljanić, Milče M.
AU  - Randjelović, Danijela
AU  - Cvetanović Zobenica, Katarina
AU  - Vasiljević-Radović, Dana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3678
AB  - An aluminum-based, self-powered, miniaturized sensor for breath humidity detection is presented. The sensor is designed as an interdigitated capacitor made out of sputtered aluminum 1 % silicon (Al 1 %Si) thin film, 700 nm thickness, with digits 1.5 mm long, 0.01 mm wide and 0.01 mm clearance between them. The voltage on the open end of the sensor is generated when the surface is covered with a thin layer of water vapor, for instance if a person blows on it. The voltage generated is up to 1.5 V. The voltage generation is based on an electrochemical process of interaction between aluminum, water and oxygen from air, similar to the operation of an aluminum-air battery. The rise time of the signal during water vapor (or breath) detection is as small as 10 ms which makes it one of the fastest humidity sensors reported to date. The relaxation time is in the range of 50 ms. To make detection possible, the sensor surface needs to be activated by native oxide removal with the help of electric current and de-mineralized water droplet. Usability of the sensor was demonstrated in the detection of human breathing, where the sensor managed to follow the cycles of inhaling and exhaling.
PB  - Elsevier
T2  - Sensors and Actuators: B. Chemical
T1  - Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection
VL  - 321
SP  - 128635
DO  - 10.1016/j.snb.2020.128635
ER  - 

@article{
author = "Bošković, Marko V. and Sarajlić, Milija and Frantlović, Miloš and Smiljanić, Milče M. and Randjelović, Danijela and Cvetanović Zobenica, Katarina and Vasiljević-Radović, Dana",
year = "2020",
abstract = "An aluminum-based, self-powered, miniaturized sensor for breath humidity detection is presented. The sensor is designed as an interdigitated capacitor made out of sputtered aluminum 1 % silicon (Al 1 %Si) thin film, 700 nm thickness, with digits 1.5 mm long, 0.01 mm wide and 0.01 mm clearance between them. The voltage on the open end of the sensor is generated when the surface is covered with a thin layer of water vapor, for instance if a person blows on it. The voltage generated is up to 1.5 V. The voltage generation is based on an electrochemical process of interaction between aluminum, water and oxygen from air, similar to the operation of an aluminum-air battery. The rise time of the signal during water vapor (or breath) detection is as small as 10 ms which makes it one of the fastest humidity sensors reported to date. The relaxation time is in the range of 50 ms. To make detection possible, the sensor surface needs to be activated by native oxide removal with the help of electric current and de-mineralized water droplet. Usability of the sensor was demonstrated in the detection of human breathing, where the sensor managed to follow the cycles of inhaling and exhaling.",
publisher = "Elsevier",
journal = "Sensors and Actuators: B. Chemical",
title = "Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection",
volume = "321",
pages = "128635",
doi = "10.1016/j.snb.2020.128635"
}

Bošković, M. V., Sarajlić, M., Frantlović, M., Smiljanić, M. M., Randjelović, D., Cvetanović Zobenica, K.,& Vasiljević-Radović, D.. (2020). Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection. in Sensors and Actuators: B. Chemical
Elsevier., 321, 128635.
https://doi.org/10.1016/j.snb.2020.128635

Bošković MV, Sarajlić M, Frantlović M, Smiljanić MM, Randjelović D, Cvetanović Zobenica K, Vasiljević-Radović D. Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection. in Sensors and Actuators: B. Chemical. 2020;321:128635.
doi:10.1016/j.snb.2020.128635 .

Bošković, Marko V., Sarajlić, Milija, Frantlović, Miloš, Smiljanić, Milče M., Randjelović, Danijela, Cvetanović Zobenica, Katarina, Vasiljević-Radović, Dana, "Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection" in Sensors and Actuators: B. Chemical, 321 (2020):128635,
https://doi.org/10.1016/j.snb.2020.128635 . .

TY  - JOUR
AU  - Bošković, Marko V.
AU  - Sarajlić, Milija
AU  - Frantlović, Miloš
AU  - Smiljanić, Milče M.
AU  - Randjelović, Danijela
AU  - Cvetanović Zobenica, Katarina
AU  - Vasiljević-Radović, Dana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3679
AB  - An aluminum-based, self-powered, miniaturized sensor for breath humidity detection is presented. The sensor is designed as an interdigitated capacitor made out of sputtered aluminum 1 % silicon (Al 1 %Si) thin film, 700 nm thickness, with digits 1.5 mm long, 0.01 mm wide and 0.01 mm clearance between them. The voltage on the open end of the sensor is generated when the surface is covered with a thin layer of water vapor, for instance if a person blows on it. The voltage generated is up to 1.5 V. The voltage generation is based on an electrochemical process of interaction between aluminum, water and oxygen from air, similar to the operation of an aluminum-air battery. The rise time of the signal during water vapor (or breath) detection is as small as 10 ms which makes it one of the fastest humidity sensors reported to date. The relaxation time is in the range of 50 ms. To make detection possible, the sensor surface needs to be activated by native oxide removal with the help of electric current and de-mineralized water droplet. Usability of the sensor was demonstrated in the detection of human breathing, where the sensor managed to follow the cycles of inhaling and exhaling.
PB  - Elsevier
T2  - Sensors and Actuators: B. Chemical
T1  - Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection
VL  - 321
SP  - 128635
DO  - 10.1016/j.snb.2020.128635
ER  - 

@article{
author = "Bošković, Marko V. and Sarajlić, Milija and Frantlović, Miloš and Smiljanić, Milče M. and Randjelović, Danijela and Cvetanović Zobenica, Katarina and Vasiljević-Radović, Dana",
year = "2020",
abstract = "An aluminum-based, self-powered, miniaturized sensor for breath humidity detection is presented. The sensor is designed as an interdigitated capacitor made out of sputtered aluminum 1 % silicon (Al 1 %Si) thin film, 700 nm thickness, with digits 1.5 mm long, 0.01 mm wide and 0.01 mm clearance between them. The voltage on the open end of the sensor is generated when the surface is covered with a thin layer of water vapor, for instance if a person blows on it. The voltage generated is up to 1.5 V. The voltage generation is based on an electrochemical process of interaction between aluminum, water and oxygen from air, similar to the operation of an aluminum-air battery. The rise time of the signal during water vapor (or breath) detection is as small as 10 ms which makes it one of the fastest humidity sensors reported to date. The relaxation time is in the range of 50 ms. To make detection possible, the sensor surface needs to be activated by native oxide removal with the help of electric current and de-mineralized water droplet. Usability of the sensor was demonstrated in the detection of human breathing, where the sensor managed to follow the cycles of inhaling and exhaling.",
publisher = "Elsevier",
journal = "Sensors and Actuators: B. Chemical",
title = "Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection",
volume = "321",
pages = "128635",
doi = "10.1016/j.snb.2020.128635"
}

Bošković, M. V., Sarajlić, M., Frantlović, M., Smiljanić, M. M., Randjelović, D., Cvetanović Zobenica, K.,& Vasiljević-Radović, D.. (2020). Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection. in Sensors and Actuators: B. Chemical
Elsevier., 321, 128635.
https://doi.org/10.1016/j.snb.2020.128635

Bošković MV, Sarajlić M, Frantlović M, Smiljanić MM, Randjelović D, Cvetanović Zobenica K, Vasiljević-Radović D. Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection. in Sensors and Actuators: B. Chemical. 2020;321:128635.
doi:10.1016/j.snb.2020.128635 .

Bošković, Marko V., Sarajlić, Milija, Frantlović, Miloš, Smiljanić, Milče M., Randjelović, Danijela, Cvetanović Zobenica, Katarina, Vasiljević-Radović, Dana, "Aluminum-based self-powered hyper-fast miniaturized sensor for breath humidity detection" in Sensors and Actuators: B. Chemical, 321 (2020):128635,
https://doi.org/10.1016/j.snb.2020.128635 . .

TY  - GEN
AU  - Rađenović, Branislav
AU  - Smiljanić, Milče M.
AU  - Radmilović Rađenović, Marija
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3977
AB  - U zapreminskom mikromašinstvu procesom vlažnog hemijskog nagrizanja odstranjuje se
nepotrebni silicijum u otvoru maskirajućeg materijala i formiraju se kompleksni trodimenzionalni oblici. Dobijeni trodimenzionalni oblici predstavljaju neku vrstu projekcije dvodimenzionalnog, planarnog lika sa maske u treću dimenziju, koja je ovom slučaju debljina silicijumske pločice i prostiru se do dubine nagrizanja. Za vreme anizotropnog vlažnog hemijskog nagrizanja silicijuma u vodenom rastvoru TMAH koncentracije 25 tež. % TMAH na temperaturi od 80 °C različite kristalografske ravni se nagrizaju različitim brzinama. Zbog različitih brzina nagrizanja neke ravni će se pojavljivati tokom nagrizanja dok će druge nestajati. Tokom nagrizanja javlja se problem podgrizanja konveksnih uglova i pojave
određenih kristalografski ravni koje deformišu trodimenzionalne silicijumske strukture. Problem podgrizanja se može rešiti direktnim uračunavanjem ove pojave u projektovanju i kompenzacijom dodavanjem viška materijala na mestima koja se brže nagrizaju (strukture za kompenzaciju). Projektovanje željenog oblika u zapreminskom mikromašinstvu je najčešće veoma komplikovano i zahteva puno eksperimentalnog rada da bi se predvidelo kako se ponaša odgovarajuće sredstvo za nagrizanje. Eskperimentalni rad zahteva potrošnju silicijumskih pločica i sredstva za nagrizanje, kao i primenu procesa termičke oksidacije i hemijskih pranja u pripremi za eksperiment. Razvoj softvera za simulaciju nagrizanja silicijuma u anizotropnom vodenom rastvori smanjuje troškove razvoja i proizvodnje u IHTM-CMT jer se pre izrade silicijumske strukture mogu simulirati različite maske i izabrati onaj dizajn koji je najbolji.
T1  - Softver za simulaciju nagrizanja silicijuma LSPro
UR  - https://hdl.handle.net/21.15107/rcub_cer_3977
ER  - 

@misc{
author = "Rađenović, Branislav and Smiljanić, Milče M. and Radmilović Rađenović, Marija",
year = "2020",
abstract = "U zapreminskom mikromašinstvu procesom vlažnog hemijskog nagrizanja odstranjuje se
nepotrebni silicijum u otvoru maskirajućeg materijala i formiraju se kompleksni trodimenzionalni oblici. Dobijeni trodimenzionalni oblici predstavljaju neku vrstu projekcije dvodimenzionalnog, planarnog lika sa maske u treću dimenziju, koja je ovom slučaju debljina silicijumske pločice i prostiru se do dubine nagrizanja. Za vreme anizotropnog vlažnog hemijskog nagrizanja silicijuma u vodenom rastvoru TMAH koncentracije 25 tež. % TMAH na temperaturi od 80 °C različite kristalografske ravni se nagrizaju različitim brzinama. Zbog različitih brzina nagrizanja neke ravni će se pojavljivati tokom nagrizanja dok će druge nestajati. Tokom nagrizanja javlja se problem podgrizanja konveksnih uglova i pojave
određenih kristalografski ravni koje deformišu trodimenzionalne silicijumske strukture. Problem podgrizanja se može rešiti direktnim uračunavanjem ove pojave u projektovanju i kompenzacijom dodavanjem viška materijala na mestima koja se brže nagrizaju (strukture za kompenzaciju). Projektovanje željenog oblika u zapreminskom mikromašinstvu je najčešće veoma komplikovano i zahteva puno eksperimentalnog rada da bi se predvidelo kako se ponaša odgovarajuće sredstvo za nagrizanje. Eskperimentalni rad zahteva potrošnju silicijumskih pločica i sredstva za nagrizanje, kao i primenu procesa termičke oksidacije i hemijskih pranja u pripremi za eksperiment. Razvoj softvera za simulaciju nagrizanja silicijuma u anizotropnom vodenom rastvori smanjuje troškove razvoja i proizvodnje u IHTM-CMT jer se pre izrade silicijumske strukture mogu simulirati različite maske i izabrati onaj dizajn koji je najbolji.",
title = "Softver za simulaciju nagrizanja silicijuma LSPro",
url = "https://hdl.handle.net/21.15107/rcub_cer_3977"
}

Rađenović, B., Smiljanić, M. M.,& Radmilović Rađenović, M.. (2020). Softver za simulaciju nagrizanja silicijuma LSPro. .
https://hdl.handle.net/21.15107/rcub_cer_3977

Rađenović B, Smiljanić MM, Radmilović Rađenović M. Softver za simulaciju nagrizanja silicijuma LSPro. 2020;.
https://hdl.handle.net/21.15107/rcub_cer_3977 .

Rađenović, Branislav, Smiljanić, Milče M., Radmilović Rađenović, Marija, "Softver za simulaciju nagrizanja silicijuma LSPro" (2020),
https://hdl.handle.net/21.15107/rcub_cer_3977 .

TY  - JOUR
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Jović, Vesna
AU  - Radjenović, Branislav
AU  - Radmilović-Radjenović, Marija
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3490
AB  - This paper presents etching of convex corners with sides along <n10> and <100> crystallographic directions in a 25 wt% tetramethylammonium hydroxide (TMAH) water solution at 80 °C. We analyzed parallelograms as the mask patterns for anisotropic wet etching of Si (100). The sides of the parallelograms were designed along <n10> and <100> crystallographic directions (1 < n < 8). The acute corners of islands in the masking layer formed by <n10> and <100> crystallographic directions were smaller than 45°. All the crystallographic planes that appeared during etching in the experiment were determined. We found that the obtained types of 3D silicon shape sustain when n > 2. The convex corners were not distorted during etching. Therefore, no convex corner compensation is necessary. We fabricated three matrices of parallelograms with sides along crystallographic directions <310> and <100> as examples for possible applications. Additionally, the etching of matrices was simulated by the level set method. We obtained a good agreement between experiments and simulations.
PB  - MDPI
T2  - Micromachines
T1  - Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C
VL  - 11
IS  - 3
SP  - 253
DO  - 10.3390/mi11030253
ER  - 

@article{
author = "Smiljanić, Milče M. and Lazić, Žarko and Jović, Vesna and Radjenović, Branislav and Radmilović-Radjenović, Marija",
year = "2020",
abstract = "This paper presents etching of convex corners with sides along <n10> and <100> crystallographic directions in a 25 wt% tetramethylammonium hydroxide (TMAH) water solution at 80 °C. We analyzed parallelograms as the mask patterns for anisotropic wet etching of Si (100). The sides of the parallelograms were designed along <n10> and <100> crystallographic directions (1 < n < 8). The acute corners of islands in the masking layer formed by <n10> and <100> crystallographic directions were smaller than 45°. All the crystallographic planes that appeared during etching in the experiment were determined. We found that the obtained types of 3D silicon shape sustain when n > 2. The convex corners were not distorted during etching. Therefore, no convex corner compensation is necessary. We fabricated three matrices of parallelograms with sides along crystallographic directions <310> and <100> as examples for possible applications. Additionally, the etching of matrices was simulated by the level set method. We obtained a good agreement between experiments and simulations.",
publisher = "MDPI",
journal = "Micromachines",
title = "Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C",
volume = "11",
number = "3",
pages = "253",
doi = "10.3390/mi11030253"
}

Smiljanić, M. M., Lazić, Ž., Jović, V., Radjenović, B.,& Radmilović-Radjenović, M.. (2020). Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C. in Micromachines
MDPI., 11(3), 253.
https://doi.org/10.3390/mi11030253

Smiljanić MM, Lazić Ž, Jović V, Radjenović B, Radmilović-Radjenović M. Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C. in Micromachines. 2020;11(3):253.
doi:10.3390/mi11030253 .

Smiljanić, Milče M., Lazić, Žarko, Jović, Vesna, Radjenović, Branislav, Radmilović-Radjenović, Marija, "Etching of Uncompensated Convex Corners with Sides along <n10> and <100> in 25 wt% TMAH at 80 °C" in Micromachines, 11, no. 3 (2020):253,
https://doi.org/10.3390/mi11030253 . .

TY  - JOUR
AU  - Vasić, Borislav
AU  - Ralević, Uroš
AU  - Cvetanović Zobenica, Katarina
AU  - Smiljanić, Milče M.
AU  - Gajić, Radoš
AU  - Spasenović, Marko
AU  - Vollebregt, Sten
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3351
AB  - Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.
PB  - Elsevier
T2  - Applied Surface Science
T1  - Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum
DO  - 10.1016/j.apsusc.2019.144792
ER  - 

@article{
author = "Vasić, Borislav and Ralević, Uroš and Cvetanović Zobenica, Katarina and Smiljanić, Milče M. and Gajić, Radoš and Spasenović, Marko and Vollebregt, Sten",
year = "2020",
abstract = "Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.",
publisher = "Elsevier",
journal = "Applied Surface Science",
title = "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum",
doi = "10.1016/j.apsusc.2019.144792"
}

Vasić, B., Ralević, U., Cvetanović Zobenica, K., Smiljanić, M. M., Gajić, R., Spasenović, M.,& Vollebregt, S.. (2020). Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science
Elsevier..
https://doi.org/10.1016/j.apsusc.2019.144792

Vasić B, Ralević U, Cvetanović Zobenica K, Smiljanić MM, Gajić R, Spasenović M, Vollebregt S. Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science. 2020;.
doi:10.1016/j.apsusc.2019.144792 .

Vasić, Borislav, Ralević, Uroš, Cvetanović Zobenica, Katarina, Smiljanić, Milče M., Gajić, Radoš, Spasenović, Marko, Vollebregt, Sten, "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum" in Applied Surface Science (2020),
https://doi.org/10.1016/j.apsusc.2019.144792 . .

TY  - JOUR
AU  - Vasić, Borislav
AU  - Ralević, Uroš
AU  - Cvetanović Zobenica, Katarina
AU  - Smiljanić, Milče M.
AU  - Gajić, Radoš
AU  - Spasenović, Marko
AU  - Vollebregt, Sten
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3347
AB  - Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.
PB  - Elsevier
T2  - Applied Surface Science
T1  - Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum
VL  - 509
SP  - 144792
DO  - 10.1016/j.apsusc.2019.144792
ER  - 

@article{
author = "Vasić, Borislav and Ralević, Uroš and Cvetanović Zobenica, Katarina and Smiljanić, Milče M. and Gajić, Radoš and Spasenović, Marko and Vollebregt, Sten",
year = "2020",
abstract = "Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.",
publisher = "Elsevier",
journal = "Applied Surface Science",
title = "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum",
volume = "509",
pages = "144792",
doi = "10.1016/j.apsusc.2019.144792"
}

Vasić, B., Ralević, U., Cvetanović Zobenica, K., Smiljanić, M. M., Gajić, R., Spasenović, M.,& Vollebregt, S.. (2020). Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science
Elsevier., 509, 144792.
https://doi.org/10.1016/j.apsusc.2019.144792

Vasić B, Ralević U, Cvetanović Zobenica K, Smiljanić MM, Gajić R, Spasenović M, Vollebregt S. Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science. 2020;509:144792.
doi:10.1016/j.apsusc.2019.144792 .

Vasić, Borislav, Ralević, Uroš, Cvetanović Zobenica, Katarina, Smiljanić, Milče M., Gajić, Radoš, Spasenović, Marko, Vollebregt, Sten, "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum" in Applied Surface Science, 509 (2020):144792,
https://doi.org/10.1016/j.apsusc.2019.144792 . .

Lazić, Ž., Smiljanić, M., Đinović, Z., Rašljić, M., Cvetanović-Zobenica, K.,& Vasiljević-Radović, D.. (2019). Opto-fluidna platforma za praćenje ćelija raka. 
University of Belgrade - Institute of Chemistry, Technology and Metallurgy..
https://hdl.handle.net/21.15107/rcub_cer_7418

Lazić Ž, Smiljanić M, Đinović Z, Rašljić M, Cvetanović-Zobenica K, Vasiljević-Radović D. Opto-fluidna platforma za praćenje ćelija raka. 2019;.
https://hdl.handle.net/21.15107/rcub_cer_7418 .

Lazić, Žarko, Smiljanić, Milče, Đinović, Zoran, Rašljić, Milena, Cvetanović-Zobenica, Katarina, Vasiljević-Radović, Dana, "Opto-fluidna platforma za praćenje ćelija raka" (2019),
https://hdl.handle.net/21.15107/rcub_cer_7418 .

TY  - CONF
AU  - Vasiljević-Radović, Dana
AU  - Rašljić, Milena
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Radulović, Katarina
AU  - Cvetanović-Zobenica, Katarina
PY  - 2019
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7420
AB  - In this work an overview of Micro Electromechanical
Systems (MEMS)-based microfluidic platforms for
different applications is presented. Microfluidics refers
to a set of technologies that control the flow of liquids or
gases through miniaturized systems in typical amounts of
nano- and pico- liters. Microfluidic devices are
characterized by microchannels with characteristic
dimensions in the micrometer range. The main
techniques, technologies and materials used for
fabrication of MEMS microfluidic devices and systems
are presented. The used materials and their properties are
very important for the final characteristics and
functionalities of devices. As an example, the design and
fabrication of our opto-fluidic lab-on-a-chip device based
on silicon and pyrex glass is given.
PB  - Belgrade : ETRAN Society / Beograd : Društvo za ETRAN
C3  - Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia
T1  - Microselectromechanical system (MEMS) based microfluidic platforms
SP  - 570
EP  - 570
UR  - https://hdl.handle.net/21.15107/rcub_cer_7420
ER  - 

@conference{
author = "Vasiljević-Radović, Dana and Rašljić, Milena and Smiljanić, Milče M. and Lazić, Žarko and Radulović, Katarina and Cvetanović-Zobenica, Katarina",
year = "2019",
abstract = "In this work an overview of Micro Electromechanical
Systems (MEMS)-based microfluidic platforms for
different applications is presented. Microfluidics refers
to a set of technologies that control the flow of liquids or
gases through miniaturized systems in typical amounts of
nano- and pico- liters. Microfluidic devices are
characterized by microchannels with characteristic
dimensions in the micrometer range. The main
techniques, technologies and materials used for
fabrication of MEMS microfluidic devices and systems
are presented. The used materials and their properties are
very important for the final characteristics and
functionalities of devices. As an example, the design and
fabrication of our opto-fluidic lab-on-a-chip device based
on silicon and pyrex glass is given.",
publisher = "Belgrade : ETRAN Society / Beograd : Društvo za ETRAN",
journal = "Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia",
title = "Microselectromechanical system (MEMS) based microfluidic platforms",
pages = "570-570",
url = "https://hdl.handle.net/21.15107/rcub_cer_7420"
}

Vasiljević-Radović, D., Rašljić, M., Smiljanić, M. M., Lazić, Ž., Radulović, K.,& Cvetanović-Zobenica, K.. (2019). Microselectromechanical system (MEMS) based microfluidic platforms. in Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia
Belgrade : ETRAN Society / Beograd : Društvo za ETRAN., 570-570.
https://hdl.handle.net/21.15107/rcub_cer_7420

Vasiljević-Radović D, Rašljić M, Smiljanić MM, Lazić Ž, Radulović K, Cvetanović-Zobenica K. Microselectromechanical system (MEMS) based microfluidic platforms. in Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia. 2019;:570-570.
https://hdl.handle.net/21.15107/rcub_cer_7420 .

Vasiljević-Radović, Dana, Rašljić, Milena, Smiljanić, Milče M., Lazić, Žarko, Radulović, Katarina, Cvetanović-Zobenica, Katarina, "Microselectromechanical system (MEMS) based microfluidic platforms" in Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia (2019):570-570,
https://hdl.handle.net/21.15107/rcub_cer_7420 .

TY  - CONF
AU  - Andrić, Stevan
AU  - Tomašević-Ilić, Tijana
AU  - Sarajlić, Milija
AU  - Lazić, Žarko
AU  - Cvetanović-Zobenica, Katarina
AU  - Rašljić, Milena
AU  - Smiljanić, Milče
AU  - Spasenović, Marko
PY  - 2019
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7421
AB  - Chemical sensors are an enabling tool across many industries, including the largest ones such as  energy, transport, and construction. Low-cost, high performance sensors, especially ones compatible  with flexible substrates, are becoming increasingly important with the development of mobile  gadgets and wearable devices. Here we show humidity sensors produced from thin films of graphene  exfoliated in the liquid phase and deposited with Langmuir-Blodgett assembly. The films are formed  from connected nanoflakes that are ~120nm in diameter and ~10 layers thick. We show that such  films have an abundancy of reactive edges that act as binding sites for gas detection, enabling high  sensitivity to gas presence [1]. The method that we demonstrate uses low-cost processes, is highly  scalable and consistently yields films of high quality that can be deposited on any substrate, including flexible and transparent ones. We produce our thin films on top of a Si/SiO2 wafer with four contacts for measuring sheet resistance in real time as gas is introduced. The sensors that we make are more sensitive to humidity than ones demonstrated with CVD graphene [2], with up to 30% change in sheet resistance upon exposure to water vapor. Although we demonstrate detection of humidity, the same sensors can be used to detect other, both toxic and non-toxic gases.
PB  - Spain : Phantoms Foundation
PB  - France : Université de Strasbrourg / CNRS
PB  - Germany : TU Dresden / cfaed
C3  - European conference on chemistry of two-dimensional materials, Chem2Dmat - 2019, September 03-06, Dresden, Germany
T1  - Humidity sensing with Langmuir-Blodgett assembled  graphene films from liquid phase
SP  - 116
EP  - 116
UR  - https://hdl.handle.net/21.15107/rcub_cer_7421
ER  - 

@conference{
author = "Andrić, Stevan and Tomašević-Ilić, Tijana and Sarajlić, Milija and Lazić, Žarko and Cvetanović-Zobenica, Katarina and Rašljić, Milena and Smiljanić, Milče and Spasenović, Marko",
year = "2019",
abstract = "Chemical sensors are an enabling tool across many industries, including the largest ones such as  energy, transport, and construction. Low-cost, high performance sensors, especially ones compatible  with flexible substrates, are becoming increasingly important with the development of mobile  gadgets and wearable devices. Here we show humidity sensors produced from thin films of graphene  exfoliated in the liquid phase and deposited with Langmuir-Blodgett assembly. The films are formed  from connected nanoflakes that are ~120nm in diameter and ~10 layers thick. We show that such  films have an abundancy of reactive edges that act as binding sites for gas detection, enabling high  sensitivity to gas presence [1]. The method that we demonstrate uses low-cost processes, is highly  scalable and consistently yields films of high quality that can be deposited on any substrate, including flexible and transparent ones. We produce our thin films on top of a Si/SiO2 wafer with four contacts for measuring sheet resistance in real time as gas is introduced. The sensors that we make are more sensitive to humidity than ones demonstrated with CVD graphene [2], with up to 30% change in sheet resistance upon exposure to water vapor. Although we demonstrate detection of humidity, the same sensors can be used to detect other, both toxic and non-toxic gases.",
publisher = "Spain : Phantoms Foundation, France : Université de Strasbrourg / CNRS, Germany : TU Dresden / cfaed",
journal = "European conference on chemistry of two-dimensional materials, Chem2Dmat - 2019, September 03-06, Dresden, Germany",
title = "Humidity sensing with Langmuir-Blodgett assembled  graphene films from liquid phase",
pages = "116-116",
url = "https://hdl.handle.net/21.15107/rcub_cer_7421"
}

Andrić, S., Tomašević-Ilić, T., Sarajlić, M., Lazić, Ž., Cvetanović-Zobenica, K., Rašljić, M., Smiljanić, M.,& Spasenović, M.. (2019). Humidity sensing with Langmuir-Blodgett assembled  graphene films from liquid phase. in European conference on chemistry of two-dimensional materials, Chem2Dmat - 2019, September 03-06, Dresden, Germany
Spain : Phantoms Foundation., 116-116.
https://hdl.handle.net/21.15107/rcub_cer_7421

Andrić S, Tomašević-Ilić T, Sarajlić M, Lazić Ž, Cvetanović-Zobenica K, Rašljić M, Smiljanić M, Spasenović M. Humidity sensing with Langmuir-Blodgett assembled  graphene films from liquid phase. in European conference on chemistry of two-dimensional materials, Chem2Dmat - 2019, September 03-06, Dresden, Germany. 2019;:116-116.
https://hdl.handle.net/21.15107/rcub_cer_7421 .

Andrić, Stevan, Tomašević-Ilić, Tijana, Sarajlić, Milija, Lazić, Žarko, Cvetanović-Zobenica, Katarina, Rašljić, Milena, Smiljanić, Milče, Spasenović, Marko, "Humidity sensing with Langmuir-Blodgett assembled  graphene films from liquid phase" in European conference on chemistry of two-dimensional materials, Chem2Dmat - 2019, September 03-06, Dresden, Germany (2019):116-116,
https://hdl.handle.net/21.15107/rcub_cer_7421 .

TY  - CONF
AU  - Stevanović, Jelena
AU  - Lazić, Žarko
AU  - Smiljanić, Milče M.
AU  - Radulović, Katarina
AU  - Randjelović, Danijela
AU  - Frantlović, Miloš
AU  - Sarajlić, Milija
PY  - 2019
UR  - https://www.etran.rs/2019/IcETRAN/About_Conference/
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4007
AB  - A consideration study for the application of the pressure sensor SP-12 developed and produced by ICTM CMT as an ultrasound sensor is given. The interaction of ultrasound with the sensor’s membrane was analytically described, but for the initial examination of its performance, Finite Elements Method simulation was applied. The sensor SP-12 has eigenfrequencies in the range from 200 kHz to the frequencies higher than 2 MHz. The amplitude of the output signal, which is proportional to Von Mises stress, is highest for the lowest frequency, and it exponentially decreases as the eigenfrequencies increase. This makes the sensor suitable for the ultrasound measurements in the range of hundreds of kHz
PB  - Belgrade : ETRAN Society
PB  - Belgrade : Akademska misao
C3  - Proceedings - 6th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2019
T1  - A consideration of the use of ICTM SP-12 pressure sensor for ultrasound sensing
UR  - https://hdl.handle.net/21.15107/rcub_cer_4007
ER  - 

@conference{
author = "Stevanović, Jelena and Lazić, Žarko and Smiljanić, Milče M. and Radulović, Katarina and Randjelović, Danijela and Frantlović, Miloš and Sarajlić, Milija",
year = "2019",
abstract = "A consideration study for the application of the pressure sensor SP-12 developed and produced by ICTM CMT as an ultrasound sensor is given. The interaction of ultrasound with the sensor’s membrane was analytically described, but for the initial examination of its performance, Finite Elements Method simulation was applied. The sensor SP-12 has eigenfrequencies in the range from 200 kHz to the frequencies higher than 2 MHz. The amplitude of the output signal, which is proportional to Von Mises stress, is highest for the lowest frequency, and it exponentially decreases as the eigenfrequencies increase. This makes the sensor suitable for the ultrasound measurements in the range of hundreds of kHz",
publisher = "Belgrade : ETRAN Society, Belgrade : Akademska misao",
journal = "Proceedings - 6th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2019",
title = "A consideration of the use of ICTM SP-12 pressure sensor for ultrasound sensing",
url = "https://hdl.handle.net/21.15107/rcub_cer_4007"
}

Stevanović, J., Lazić, Ž., Smiljanić, M. M., Radulović, K., Randjelović, D., Frantlović, M.,& Sarajlić, M.. (2019). A consideration of the use of ICTM SP-12 pressure sensor for ultrasound sensing. in Proceedings - 6th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2019
Belgrade : ETRAN Society..
https://hdl.handle.net/21.15107/rcub_cer_4007

Stevanović J, Lazić Ž, Smiljanić MM, Radulović K, Randjelović D, Frantlović M, Sarajlić M. A consideration of the use of ICTM SP-12 pressure sensor for ultrasound sensing. in Proceedings - 6th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2019. 2019;.
https://hdl.handle.net/21.15107/rcub_cer_4007 .

Stevanović, Jelena, Lazić, Žarko, Smiljanić, Milče M., Radulović, Katarina, Randjelović, Danijela, Frantlović, Miloš, Sarajlić, Milija, "A consideration of the use of ICTM SP-12 pressure sensor for ultrasound sensing" in Proceedings - 6th International Conference on Electrical, Electronics and Computing Engineering, IcETRAN 2019 (2019),
https://hdl.handle.net/21.15107/rcub_cer_4007 .

TY  - CONF
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Radjenović, Branislav
AU  - Radjenović-Radmilović, Marija
AU  - Jović, Vesna
AU  - Rašljić, Milena
AU  - Cvetanović, Katarina
AU  - Filipović, Ana
PY  - 2019
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5771
AB  - In this paper, we present and analyze etching of 
parallelogram patterns in the masking layer on a (100) silicon in 
25 wt % TMAH water solution at the temperature of 80 0C. Sides 
of parallelogram islands in the masking layer are designed along 
<n10> and <100> crystallographic directions. A 3D simulation of 
the profile evolution from these patterns during etching of silicon 
using the level set method is also presented. We determined all
crystallographic planes that appear during etching in the 
experiment and obtained simulated etching profiles of these 3D 
structures. A good agreement between dominant 
crystallographic planes through experiments and simulations is 
obtained.
PB  - Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering
C3  - Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia
T1  - Etched Parallelogram Patterns with Sides Along <100> and <n10> Directions in 25 wt % TMAH
SP  - 584
EP  - 589
UR  - https://hdl.handle.net/21.15107/rcub_cer_5771
ER  - 

@conference{
author = "Smiljanić, Milče M. and Lazić, Žarko and Radjenović, Branislav and Radjenović-Radmilović, Marija and Jović, Vesna and Rašljić, Milena and Cvetanović, Katarina and Filipović, Ana",
year = "2019",
abstract = "In this paper, we present and analyze etching of 
parallelogram patterns in the masking layer on a (100) silicon in 
25 wt % TMAH water solution at the temperature of 80 0C. Sides 
of parallelogram islands in the masking layer are designed along 
<n10> and <100> crystallographic directions. A 3D simulation of 
the profile evolution from these patterns during etching of silicon 
using the level set method is also presented. We determined all
crystallographic planes that appear during etching in the 
experiment and obtained simulated etching profiles of these 3D 
structures. A good agreement between dominant 
crystallographic planes through experiments and simulations is 
obtained.",
publisher = "Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering",
journal = "Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia",
title = "Etched Parallelogram Patterns with Sides Along <100> and <n10> Directions in 25 wt % TMAH",
pages = "584-589",
url = "https://hdl.handle.net/21.15107/rcub_cer_5771"
}

Smiljanić, M. M., Lazić, Ž., Radjenović, B., Radjenović-Radmilović, M., Jović, V., Rašljić, M., Cvetanović, K.,& Filipović, A.. (2019). Etched Parallelogram Patterns with Sides Along <100> and <n10> Directions in 25 wt % TMAH. in Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia
Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering., 584-589.
https://hdl.handle.net/21.15107/rcub_cer_5771

Smiljanić MM, Lazić Ž, Radjenović B, Radjenović-Radmilović M, Jović V, Rašljić M, Cvetanović K, Filipović A. Etched Parallelogram Patterns with Sides Along <100> and <n10> Directions in 25 wt % TMAH. in Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia. 2019;:584-589.
https://hdl.handle.net/21.15107/rcub_cer_5771 .

Smiljanić, Milče M., Lazić, Žarko, Radjenović, Branislav, Radjenović-Radmilović, Marija, Jović, Vesna, Rašljić, Milena, Cvetanović, Katarina, Filipović, Ana, "Etched Parallelogram Patterns with Sides Along <100> and <n10> Directions in 25 wt % TMAH" in Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia (2019):584-589,
https://hdl.handle.net/21.15107/rcub_cer_5771 .