Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements
Аутори
Lazić, ŽarkoSmiljanić, Milče
Tanasković, Dragan
Rašljić Rafajilović, Milena
Cvetanović, Katarina
Milinković, Evgenija
Bošković, Marko V.
Andrić, Stevan
Poljak, Predrag
Frantlović, Miloš
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
The existing instruments for aerodynamic pressure measurements are usually built around
an array of discrete pressure sensors, placed in the same housing together with a few discrete
temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing.
Кључне речи:
MEMS multisensor / pressure sensing / chip fabricationИзвор:
Engineering proceedings, 2023, 58, 1, 52-Издавач:
- MDPI
Финансирање / пројекти:
- MEMSAERO - MEMS Multisensor Instrument for Aerodynamic Pressure Measurements (RS-ScienceFundRS-Ideje-7754287)
- Министарство науке, технолошког развоја и иновација Републике Србије, институционално финансирање - 200026 (Универзитет у Београду, Институт за хемију, технологију и металургију - ИХТМ) (RS-MESTD-inst-2020-200026)
Напомена:
- The 10th International Electronic Conference on Sensors and Applications
Институција/група
IHTMTY - CONF AU - Lazić, Žarko AU - Smiljanić, Milče AU - Tanasković, Dragan AU - Rašljić Rafajilović, Milena AU - Cvetanović, Katarina AU - Milinković, Evgenija AU - Bošković, Marko V. AU - Andrić, Stevan AU - Poljak, Predrag AU - Frantlović, Miloš PY - 2023 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/7419 AB - The existing instruments for aerodynamic pressure measurements are usually built around an array of discrete pressure sensors, placed in the same housing together with a few discrete temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing. PB - MDPI C3 - Engineering proceedings T1 - Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements VL - 58 IS - 1 SP - 52 DO - 10.3390/ecsa-10-16071 ER -
@conference{ author = "Lazić, Žarko and Smiljanić, Milče and Tanasković, Dragan and Rašljić Rafajilović, Milena and Cvetanović, Katarina and Milinković, Evgenija and Bošković, Marko V. and Andrić, Stevan and Poljak, Predrag and Frantlović, Miloš", year = "2023", abstract = "The existing instruments for aerodynamic pressure measurements are usually built around an array of discrete pressure sensors, placed in the same housing together with a few discrete temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing.", publisher = "MDPI", journal = "Engineering proceedings", title = "Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements", volume = "58", number = "1", pages = "52", doi = "10.3390/ecsa-10-16071" }
Lazić, Ž., Smiljanić, M., Tanasković, D., Rašljić Rafajilović, M., Cvetanović, K., Milinković, E., Bošković, M. V., Andrić, S., Poljak, P.,& Frantlović, M.. (2023). Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements. in Engineering proceedings MDPI., 58(1), 52. https://doi.org/10.3390/ecsa-10-16071
Lazić Ž, Smiljanić M, Tanasković D, Rašljić Rafajilović M, Cvetanović K, Milinković E, Bošković MV, Andrić S, Poljak P, Frantlović M. Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements. in Engineering proceedings. 2023;58(1):52. doi:10.3390/ecsa-10-16071 .
Lazić, Žarko, Smiljanić, Milče, Tanasković, Dragan, Rašljić Rafajilović, Milena, Cvetanović, Katarina, Milinković, Evgenija, Bošković, Marko V., Andrić, Stevan, Poljak, Predrag, Frantlović, Miloš, "Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements" in Engineering proceedings, 58, no. 1 (2023):52, https://doi.org/10.3390/ecsa-10-16071 . .