TY  - CONF
AU  - Lazić, Žarko
AU  - Smiljanić, Milče M.
AU  - Nešić, Dušan
AU  - Zeković, Ljubiša
PY  - 2022
UR  - https://www.etran.rs/2022/zbornik/ICETRAN-22_radovi/044-MOI1.1.pdf
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5640
AB  - In this paper, two color detector based on silicon 
photodiodes is studied and fabricated. Standard IHTM 
photodiode’s design is modified to allow mounting one 
photodiode above another using special micromachined carrier. 
The carrier is fabricated using wet silicon etching in 25% TMAH 
water solution and anodic bonding of etched silicon and Pyrex 
glass. The fabricated carrier also allows easy wire 
thermocompression bonding from the photodiode’s pads to TO-5 
housing. Output currents of the photodiodes were measured by 
applying light of 900 nm and 1060 nm. Obtained results verify 
applicability of the new packaging for two color detector.
PB  - Belgrade : ETRAN Society
C3  - Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia
T1  - Two Color Photodiodes Mounted on the Micromachined Carrier
SP  - 391
EP  - 394
UR  - https://hdl.handle.net/21.15107/rcub_cer_5640
ER  - 

@conference{
author = "Lazić, Žarko and Smiljanić, Milče M. and Nešić, Dušan and Zeković, Ljubiša",
year = "2022",
abstract = "In this paper, two color detector based on silicon 
photodiodes is studied and fabricated. Standard IHTM 
photodiode’s design is modified to allow mounting one 
photodiode above another using special micromachined carrier. 
The carrier is fabricated using wet silicon etching in 25% TMAH 
water solution and anodic bonding of etched silicon and Pyrex 
glass. The fabricated carrier also allows easy wire 
thermocompression bonding from the photodiode’s pads to TO-5 
housing. Output currents of the photodiodes were measured by 
applying light of 900 nm and 1060 nm. Obtained results verify 
applicability of the new packaging for two color detector.",
publisher = "Belgrade : ETRAN Society",
journal = "Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia",
title = "Two Color Photodiodes Mounted on the Micromachined Carrier",
pages = "391-394",
url = "https://hdl.handle.net/21.15107/rcub_cer_5640"
}

Lazić, Ž., Smiljanić, M. M., Nešić, D.,& Zeković, L.. (2022). Two Color Photodiodes Mounted on the Micromachined Carrier. in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia
Belgrade : ETRAN Society., 391-394.
https://hdl.handle.net/21.15107/rcub_cer_5640

Lazić Ž, Smiljanić MM, Nešić D, Zeković L. Two Color Photodiodes Mounted on the Micromachined Carrier. in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia. 2022;:391-394.
https://hdl.handle.net/21.15107/rcub_cer_5640 .

Lazić, Žarko, Smiljanić, Milče M., Nešić, Dušan, Zeković, Ljubiša, "Two Color Photodiodes Mounted on the Micromachined Carrier" in Proceedings - IX International Conference IcETRAN and LXVI ETRAN Conference, 6 ‐ 9, June, 2022, Novi Pazar, Serbia (2022):391-394,
https://hdl.handle.net/21.15107/rcub_cer_5640 .