Integrated Microsystems Austria GmbH – Austrian Center for Medical Innovation and Technology from Wiener Neustadt, Österreich, through the research and development project named “Phase Change Actuator (PCA) for Steering Catheter”.

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Integrated Microsystems Austria GmbH – Austrian Center for Medical Innovation and Technology from Wiener Neustadt, Österreich, through the research and development project named “Phase Change Actuator (PCA) for Steering Catheter”.

Authors

Publications

Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity

Jović, Vesna; Lamovec, Jelena; Starčević, Marko; Đinović, Zoran; Smiljanić, Milče M.; Lazić, Žarko

(Belgrade : The Military Technical Institute, 2018) 

TY  - CONF
AU  - Jović, Vesna
AU  - Lamovec, Jelena
AU  - Starčević, Marko
AU  - Đinović, Zoran
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
PY  - 2018
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5795
AB  - Nowadays, with no doubt, PDMS, poly(dimethylsiloxane) elastomer is material of choice for microfluidic 
fabrication because of its unique chemical, optical and mechanical properties. Unfortunately, it is not photo-definable (i.e. 
not a photoresist) and fabrication of PDMS MEM (micro-electro-mechanical) devices is typically done using soft 
lithography. Some steps of the process are difficult to perform without manually handling PDMS layers. Next problem to be 
considered in patterning PDMS membranes is bond strength between membrane and silicon substrate. To investigate this, 
we fabricated PDMS membranes on silicon either by spin coating Si wafer or transferring previously fabricated PDMS 
membrane to Si chip with bonding layer on it. PDMS network samples for this research were synthesized with the same 
composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, 
volume ratio 10:1. Fabrication of test structures is based on bulk micromachining on ⟨100⟩ oriented Si wafers to fabricate 
square cavities on which PDMS membranes were realized by one of mentioned procedures. Mechanical testing of PDMS 
membranes, elastic properties and adhesion strength of membranes with different thicknesses were investigated applying 
pressurized bulge testing. Pressure was applied to the PDMS membrane via nitrogen gas and the resulting load-deflection 
curves were monitoring.
PB  - Belgrade : The Military Technical Institute
C3  - Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade
T1  - Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity
SP  - 462
EP  - 467
UR  - https://hdl.handle.net/21.15107/rcub_cer_5795
ER  - 
@conference{
author = "Jović, Vesna and Lamovec, Jelena and Starčević, Marko and Đinović, Zoran and Smiljanić, Milče M. and Lazić, Žarko",
year = "2018",
abstract = "Nowadays, with no doubt, PDMS, poly(dimethylsiloxane) elastomer is material of choice for microfluidic 
fabrication because of its unique chemical, optical and mechanical properties. Unfortunately, it is not photo-definable (i.e. 
not a photoresist) and fabrication of PDMS MEM (micro-electro-mechanical) devices is typically done using soft 
lithography. Some steps of the process are difficult to perform without manually handling PDMS layers. Next problem to be 
considered in patterning PDMS membranes is bond strength between membrane and silicon substrate. To investigate this, 
we fabricated PDMS membranes on silicon either by spin coating Si wafer or transferring previously fabricated PDMS 
membrane to Si chip with bonding layer on it. PDMS network samples for this research were synthesized with the same 
composition, which are Sylgard 184 (Dow Corning, USA) silicone elastomer base and silicone elastomer curing agent, 
volume ratio 10:1. Fabrication of test structures is based on bulk micromachining on ⟨100⟩ oriented Si wafers to fabricate 
square cavities on which PDMS membranes were realized by one of mentioned procedures. Mechanical testing of PDMS 
membranes, elastic properties and adhesion strength of membranes with different thicknesses were investigated applying 
pressurized bulge testing. Pressure was applied to the PDMS membrane via nitrogen gas and the resulting load-deflection 
curves were monitoring.",
publisher = "Belgrade : The Military Technical Institute",
journal = "Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade",
title = "Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity",
pages = "462-467",
url = "https://hdl.handle.net/21.15107/rcub_cer_5795"
}
Jović, V., Lamovec, J., Starčević, M., Đinović, Z., Smiljanić, M. M.,& Lazić, Ž.. (2018). Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity. in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade
Belgrade : The Military Technical Institute., 462-467.
https://hdl.handle.net/21.15107/rcub_cer_5795
Jović V, Lamovec J, Starčević M, Đinović Z, Smiljanić MM, Lazić Ž. Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity. in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade. 2018;:462-467.
https://hdl.handle.net/21.15107/rcub_cer_5795 .
Jović, Vesna, Lamovec, Jelena, Starčević, Marko, Đinović, Zoran, Smiljanić, Milče M., Lazić, Žarko, "Experimental study of PDMS membranes fabricated either by spin coating or transfer bonding to a silicon chip with etched cavity" in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade (2018):462-467,
https://hdl.handle.net/21.15107/rcub_cer_5795 .