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Micromachining by maskless wet anisotropic etching {hkl} structures on {100} oriented silicon
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
The paper presents investigation of micromechanical technique using 3D anisotropically etched Si structures. Ridge-like structure oriented along LT 110> direction is first etched with mask following maskless etching in ...
Bioremediation - innovative solutions for old environmental challenges
(Japan Society for Environmental Chemistry, 2018)
Until recently, we considered natural recycling capacities unlimited. However, industrial development, usage of fossil fuels and production of manmade compounds has led to the situation were the amount of generated waste ...
Printed Antenna Arrays with Cylindrical Parabolic Reflector
(20th Telecommunications Forum, TELFOR 2012 - Proceedings, 2012)
Concept of design and realization of high gain printed antenna structures is presented. They consist of antenna array, subreflector, feeding network and bal-un, all printed on the same dielectric substrate. Linear array ...
Multifunctionalized Self-supported (Nano) Membranes as Integrated Platform for Plasmonic Metamaterials
(Progress in Electromagnetics Research Symposium, 2013)
We considered the possibility to fabricate multifunctional nanocomposite membranes as a platform for plasmonic metamaterials, simultaneously incorporating pores, built-in functional groups and active nanoparticles. To this ...
Permittivity Characterization Using a Double-Sided Parallel-Strip Line Resonator
(Institute of Electrical and Electronics Engineers Inc., 2018)
The paper introduces the new type of a microwave permittivity sensor with an open stub realized as a double-sided parallel-strip line without substrate. It can be totally immersed into the measured material and obtains ...
Composition and distribution of saturated hydrocarbons in the vicinity of heating plant in New Belgrade - alluvial sediments of the Sava River, Serbia
(Association of chemistry and environment, 2018)
The aim of our present research was to investigate the composition and distribution of saturated hydrocarbons in alluvial sediments of the Sava River in the vicinity of a heating plant in New Belgrade, Serbia.
Enhancing Performance of Nanohole-Based Plasmonic Sensors by Transparent Conductive Oxides
(Institute of Electrical and Electronics Engineers Inc., 2012)
We investigated a structure for surface plasmon-polariton-based chemical sensing consisting of a square 2D lattice of circular nanoapertures drilled in a plasmonic material on a dielectric substrate. Contrary to the usual ...
Helium Sensing Using Multipurpose Thermopile-Based MEMS devices
(Institute of Electrical and Electronics Engineers Inc., 2012)
In this paper gas sensing performance of IHTM thermopile-based MEMS sensors is studied both theoretically and experimentally. The sensor has already been proven to be a multipurpose device and this work explores possibilities ...
Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement ...
Photoacoustic elastic bending method: Study of the silicon membranes
(28th International Conference on Microelectronics - Proceedings, MIEL 2012, 2012)
Photoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 ...