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Design of symmetric planar fishnet metamaterials for optical wavelength range
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
In this work we analyze fishnet-type optical metamaterials with full electromagnetic symmetry, fabricated in an ultrathin, freestanding film (self-supported nanomembrane). We utilized the finite element method to simulate ...
Modelling of thermopile-based MEMS sensors using analytical and numerical techniques
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
In this paper the thermoelectrical behavior of thermopile-based MEMS sensors is reported using analytical and numerical techniques. It is also shown that experimental results for specific sensors are in excellent agreement ...
Micromachining by maskless wet anisotropic etching {hkl} structures on {100} oriented silicon
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
The paper presents investigation of micromechanical technique using 3D anisotropically etched Si structures. Ridge-like structure oriented along LT 110> direction is first etched with mask following maskless etching in ...
Photothermal elastic vibration spectra of SiO2 film on Si
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
The silicon-dioxide film on the silicon substrate (SiO2/Si) samples were investigated by the photothermal elastic vibration method. The photothermal elastic vibrations in two-layer rectangular plates were optically excited ...
Structural and microhardness characterization of thin electrodeposited Ni/Cu multilayers on copper substrates
(27th International Conference on Microelectronics, MIEL 2010 - Proceedings, 2010)
Multilayered composite systems of alternately electrodeposited nanocrystalline Cu and Ni films on cold-rolled microcrystalline copper substrates were fabricated. Highly-densified parallel interfaces which can give rise to ...