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Glass Micromachining with Sputtered Silicon as a Masking Layer
(Institute of Electrical and Electronics Engineers Inc., 2014)
In this work we present the not so commonly use of RF sputtered silicon as a masking layer for glass wet etching. The main advantages of this technique are low deposition temperature of silicon layer compared to PECVD and ...
On the Design of Compact Intelligent Industrial Transmitters Based on Piezoresistive MEMS Pressure Sensors
(Institute of Electrical and Electronics Engineers Inc., 2017)
In this paper we present the concept of a compact intelligent industrial pressure transmitter developed at the Center of Microelectronic Technologies (CMT), and discuss some of the most important steps in its design process. ...
Investigation of the microcantilevers by the photoacoustic elastic bending method
(Institute of Electrical and Electronics Engineers Inc., 2014)
The amplitude of the photoacoustic (PA) elastic bending signals vs. the modulation frequency of the excitation optical beam for the chip with Si cantilevers were measured and analyzed. The experimental PA elastic bending ...
Stochastic Time Response of Adsorption-based Micro/Nanobiosensors with a Fluidic Reaction Chamber: the Influence of Mass Transfer
(Institute of Electrical and Electronics Engineers Inc., 2017)
An approximate model for efficient analysis of stochastic time response of microfluidic biosensors is presented, that considers a random AD process coupled with mass transfer (convection and diffusion) of target substance ...