dc.creator | Rašljić Rafajilović, Milena | |
dc.creator | Radulović, Katarina | |
dc.creator | Smiljanić, Milče M. | |
dc.creator | Lazić, Žarko | |
dc.creator | Jakšić, Zoran | |
dc.creator | Stanisavljev, Dragomir | |
dc.creator | Vasiljević-Radović, Dana | |
dc.date.accessioned | 2020-12-11T08:25:18Z | |
dc.date.available | 2020-12-11T08:25:18Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 2072-666X | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/4009 | |
dc.description.abstract | We present the design, simulation, fabrication and characterization of monolithically
integrated high resistivity p-type boron-di used silicon two-zone heaters in a model high temperature
microreactor intended for nanoparticle fabrication. We used a finite element method for simulations
of the heaters’ operation and performance. Our experimental model reactor structure consisted of
a silicon wafer anodically bonded to a Pyrex glass wafer with an isotropically etched serpentine
microchannels network. We fabricated two separate spiral heaters with di erent temperatures,
mutually thermally isolated by barrier apertures etched throughout the silicon wafer. The heaters
were characterized by electric measurements and by infrared thermal vision. The obtained results
show that our proposed procedure for the heater fabrication is robust, stable and controllable, with a
decreased sensitivity to random variations of fabrication process parameters. Compared to metallic or
polysilicon heaters typically integrated into microreactors, our approach o ers improved control over
heater characteristics through adjustment of the Boron doping level and profile. Our microreactor is
intended to produce titanium dioxide nanoparticles, but it could be also used to fabricate nanoparticles
in di erent materials as well, with various parameters and geometries. Our method can be generally
applied to other high-temperature microsystems. | en |
dc.language.iso | en | sr |
dc.publisher | MDPI | sr |
dc.relation | info:eu-repo/grantAgreement/MESTD/inst-2020/200026/RS// | sr |
dc.rights | openAccess | sr |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | |
dc.source | Micromachines | sr |
dc.subject | high-temperature microreactors | sr |
dc.subject | nanoparticle synthesis | sr |
dc.subject | titania | sr |
dc.subject | titanium dioxide | sr |
dc.subject | silicon micromachining | sr |
dc.subject | Pyrex glass micromachining | sr |
dc.subject | integrated heater | sr |
dc.subject | diffusion | sr |
dc.subject | thermal vision | sr |
dc.title | Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects. | en |
dc.type | article | sr |
dc.rights.license | BY | sr |
dcterms.abstract | Јакшић, Зоран; Станисављев, Драгомир; Васиљевић-Радовић, Дана; Рашљић Рафајиловић, Милена; Радуловић, Катарина; Лазић, Жарко; Смиљанић, Милче М.; | |
dc.rights.holder | The Authors | sr |
dc.citation.volume | 11 | |
dc.citation.issue | 9 | |
dc.citation.spage | 818 | |
dc.citation.rank | M22~ | |
dc.identifier.pmid | 32872382 | |
dc.identifier.doi | 10.3390/mi11090818 | |
dc.identifier.fulltext | https://cer.ihtm.bg.ac.rs/bitstream/id/18449/micromachines-11-00818-v2.pdf | |
dc.identifier.scopus | 2-s2.0-85092367265 | |
dc.identifier.wos | 000580131400001 | |
dc.type.version | publishedVersion | sr |