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Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.

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2020
micromachines-11-00818-v2.pdf (4.311Mb)
Authors
Rašljić Rafajilović, Milena
Radulović, Katarina
Smiljanić, Milče M.
Lazić, Žarko
Jakšić, Zoran
Stanisavljev, Dragomir
Vasiljević-Radović, Dana
Article (Published version)
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Abstract
We present the design, simulation, fabrication and characterization of monolithically integrated high resistivity p-type boron-di used silicon two-zone heaters in a model high temperature microreactor intended for nanoparticle fabrication. We used a finite element method for simulations of the heaters’ operation and performance. Our experimental model reactor structure consisted of a silicon wafer anodically bonded to a Pyrex glass wafer with an isotropically etched serpentine microchannels network. We fabricated two separate spiral heaters with di erent temperatures, mutually thermally isolated by barrier apertures etched throughout the silicon wafer. The heaters were characterized by electric measurements and by infrared thermal vision. The obtained results show that our proposed procedure for the heater fabrication is robust, stable and controllable, with a decreased sensitivity to random variations of fabrication process parameters. Compared to metallic or polysilicon hea...ters typically integrated into microreactors, our approach o ers improved control over heater characteristics through adjustment of the Boron doping level and profile. Our microreactor is intended to produce titanium dioxide nanoparticles, but it could be also used to fabricate nanoparticles in di erent materials as well, with various parameters and geometries. Our method can be generally applied to other high-temperature microsystems.

Keywords:
high-temperature microreactors / nanoparticle synthesis / titania / titanium dioxide / silicon micromachining / Pyrex glass micromachining / integrated heater / diffusion / thermal vision
Source:
Micromachines, 2020, 11, 9, 818-
Publisher:
  • MDPI
Funding / projects:
  • Ministry of Education, Science and Technological Development, Republic of Serbia, Grant no. 200026 (University of Belgrade, Institute of Chemistry, Technology and Metallurgy - IChTM) (RS-200026)

DOI: 10.3390/mi11090818

ISSN: 2072-666X

PubMed: 32872382

WoS: 000580131400001

Scopus: 2-s2.0-85092367265
[ Google Scholar ]
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URI
https://cer.ihtm.bg.ac.rs/handle/123456789/4009
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  • Radovi istraživača / Researchers' publications
Institution/Community
IHTM
TY  - JOUR
AU  - Rašljić Rafajilović, Milena
AU  - Radulović, Katarina
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Jakšić, Zoran
AU  - Stanisavljev, Dragomir
AU  - Vasiljević-Radović, Dana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4009
AB  - We present the design, simulation, fabrication and characterization of monolithically
integrated high resistivity p-type boron-di used silicon two-zone heaters in a model high temperature
microreactor intended for nanoparticle fabrication. We used a finite element method for simulations
of the heaters’ operation and performance. Our experimental model reactor structure consisted of
a silicon wafer anodically bonded to a Pyrex glass wafer with an isotropically etched serpentine
microchannels network. We fabricated two separate spiral heaters with di erent temperatures,
mutually thermally isolated by barrier apertures etched throughout the silicon wafer. The heaters
were characterized by electric measurements and by infrared thermal vision. The obtained results
show that our proposed procedure for the heater fabrication is robust, stable and controllable, with a
decreased sensitivity to random variations of fabrication process parameters. Compared to metallic or
polysilicon heaters typically integrated into microreactors, our approach o ers improved control over
heater characteristics through adjustment of the Boron doping level and profile. Our microreactor is
intended to produce titanium dioxide nanoparticles, but it could be also used to fabricate nanoparticles
in di erent materials as well, with various parameters and geometries. Our method can be generally
applied to other high-temperature microsystems.
PB  - MDPI
T2  - Micromachines
T1  - Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.
VL  - 11
IS  - 9
SP  - 818
DO  - 10.3390/mi11090818
ER  - 
@article{
author = "Rašljić Rafajilović, Milena and Radulović, Katarina and Smiljanić, Milče M. and Lazić, Žarko and Jakšić, Zoran and Stanisavljev, Dragomir and Vasiljević-Radović, Dana",
year = "2020",
abstract = "We present the design, simulation, fabrication and characterization of monolithically
integrated high resistivity p-type boron-di used silicon two-zone heaters in a model high temperature
microreactor intended for nanoparticle fabrication. We used a finite element method for simulations
of the heaters’ operation and performance. Our experimental model reactor structure consisted of
a silicon wafer anodically bonded to a Pyrex glass wafer with an isotropically etched serpentine
microchannels network. We fabricated two separate spiral heaters with di erent temperatures,
mutually thermally isolated by barrier apertures etched throughout the silicon wafer. The heaters
were characterized by electric measurements and by infrared thermal vision. The obtained results
show that our proposed procedure for the heater fabrication is robust, stable and controllable, with a
decreased sensitivity to random variations of fabrication process parameters. Compared to metallic or
polysilicon heaters typically integrated into microreactors, our approach o ers improved control over
heater characteristics through adjustment of the Boron doping level and profile. Our microreactor is
intended to produce titanium dioxide nanoparticles, but it could be also used to fabricate nanoparticles
in di erent materials as well, with various parameters and geometries. Our method can be generally
applied to other high-temperature microsystems.",
publisher = "MDPI",
journal = "Micromachines",
title = "Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.",
volume = "11",
number = "9",
pages = "818",
doi = "10.3390/mi11090818"
}
Rašljić Rafajilović, M., Radulović, K., Smiljanić, M. M., Lazić, Ž., Jakšić, Z., Stanisavljev, D.,& Vasiljević-Radović, D.. (2020). Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.. in Micromachines
MDPI., 11(9), 818.
https://doi.org/10.3390/mi11090818
Rašljić Rafajilović M, Radulović K, Smiljanić MM, Lazić Ž, Jakšić Z, Stanisavljev D, Vasiljević-Radović D. Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.. in Micromachines. 2020;11(9):818.
doi:10.3390/mi11090818 .
Rašljić Rafajilović, Milena, Radulović, Katarina, Smiljanić, Milče M., Lazić, Žarko, Jakšić, Zoran, Stanisavljev, Dragomir, Vasiljević-Radović, Dana, "Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects." in Micromachines, 11, no. 9 (2020):818,
https://doi.org/10.3390/mi11090818 . .

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