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Intelligent thermopile-based vacuum sensor
(Elsevier, 2011)
We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. ...
Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence
(Elsevier, 2011)
We developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a ...