We developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a sensor using the general theory of microcantilever based resonators. The stress in the microcantilever is a result of the combined effect of the room temperature built-in stress stemming from the fabrication process and the thermal stress caused by the beam heating. We derive for the first time the analytical expressions for basic parameters, sensitivity, noise and detectivity, of such a sensor.
TY - CONF
AU - Đurić, Zoran G.
AU - Ranđelović, Danijela
AU - Krstajić, Predrag
AU - Jokić, Ivana
AU - Djukic, M.
PY - 2011
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/833
AB - We developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a sensor using the general theory of microcantilever based resonators. The stress in the microcantilever is a result of the combined effect of the room temperature built-in stress stemming from the fabrication process and the thermal stress caused by the beam heating. We derive for the first time the analytical expressions for basic parameters, sensitivity, noise and detectivity, of such a sensor.
PB - Elsevier
C3 - Eurosensors Xxv
T1 - Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence
VL - 25
DO - 10.1016/j.proeng.2011.12.095
ER -
@conference{
author = "Đurić, Zoran G. and Ranđelović, Danijela and Krstajić, Predrag and Jokić, Ivana and Djukic, M.",
year = "2011",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/833",
abstract = "We developed a theory for the infrared (IR) thermal detector whose function is based on the dependence of the microcantilever resonant frequency on the thermal stress caused by IR radiation. We study performance of such a sensor using the general theory of microcantilever based resonators. The stress in the microcantilever is a result of the combined effect of the room temperature built-in stress stemming from the fabrication process and the thermal stress caused by the beam heating. We derive for the first time the analytical expressions for basic parameters, sensitivity, noise and detectivity, of such a sensor.",
publisher = "Elsevier",
journal = "Eurosensors Xxv",
title = "Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence",
volume = "25",
doi = "10.1016/j.proeng.2011.12.095"
}
Đurić, Z. G., Ranđelović, D., Krstajić, P., Jokić, I.,& Djukic, M. (2011). Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence.
Eurosensors Xxv
Elsevier., 25.
https://doi.org/10.1016/j.proeng.2011.12.095
Đurić ZG, Ranđelović D, Krstajić P, Jokić I, Djukic M. Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence. Eurosensors Xxv. 2011;25
Đurić Zoran G., Ranđelović Danijela, Krstajić Predrag, Jokić Ivana, Djukic M., "Theory of Infrared Detector Based on the Microcantilever Resonant Frequency Temperature Dependence" Eurosensors Xxv, 25 (2011),
https://doi.org/10.1016/j.proeng.2011.12.095 .
