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Intelligent thermopile-based vacuum sensor

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2011
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Authors
Ranđelović, Danijela
Frantlović, Miloš
Miljkovic, B.
Rosandic, B.
Jakšić, Zoran
Popović, Bogdan
Conference object (Published version)
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Abstract
We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.
Keywords:
vacuum sensor / intelligent sensor / thermopile / pressure measurement
Source:
Eurosensors Xxv, 2011, 25
Publisher:
  • Elsevier
Projects:
  • Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
  • Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)

DOI: 10.1016/j.proeng.2011.12.143

ISSN: 1877-7058

WoS: 000300512400140

Scopus: 2-s2.0-84857184202
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URI
http://cer.ihtm.bg.ac.rs/handle/123456789/832
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