Intelligent thermopile-based vacuum sensor

Ranđelović, Danijela; Frantlović, Miloš; Miljkovic, B.; Rosandic, B.; Jakšić, Zoran; Popović, Bogdan

doi:10.1016/j.proeng.2011.12.143

2011

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Authors

Ranđelović, Danijela

Frantlović, Miloš

Miljkovic, B.
Rosandic, B.
Jakšić, Zoran

Popović, Bogdan

Conference object (Published version)

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Abstract

We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.

Keywords:

vacuum sensor / intelligent sensor / thermopile / pressure measurement

Source:
Eurosensors Xxv, 2011, 25

Publisher:

Elsevier

Projects:

DOI: 10.1016/j.proeng.2011.12.143

ISSN: 1877-7058

WoS: 000300512400140

Scopus: 2-s2.0-84857184202

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	4
	4

TY  - CONF
AU  - Ranđelović, Danijela
AU  - Frantlović, Miloš
AU  - Miljkovic, B.
AU  - Rosandic, B.
AU  - Jakšić, Zoran
AU  - Popović, Bogdan
PY  - 2011
UR  - http://cer.ihtm.bg.ac.rs/handle/123456789/832
AB  - We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.
PB  - Elsevier
C3  - Eurosensors Xxv
T1  - Intelligent thermopile-based vacuum sensor
VL  - 25
DO  - 10.1016/j.proeng.2011.12.143
ER  -

@conference{
author = "Ranđelović, Danijela and Frantlović, Miloš and Miljkovic, B. and Rosandic, B. and Jakšić, Zoran and Popović, Bogdan",
year = "2011",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/832",
abstract = "We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.",
publisher = "Elsevier",
journal = "Eurosensors Xxv",
title = "Intelligent thermopile-based vacuum sensor",
volume = "25",
doi = "10.1016/j.proeng.2011.12.143"
}

Ranđelović, D., Frantlović, M., Miljkovic, B., Rosandic, B., Jakšić, Z.,& Popović, B. (2011). Intelligent thermopile-based vacuum sensor.
Eurosensors Xxv
Elsevier., 25.
https://doi.org/10.1016/j.proeng.2011.12.143

Ranđelović D, Frantlović M, Miljkovic B, Rosandic B, Jakšić Z, Popović B. Intelligent thermopile-based vacuum sensor. Eurosensors Xxv. 2011;25

Ranđelović Danijela, Frantlović Miloš, Miljkovic B., Rosandic B., Jakšić Zoran, Popović Bogdan, "Intelligent thermopile-based vacuum sensor" Eurosensors Xxv, 25 (2011),
https://doi.org/10.1016/j.proeng.2011.12.143 .