We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.
TY - CONF
AU - Randjelović, Danijela
AU - Frantlović, Miloš
AU - Miljkovic, B.
AU - Rosandic, B.
AU - Jakšić, Zoran
AU - Popović, Bogdan
PY - 2011
UR - https://cer.ihtm.bg.ac.rs/handle/123456789/832
AB - We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.
PB - Elsevier
C3 - Eurosensors Xxv
T1 - Intelligent thermopile-based vacuum sensor
VL - 25
DO - 10.1016/j.proeng.2011.12.143
UR - Conv_2742
ER -
@conference{
author = "Randjelović, Danijela and Frantlović, Miloš and Miljkovic, B. and Rosandic, B. and Jakšić, Zoran and Popović, Bogdan",
year = "2011",
abstract = "We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.",
publisher = "Elsevier",
journal = "Eurosensors Xxv",
title = "Intelligent thermopile-based vacuum sensor",
volume = "25",
doi = "10.1016/j.proeng.2011.12.143",
url = "Conv_2742"
}
Randjelović, D., Frantlović, M., Miljkovic, B., Rosandic, B., Jakšić, Z.,& Popović, B.. (2011). Intelligent thermopile-based vacuum sensor. in Eurosensors Xxv
Elsevier., 25.
https://doi.org/10.1016/j.proeng.2011.12.143
Conv_2742
Randjelović D, Frantlović M, Miljkovic B, Rosandic B, Jakšić Z, Popović B. Intelligent thermopile-based vacuum sensor. in Eurosensors Xxv. 2011;25.
doi:10.1016/j.proeng.2011.12.143
Conv_2742 .
