Intelligent thermopile-based vacuum sensor

2011
Authors
Ranđelović, Danijela
Frantlović, Miloš

Miljkovic, B.
Rosandic, B.
Jakšić, Zoran

Popović, Bogdan
Conference object (Published version)

Metadata
Show full item recordAbstract
We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.
Keywords:
vacuum sensor / intelligent sensor / thermopile / pressure measurementSource:
Eurosensors Xxv, 2011, 25Publisher:
- Elsevier
Projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
DOI: 10.1016/j.proeng.2011.12.143
ISSN: 1877-7058