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Investigation of the effects of Ar plasma etching in Si surface by photoacoustic method
(EDP Sciences, 2005)
The effects of Ar plasma treatment on the Si surface were investigated by photoacoustic spectroscopy and atomic force microscopy. We studied the surface structure as a function of plasma experimental parameters to correlate ...
Investigation of the interface states in the SiO2– Si system by photoacoustic method
(EDP Sciences, 2005)
The interface states in SiO2 - Si system was investigated by photoacoustic (PA) spectroscopy. The amplitude and phase spectra were measured and analyzed in dependence on the wavelength of excitation optical beam. In the ...