Pregled tema: "MEMS devices"
Prikaz rezultata 1-2 od 2
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Nanomembrane: A New MEMS/NEMS Building Block
(IntechOpen, 2009) -
Structural, Electrical and Mechanical Behavior of Thin Copper Coatings Obtained by Various Electrodeposition Processes
(Institute of Electrical and Electronics Engineers (IEEE), 2021)