@inbook{
author = "Pergal, Marija and Jakšić, Olga and Rašljić Rafajilović, Milena and Vasiljević-Radović, Dana",
year = "2023",
abstract = "Polymer-based microelectromechanical systems (MEMS) and devices
are a rapidly expanding field with a wide range of applications, from
microfluidics including lab-on-a-chip systems, to new sensors and
actuators, to flexible and stretchable devices. The use of microfluidic
devices and, more broadly, MEMS structures based on polymer
materials, has increased tremendously due to their great potential in
biomedical, point-of-care, and general healthcare applications.
Currently, polymer materials (elastomers, thermoplastics, and
thermosetting polymers) are commonly used in the fabrication of
microfluidic devices and MEMS structures for their low cost, versatile
fabrication methods, biocompatibility, repeatability, and a wide range of
(customizable) material characteristics with improved functionality.
Polymers have become one of the favored functional materials for microfluidic devices, as they possess excellent mechanical and optical
properties. Furthermore, a variety of polymeric materials with unique
physical and chemical characteristics are also available. Compared to
silicon and glass, polymers are inexpensive, feature a wide variety of
material properties for meeting various application requirements of
disposable biomedical microfluidic devices and MEMS structures, and
have a wide variety of practical applications. In this chapter, different
types of polymer materials used in microfluidics and MEMS devices, the
properties of polymer materials, and the methods for fabricating
polymer-based microfluidic systems and MEMS structures are
described. This chapter highlights the most recent developments, future
trends, and challenges in the devices’ preparation methods, and
applications of polymer-based microfluidic and MEMS devices
generally. Special care has been dedicated to biosensing and applications
where polymer-based microfluidic and MEMS devices allow for new
functionalities: applications based on the use of flexible and stretchable
electronic devices, applications employing novel functional materials
(such as biomimetic scaffold tissues), and advanced sensing mechanisms
(as in plasmonic biosensing). Moreover, this chapter focuses on the
synthesis of polymeric and inorganic nanoparticles in microreactors. The
advantages and limitations of using polymer materials in MEMS
technology are also discussed.",
publisher = "Nova Science",
journal = "Advances in Materials Science Research",
booktitle = "Polymer-Based Microelectromechanical Systems (MEMS) and Microfluidic Devices: Engineering and Applications",
volume = "63",
pages = "1-117",
url = "https://hdl.handle.net/21.15107/rcub_cer_6870"
}