Photolithography-based Fabrication of Interdigitated Electrodes with Integrated Gold Microheater: Temperature Distribution Study
Аутори
Rašljić Rafajilović, MilenaBošković, Marko
Sarajlić, Milija
Mladenović, Ivana
Pešić, Ivan
Vasiljević-Radović, Dana
Pergal, Marija
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Interdigitated electrodes with integrated heaters
fabricated on a Si platform were investigated in this study. The
electrodes and heaters were made of gold, using standard
photolithography processes. The primary objective was to
analyze the maximum temperature achievable on the
microheater and characterize its temperature distribution. The
integrated heater achieved a maximum temperature of 420 °C
with an applied voltage of 16 V. The temperature distribution
was uniform across the entire surface of the heater, which was
located on the underside of the chip beneath the interdigitated
electrodes. At higher temperatures, the silver paste, utilized as
a bonding agent between the copper wires and heater,
underwent melting.
Кључне речи:
microheater / interdigitated electrodes / sensors / temperature / photolithographyИзвор:
Proceedings, X International conference IcETRAN, 05 - 08.06.2023, East Sarajevo, B&H, 2023, MOI1.1-1-MOI1.1-4Издавач:
- Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering
Финансирање / пројекти:
- Министарство науке, технолошког развоја и иновација Републике Србије, институционално финансирање - 200026 (Универзитет у Београду, Институт за хемију, технологију и металургију - ИХТМ) (RS-MESTD-inst-2020-200026)
URI
https://www.etran.rs/2023/E_PROCEEDINGS_ICETRAN_2023/IcETRAN23_RADOVI/MOI1.1.pdfhttps://cer.ihtm.bg.ac.rs/handle/123456789/6254
Институција/група
IHTMTY - CONF AU - Rašljić Rafajilović, Milena AU - Bošković, Marko AU - Sarajlić, Milija AU - Mladenović, Ivana AU - Pešić, Ivan AU - Vasiljević-Radović, Dana AU - Pergal, Marija PY - 2023 UR - https://www.etran.rs/2023/E_PROCEEDINGS_ICETRAN_2023/IcETRAN23_RADOVI/MOI1.1.pdf UR - https://cer.ihtm.bg.ac.rs/handle/123456789/6254 AB - Interdigitated electrodes with integrated heaters fabricated on a Si platform were investigated in this study. The electrodes and heaters were made of gold, using standard photolithography processes. The primary objective was to analyze the maximum temperature achievable on the microheater and characterize its temperature distribution. The integrated heater achieved a maximum temperature of 420 °C with an applied voltage of 16 V. The temperature distribution was uniform across the entire surface of the heater, which was located on the underside of the chip beneath the interdigitated electrodes. At higher temperatures, the silver paste, utilized as a bonding agent between the copper wires and heater, underwent melting. PB - Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering C3 - Proceedings, X International conference IcETRAN, 05 - 08.06.2023, East Sarajevo, B&H T1 - Photolithography-based Fabrication of Interdigitated Electrodes with Integrated Gold Microheater: Temperature Distribution Study SP - MOI1.1-1 EP - MOI1.1-4 UR - https://hdl.handle.net/21.15107/rcub_cer_6254 ER -
@conference{ author = "Rašljić Rafajilović, Milena and Bošković, Marko and Sarajlić, Milija and Mladenović, Ivana and Pešić, Ivan and Vasiljević-Radović, Dana and Pergal, Marija", year = "2023", abstract = "Interdigitated electrodes with integrated heaters fabricated on a Si platform were investigated in this study. The electrodes and heaters were made of gold, using standard photolithography processes. The primary objective was to analyze the maximum temperature achievable on the microheater and characterize its temperature distribution. The integrated heater achieved a maximum temperature of 420 °C with an applied voltage of 16 V. The temperature distribution was uniform across the entire surface of the heater, which was located on the underside of the chip beneath the interdigitated electrodes. At higher temperatures, the silver paste, utilized as a bonding agent between the copper wires and heater, underwent melting.", publisher = "Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering", journal = "Proceedings, X International conference IcETRAN, 05 - 08.06.2023, East Sarajevo, B&H", title = "Photolithography-based Fabrication of Interdigitated Electrodes with Integrated Gold Microheater: Temperature Distribution Study", pages = "MOI1.1-1-MOI1.1-4", url = "https://hdl.handle.net/21.15107/rcub_cer_6254" }
Rašljić Rafajilović, M., Bošković, M., Sarajlić, M., Mladenović, I., Pešić, I., Vasiljević-Radović, D.,& Pergal, M.. (2023). Photolithography-based Fabrication of Interdigitated Electrodes with Integrated Gold Microheater: Temperature Distribution Study. in Proceedings, X International conference IcETRAN, 05 - 08.06.2023, East Sarajevo, B&H Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering., MOI1.1-1-MOI1.1-4. https://hdl.handle.net/21.15107/rcub_cer_6254
Rašljić Rafajilović M, Bošković M, Sarajlić M, Mladenović I, Pešić I, Vasiljević-Radović D, Pergal M. Photolithography-based Fabrication of Interdigitated Electrodes with Integrated Gold Microheater: Temperature Distribution Study. in Proceedings, X International conference IcETRAN, 05 - 08.06.2023, East Sarajevo, B&H. 2023;:MOI1.1-1-MOI1.1-4. https://hdl.handle.net/21.15107/rcub_cer_6254 .
Rašljić Rafajilović, Milena, Bošković, Marko, Sarajlić, Milija, Mladenović, Ivana, Pešić, Ivan, Vasiljević-Radović, Dana, Pergal, Marija, "Photolithography-based Fabrication of Interdigitated Electrodes with Integrated Gold Microheater: Temperature Distribution Study" in Proceedings, X International conference IcETRAN, 05 - 08.06.2023, East Sarajevo, B&H (2023):MOI1.1-1-MOI1.1-4, https://hdl.handle.net/21.15107/rcub_cer_6254 .