dc.creator | Randjelović, Danijela | |
dc.creator | Jakšić, Olga | |
dc.creator | Smiljanić, Milče M. | |
dc.creator | Poljak, Predrag | |
dc.creator | Lazić, Žarko | |
dc.date.accessioned | 2023-02-25T16:42:52Z | |
dc.date.available | 2023-02-25T16:42:52Z | |
dc.date.issued | 2016 | |
dc.identifier.isbn | 978-86-81123-82-9 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/5792 | |
dc.description.abstract | The aim of this work is to study how performance of thermal flow sensors depends on variation of specific
geometrical parameters. Self-developed 1D analytical model was applied at a MEMS sensor based on Seebeck effect. The
main elements of the analysed structure are: p+
Si/Al thermocouples, p+
Si heater, thermally and electrically isolating
membrane and residual n-Si layer in membrane area. Two thermopiles consisting of N thermocouples are placed
symmetrically at both sides of the heater. In this type of flow sensor output signal is obtained as a difference between the
Seebeck voltages generated at the downstream and upstream thermopile. It was assumed that sensor is placed in the
constant air flow. Several parameters of interest were calculated including flow induced temperature difference established
between the downstream and upstream thermopile, output voltage and sensitivity. Simulations were performed in order to
analyse dependence of these parameters on residual n-Si layer thickness (dnSi), distance between the hot thermopile
junctions and the heater (Δl) and thermocouple width (wTP) and length (lTP). Simulation results show that sensitivity of the
thermal flow sensor is improving with increasing Δl and lTP. On the other hand, performance of the sensor will also increase
if dnSi or wTP are decreasing. | sr |
dc.language.iso | en | sr |
dc.publisher | Belgrade : The Military Technical Institute | sr |
dc.relation | info:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS// | sr |
dc.rights | openAccess | sr |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | |
dc.source | Proceedings - 7th International scientific conference on defensive technologies-proceedings, OTEH 2016, 6-7 October 2016, Belgrade, Serbia | sr |
dc.subject | MEMS | sr |
dc.subject | flow sensor | sr |
dc.subject | thermopile | sr |
dc.subject | analytical modelling | sr |
dc.title | Influence of geometrical parameters on performance of MEMS thermopile based flow sensor | sr |
dc.type | conferenceObject | sr |
dc.rights.license | BY | sr |
dc.citation.spage | 362 | |
dc.citation.epage | 366 | |
dc.identifier.rcub | https://hdl.handle.net/21.15107/rcub_cer_5792 | |
dc.identifier.fulltext | http://cer.ihtm.bg.ac.rs/bitstream/id/24083/bitstream_24083.pdf | |
dc.type.version | publishedVersion | sr |