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Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH / Kontrolisan raspored integrisanih prepreka u silicijumskim mikrokanalima nagrizanim u 25 mas.% rastvoru tetrametilamonijum hidroksida
(Association of Chemical Engeneers of Serbia, 2021)
In this paper, fabrication of silicon microchannels with integrated obstacles by using 25 wt.% tetramethylammonium hydroxide (TMAH) aqueous solution at the temperature of 80 C is presented and ...