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Monolithically Integrated Diffused Silicon Two-Zone Heaters for Silicon-Pyrex Glass Microreactors for Production of Nanoparticles: Heat Exchange Aspects.
(MDPI, 2020)
We present the design, simulation, fabrication and characterization of monolithically
integrated high resistivity p-type boron-di used silicon two-zone heaters in a model high temperature
microreactor intended for ...