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Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
(IOP Publishing, 2020)
In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute ...
Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
(IOP Publishing, 2020)
In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute ...