Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
Само за регистроване кориснике
2020
Аутори
Smiljanić, Milče M.Lazić, Žarko
Rašljić Rafajilović, Milena
Cvetanović Zobenica, Katarina
Milinković, Evgenija
Filipović, Ana
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analyti...cal relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.
Кључне речи:
Y bifurcation / microchannels / silicon / wet etching / TMAHИзвор:
Journal of Micromechanics and Microengineering, 2020, 31, 017001-Издавач:
- IOP Publishing
Финансирање / пројекти:
- Министарство науке, технолошког развоја и иновација Републике Србије, институционално финансирање - 200026 (Универзитет у Београду, Институт за хемију, технологију и металургију - ИХТМ) (RS-MESTD-inst-2020-200026)
Напомена:
- The peer-reviewed version: https://cer.ihtm.bg.ac.rs/handle/123456789/4002
DOI: 10.1088/1361-6439/abcb67
ISSN: 0960-1317
WoS: 000596723900001
Scopus: 2-s2.0-85097922064
Институција/група
IHTMTY - JOUR AU - Smiljanić, Milče M. AU - Lazić, Žarko AU - Rašljić Rafajilović, Milena AU - Cvetanović Zobenica, Katarina AU - Milinković, Evgenija AU - Filipović, Ana PY - 2020 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/4003 AB - In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms. PB - IOP Publishing T2 - Journal of Micromechanics and Microengineering T1 - Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution VL - 31 SP - 017001 DO - 10.1088/1361-6439/abcb67 ER -
@article{ author = "Smiljanić, Milče M. and Lazić, Žarko and Rašljić Rafajilović, Milena and Cvetanović Zobenica, Katarina and Milinković, Evgenija and Filipović, Ana", year = "2020", abstract = "In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.", publisher = "IOP Publishing", journal = "Journal of Micromechanics and Microengineering", title = "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution", volume = "31", pages = "017001", doi = "10.1088/1361-6439/abcb67" }
Smiljanić, M. M., Lazić, Ž., Rašljić Rafajilović, M., Cvetanović Zobenica, K., Milinković, E.,& Filipović, A.. (2020). Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering IOP Publishing., 31, 017001. https://doi.org/10.1088/1361-6439/abcb67
Smiljanić MM, Lazić Ž, Rašljić Rafajilović M, Cvetanović Zobenica K, Milinković E, Filipović A. Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering. 2020;31:017001. doi:10.1088/1361-6439/abcb67 .
Smiljanić, Milče M., Lazić, Žarko, Rašljić Rafajilović, Milena, Cvetanović Zobenica, Katarina, Milinković, Evgenija, Filipović, Ana, "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution" in Journal of Micromechanics and Microengineering, 31 (2020):017001, https://doi.org/10.1088/1361-6439/abcb67 . .