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Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
(IntechOpen, 2008)
We presented here one contact-less optical technique based on low-coherence interferometry for measurement of thickness and uniformity of Si membranes. We performed a single-mode fiber-optic sensing configuration that is ...
Nanomembrane: A New MEMS/NEMS Building Block
(IntechOpen, 2009)
Since nanomembranes are a novel concept which extends the range of MEMS & NEMS building blocks and practically introduces a new one, this means that whole branches of science and technology can be re-read and re-created ...
The role of catalysis in sustainable development
(Novi Sad, Serbia : The Serbian Academy of Science and Arts, Branch in Novi Sad, 2008)
In this paper basic concepts of sustainable development are given together with brief retrospective of development of catalysis. Impacts of catalysis on economic and particularly environmental sustainability are discussed. ...