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Nanomembrane: A New MEMS/NEMS Building Block
(IntechOpen, 2009)
Since nanomembranes are a novel concept which extends the range of MEMS & NEMS building blocks and practically introduces a new one, this means that whole branches of science and technology can be re-read and re-created ...
Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
(IntechOpen, 2008)
We presented here one contact-less optical technique based on low-coherence interferometry for measurement of thickness and uniformity of Si membranes. We performed a single-mode fiber-optic sensing configuration that is ...