TY  - CONF
AU  - Todorović, D. M.
AU  - Markushev, D.D.
AU  - Rabasović, M.D.
AU  - Radulović, Katarina
AU  - Jović, Vesna
PY  - 2012
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1141
AB  - Photoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 to 20000 Hz), for different thicknesses of Si rectangular membranes (from 10 to 100 m) The elastic characteristics of the Si chip with square membranes were described by the theory of thin elastic plate, i.e. as an elastic simply supported rectangular plate. The PA signals (sum of the thermodiffusion, thermoelastic and electronic deformation components) were calculated and compared with the experimental ones. These results showed that the PA elastic bending spectra are convenient for investigation the characteristics of micromechanical membraines. The PA elastic bending spectra of the optically driven micro-opto-electro- mechanical systems (MOEMS) enable, for example, to investigate the different electronic and thermal transport characteristics or technological processes in MEMS fabrications, etc.
C3  - 28th International Conference on Microelectronics - Proceedings, MIEL 2012
T1  - Photoacoustic elastic bending method: Study of the silicon membranes
SP  - 169
EP  - 172
DO  - 10.1109/MIEL.2012.6222825
ER  - 

@conference{
author = "Todorović, D. M. and Markushev, D.D. and Rabasović, M.D. and Radulović, Katarina and Jović, Vesna",
year = "2012",
abstract = "Photoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 to 20000 Hz), for different thicknesses of Si rectangular membranes (from 10 to 100 m) The elastic characteristics of the Si chip with square membranes were described by the theory of thin elastic plate, i.e. as an elastic simply supported rectangular plate. The PA signals (sum of the thermodiffusion, thermoelastic and electronic deformation components) were calculated and compared with the experimental ones. These results showed that the PA elastic bending spectra are convenient for investigation the characteristics of micromechanical membraines. The PA elastic bending spectra of the optically driven micro-opto-electro- mechanical systems (MOEMS) enable, for example, to investigate the different electronic and thermal transport characteristics or technological processes in MEMS fabrications, etc.",
journal = "28th International Conference on Microelectronics - Proceedings, MIEL 2012",
title = "Photoacoustic elastic bending method: Study of the silicon membranes",
pages = "169-172",
doi = "10.1109/MIEL.2012.6222825"
}

Todorović, D. M., Markushev, D.D., Rabasović, M.D., Radulović, K.,& Jović, V.. (2012). Photoacoustic elastic bending method: Study of the silicon membranes. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012, 169-172.
https://doi.org/10.1109/MIEL.2012.6222825

Todorović DM, Markushev D, Rabasović M, Radulović K, Jović V. Photoacoustic elastic bending method: Study of the silicon membranes. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012. 2012;:169-172.
doi:10.1109/MIEL.2012.6222825 .

Todorović, D. M., Markushev, D.D., Rabasović, M.D., Radulović, Katarina, Jović, Vesna, "Photoacoustic elastic bending method: Study of the silicon membranes" in 28th International Conference on Microelectronics - Proceedings, MIEL 2012 (2012):169-172,
https://doi.org/10.1109/MIEL.2012.6222825 . .

TY  - CONF
AU  - Todorović, D. M.
AU  - Rabasović, M.D.
AU  - Markushev, D.D.
AU  - Smiljanić, Miloljub
PY  - 2008
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/480
AB  - The recombination processes of surface modified Si samples by the PA elastic bending method were investigated. The experimental PA elastic bending signals were measured by using special constructed PA cell (the gas-microphone detection technique with transmission configuration) where the sample is mechanically clamped on the edge. The PA amplitude and phase spectra were measured and analyzed, as a function of the modulation frequency for different surface quality of Si wafer. The samples were the disks of intact wafers of Si with different thicknesses, and discs with mechanically treated surfaces. The experimental results and theoretical analyze showed a strong dependence of the PA elastic bending signal due the recombination processes on the surface defect states. These results show a clear influence of the process of the surface modification on the thermodiffusion, thermoelastic and electronic deformation mechanisms of the PA elastic bending signal.
C3  - 26th International Conference on Microelectronics, Proceedings, MIEL 2008
T1  - Photoacoustic elastic bending method: Investigation of the surface recombination states
SP  - 561
EP  - 564
DO  - 10.1109/ICMEL.2008.4559347
ER  - 

@conference{
author = "Todorović, D. M. and Rabasović, M.D. and Markushev, D.D. and Smiljanić, Miloljub",
year = "2008",
abstract = "The recombination processes of surface modified Si samples by the PA elastic bending method were investigated. The experimental PA elastic bending signals were measured by using special constructed PA cell (the gas-microphone detection technique with transmission configuration) where the sample is mechanically clamped on the edge. The PA amplitude and phase spectra were measured and analyzed, as a function of the modulation frequency for different surface quality of Si wafer. The samples were the disks of intact wafers of Si with different thicknesses, and discs with mechanically treated surfaces. The experimental results and theoretical analyze showed a strong dependence of the PA elastic bending signal due the recombination processes on the surface defect states. These results show a clear influence of the process of the surface modification on the thermodiffusion, thermoelastic and electronic deformation mechanisms of the PA elastic bending signal.",
journal = "26th International Conference on Microelectronics, Proceedings, MIEL 2008",
title = "Photoacoustic elastic bending method: Investigation of the surface recombination states",
pages = "561-564",
doi = "10.1109/ICMEL.2008.4559347"
}

Todorović, D. M., Rabasović, M.D., Markushev, D.D.,& Smiljanić, M.. (2008). Photoacoustic elastic bending method: Investigation of the surface recombination states. in 26th International Conference on Microelectronics, Proceedings, MIEL 2008, 561-564.
https://doi.org/10.1109/ICMEL.2008.4559347

Todorović DM, Rabasović M, Markushev D, Smiljanić M. Photoacoustic elastic bending method: Investigation of the surface recombination states. in 26th International Conference on Microelectronics, Proceedings, MIEL 2008. 2008;:561-564.
doi:10.1109/ICMEL.2008.4559347 .

Todorović, D. M., Rabasović, M.D., Markushev, D.D., Smiljanić, Miloljub, "Photoacoustic elastic bending method: Investigation of the surface recombination states" in 26th International Conference on Microelectronics, Proceedings, MIEL 2008 (2008):561-564,
https://doi.org/10.1109/ICMEL.2008.4559347 . .