TY  - CONF
AU  - Todorović, D. M.
AU  - Jović, Vesna
AU  - Radulović, Katarina
AU  - Sarajlić, Milija
AU  - Markushev, D.
AU  - Rabasovic, M.D.
PY  - 2014
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1605
AB  - The amplitude of the photoacoustic (PA) elastic bending signals vs. the modulation frequency of the excitation optical beam for the chip with Si cantilevers were measured and analyzed. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA spectra were measured in a frequency range from 20 to 20000 Hz. The signal in the PA cell without optical excitation (noise) was also measured and analyzed. Experimental results show that the PA measuring system (PA cell width electret's microphone and lock-in amplifier) has signal-noise ratio S/N ∼ 30000 at 100 Hz; ∼ 3000 at 1000 Hz; ∼ 5 at 10000 Hz. The correction of the measured signal, in order to remove the coherent electronic noise as a systematic error, was made. The experimental PA elastic bending signals of the cantilever were compared with the experimental PA elastic bending signals of the Si square membranes. These results showed that the PA elastic bending method is convenient for investigation the characteristics of micromechanical structures as microcantilevers.
PB  - Institute of Electrical and Electronics Engineers Inc.
C3  - Proceedings of the International Conference on Microelectronics, ICM
T1  - Investigation of the microcantilevers by the photoacoustic elastic bending method
SP  - 171
EP  - 174
DO  - 10.1109/MIEL.2014.6842113
ER  - 

@conference{
author = "Todorović, D. M. and Jović, Vesna and Radulović, Katarina and Sarajlić, Milija and Markushev, D. and Rabasovic, M.D.",
year = "2014",
abstract = "The amplitude of the photoacoustic (PA) elastic bending signals vs. the modulation frequency of the excitation optical beam for the chip with Si cantilevers were measured and analyzed. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA spectra were measured in a frequency range from 20 to 20000 Hz. The signal in the PA cell without optical excitation (noise) was also measured and analyzed. Experimental results show that the PA measuring system (PA cell width electret's microphone and lock-in amplifier) has signal-noise ratio S/N ∼ 30000 at 100 Hz; ∼ 3000 at 1000 Hz; ∼ 5 at 10000 Hz. The correction of the measured signal, in order to remove the coherent electronic noise as a systematic error, was made. The experimental PA elastic bending signals of the cantilever were compared with the experimental PA elastic bending signals of the Si square membranes. These results showed that the PA elastic bending method is convenient for investigation the characteristics of micromechanical structures as microcantilevers.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "Proceedings of the International Conference on Microelectronics, ICM",
title = "Investigation of the microcantilevers by the photoacoustic elastic bending method",
pages = "171-174",
doi = "10.1109/MIEL.2014.6842113"
}

Todorović, D. M., Jović, V., Radulović, K., Sarajlić, M., Markushev, D.,& Rabasovic, M.D.. (2014). Investigation of the microcantilevers by the photoacoustic elastic bending method. in Proceedings of the International Conference on Microelectronics, ICM
Institute of Electrical and Electronics Engineers Inc.., 171-174.
https://doi.org/10.1109/MIEL.2014.6842113

Todorović DM, Jović V, Radulović K, Sarajlić M, Markushev D, Rabasovic M. Investigation of the microcantilevers by the photoacoustic elastic bending method. in Proceedings of the International Conference on Microelectronics, ICM. 2014;:171-174.
doi:10.1109/MIEL.2014.6842113 .

Todorović, D. M., Jović, Vesna, Radulović, Katarina, Sarajlić, Milija, Markushev, D., Rabasovic, M.D., "Investigation of the microcantilevers by the photoacoustic elastic bending method" in Proceedings of the International Conference on Microelectronics, ICM (2014):171-174,
https://doi.org/10.1109/MIEL.2014.6842113 . .

TY  - JOUR
AU  - Todorović, D. M.
AU  - Rabasovic, M D
AU  - Markushev, D D
AU  - Sarajlić, Milija
PY  - 2014
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1422
AB  - The aim of this work is the development of photoacoustic (PA) method for the measurement and determination of parametres of thin films (with a thickness of less than 1 mu m). Experimental study of the optical, thermal, and elastic characteristics of the thin film on Si substrate by PA elastic bending method was given. Thin film-semiconductor (Si) sample is modeled by simultaneous analysis of the plasma, thermal, and elastic wave equations. Two normalization procedures of the PA elastic bending signal in function of the modulation frequency of the optical excitation were established. The experimental PA elastic bending signals were measured and analysed. Without loss of generality, the TiO2 thin film (with a thickness of 0.5 mu m) on Si substrate (circular plate) was experimentaly studied. We have studied the PA elastic bending signals in order to obtain the values of optical, thermal, and elastic parameters of TiO2 film. The analysis shows that it is possible to develop noncontact and nondestructive experimental method-PA elastic bending method for thin film study, with possibility to obtain the optical, thermal, and elastic parameters of the film thinner than 1 mu m.
PB  - Amer Inst Physics, Melville
T2  - Journal of Applied Physics
T1  - Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters
VL  - 116
IS  - 5
DO  - 10.1063/1.4890346
ER  - 

@article{
author = "Todorović, D. M. and Rabasovic, M D and Markushev, D D and Sarajlić, Milija",
year = "2014",
abstract = "The aim of this work is the development of photoacoustic (PA) method for the measurement and determination of parametres of thin films (with a thickness of less than 1 mu m). Experimental study of the optical, thermal, and elastic characteristics of the thin film on Si substrate by PA elastic bending method was given. Thin film-semiconductor (Si) sample is modeled by simultaneous analysis of the plasma, thermal, and elastic wave equations. Two normalization procedures of the PA elastic bending signal in function of the modulation frequency of the optical excitation were established. The experimental PA elastic bending signals were measured and analysed. Without loss of generality, the TiO2 thin film (with a thickness of 0.5 mu m) on Si substrate (circular plate) was experimentaly studied. We have studied the PA elastic bending signals in order to obtain the values of optical, thermal, and elastic parameters of TiO2 film. The analysis shows that it is possible to develop noncontact and nondestructive experimental method-PA elastic bending method for thin film study, with possibility to obtain the optical, thermal, and elastic parameters of the film thinner than 1 mu m.",
publisher = "Amer Inst Physics, Melville",
journal = "Journal of Applied Physics",
title = "Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters",
volume = "116",
number = "5",
doi = "10.1063/1.4890346"
}

Todorović, D. M., Rabasovic, M. D., Markushev, D. D.,& Sarajlić, M.. (2014). Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters. in Journal of Applied Physics
Amer Inst Physics, Melville., 116(5).
https://doi.org/10.1063/1.4890346

Todorović DM, Rabasovic MD, Markushev DD, Sarajlić M. Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters. in Journal of Applied Physics. 2014;116(5).
doi:10.1063/1.4890346 .

Todorović, D. M., Rabasovic, M D, Markushev, D D, Sarajlić, Milija, "Photoacoustic elastic bending in thin film-substrate system: Experimental determination of the thin film parameters" in Journal of Applied Physics, 116, no. 5 (2014),
https://doi.org/10.1063/1.4890346 . .

TY  - CONF
AU  - Todorović, D. M.
AU  - Markushev, D.D.
AU  - Rabasović, M.D.
AU  - Radulović, Katarina
AU  - Jović, Vesna
PY  - 2012
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1141
AB  - Photoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 to 20000 Hz), for different thicknesses of Si rectangular membranes (from 10 to 100 m) The elastic characteristics of the Si chip with square membranes were described by the theory of thin elastic plate, i.e. as an elastic simply supported rectangular plate. The PA signals (sum of the thermodiffusion, thermoelastic and electronic deformation components) were calculated and compared with the experimental ones. These results showed that the PA elastic bending spectra are convenient for investigation the characteristics of micromechanical membraines. The PA elastic bending spectra of the optically driven micro-opto-electro- mechanical systems (MOEMS) enable, for example, to investigate the different electronic and thermal transport characteristics or technological processes in MEMS fabrications, etc.
C3  - 28th International Conference on Microelectronics - Proceedings, MIEL 2012
T1  - Photoacoustic elastic bending method: Study of the silicon membranes
SP  - 169
EP  - 172
DO  - 10.1109/MIEL.2012.6222825
ER  - 

@conference{
author = "Todorović, D. M. and Markushev, D.D. and Rabasović, M.D. and Radulović, Katarina and Jović, Vesna",
year = "2012",
abstract = "Photoacoustic (PA) amplitude and phase spectra vs the modulation frequency of the excitation optical beam were measured and analyzed by PA elastic bending method. The PA spectra were measured in a frequency range (from 20 to 20000 Hz), for different thicknesses of Si rectangular membranes (from 10 to 100 m) The elastic characteristics of the Si chip with square membranes were described by the theory of thin elastic plate, i.e. as an elastic simply supported rectangular plate. The PA signals (sum of the thermodiffusion, thermoelastic and electronic deformation components) were calculated and compared with the experimental ones. These results showed that the PA elastic bending spectra are convenient for investigation the characteristics of micromechanical membraines. The PA elastic bending spectra of the optically driven micro-opto-electro- mechanical systems (MOEMS) enable, for example, to investigate the different electronic and thermal transport characteristics or technological processes in MEMS fabrications, etc.",
journal = "28th International Conference on Microelectronics - Proceedings, MIEL 2012",
title = "Photoacoustic elastic bending method: Study of the silicon membranes",
pages = "169-172",
doi = "10.1109/MIEL.2012.6222825"
}

Todorović, D. M., Markushev, D.D., Rabasović, M.D., Radulović, K.,& Jović, V.. (2012). Photoacoustic elastic bending method: Study of the silicon membranes. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012, 169-172.
https://doi.org/10.1109/MIEL.2012.6222825

Todorović DM, Markushev D, Rabasović M, Radulović K, Jović V. Photoacoustic elastic bending method: Study of the silicon membranes. in 28th International Conference on Microelectronics - Proceedings, MIEL 2012. 2012;:169-172.
doi:10.1109/MIEL.2012.6222825 .

Todorović, D. M., Markushev, D.D., Rabasović, M.D., Radulović, Katarina, Jović, Vesna, "Photoacoustic elastic bending method: Study of the silicon membranes" in 28th International Conference on Microelectronics - Proceedings, MIEL 2012 (2012):169-172,
https://doi.org/10.1109/MIEL.2012.6222825 . .

TY  - JOUR
AU  - Todorović, D. M.
AU  - Rabasovic, M. D.
AU  - Markushev, D. D.
AU  - Jović, Vesna
AU  - Radulović, Katarina
PY  - 2012
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/1120
AB  - Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.
PB  - Springer/Plenum Publishers, New York
T2  - International Journal of Thermophysics
T1  - Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method
VL  - 33
IS  - 10-11
SP  - 2222
EP  - 2229
DO  - 10.1007/s10765-012-1242-9
ER  - 

@article{
author = "Todorović, D. M. and Rabasovic, M. D. and Markushev, D. D. and Jović, Vesna and Radulović, Katarina",
year = "2012",
abstract = "Photoacoustic (PA) and photothermal (PT) science and technology extensively developed new methods for the investigation of micro (nano)-mechanical structures. PA and PT effects can be important also as driven mechanisms for optically excited micromechanical structures. The photoacoustic elastic bending method (PA-EBM) is based on the optical excitation of the micromechanical structure and detection of the acoustic response (PA signal) with a very sensitive PA detection system. The experimental PA elastic bending signals of the whole micromechanical structure were measured by using a special constructed PA cell (the gas-microphone detection technique with transmission configuration). The PA amplitude and phase spectra were measured, as a function of the modulation frequency in a frequency range from 20 Hz to 20 000 Hz, for different samples (Si chip with square membrane). The electronic and thermal elastic PA effects (electronic deformation and thermoelastic mechanisms of elastic wave generation) in a Si simply supported rectangular plate (3D geometry), photogenerated by a uniform and intensity-modulated optical beam, were studied. The theoretical model for the PA elastic bending frequency distribution by using the Green function method was given. The amplitude and phase PA signals were calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with experimental data.",
publisher = "Springer/Plenum Publishers, New York",
journal = "International Journal of Thermophysics",
title = "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method",
volume = "33",
number = "10-11",
pages = "2222-2229",
doi = "10.1007/s10765-012-1242-9"
}

Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, V.,& Radulović, K.. (2012). Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method. in International Journal of Thermophysics
Springer/Plenum Publishers, New York., 33(10-11), 2222-2229.
https://doi.org/10.1007/s10765-012-1242-9

Todorović DM, Rabasovic MD, Markushev DD, Jović V, Radulović K. Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method. in International Journal of Thermophysics. 2012;33(10-11):2222-2229.
doi:10.1007/s10765-012-1242-9 .

Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, Vesna, Radulović, Katarina, "Investigation of Micromechanical Structures by Photoacoustic Elastic Bending Method" in International Journal of Thermophysics, 33, no. 10-11 (2012):2222-2229,
https://doi.org/10.1007/s10765-012-1242-9 . .

TY  - CONF
AU  - Todorović, D. M.
AU  - Rabasović, M.D.
AU  - Markushev, D.D.
AU  - Smiljanić, Miloljub
PY  - 2008
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/480
AB  - The recombination processes of surface modified Si samples by the PA elastic bending method were investigated. The experimental PA elastic bending signals were measured by using special constructed PA cell (the gas-microphone detection technique with transmission configuration) where the sample is mechanically clamped on the edge. The PA amplitude and phase spectra were measured and analyzed, as a function of the modulation frequency for different surface quality of Si wafer. The samples were the disks of intact wafers of Si with different thicknesses, and discs with mechanically treated surfaces. The experimental results and theoretical analyze showed a strong dependence of the PA elastic bending signal due the recombination processes on the surface defect states. These results show a clear influence of the process of the surface modification on the thermodiffusion, thermoelastic and electronic deformation mechanisms of the PA elastic bending signal.
C3  - 26th International Conference on Microelectronics, Proceedings, MIEL 2008
T1  - Photoacoustic elastic bending method: Investigation of the surface recombination states
SP  - 561
EP  - 564
DO  - 10.1109/ICMEL.2008.4559347
ER  - 

@conference{
author = "Todorović, D. M. and Rabasović, M.D. and Markushev, D.D. and Smiljanić, Miloljub",
year = "2008",
abstract = "The recombination processes of surface modified Si samples by the PA elastic bending method were investigated. The experimental PA elastic bending signals were measured by using special constructed PA cell (the gas-microphone detection technique with transmission configuration) where the sample is mechanically clamped on the edge. The PA amplitude and phase spectra were measured and analyzed, as a function of the modulation frequency for different surface quality of Si wafer. The samples were the disks of intact wafers of Si with different thicknesses, and discs with mechanically treated surfaces. The experimental results and theoretical analyze showed a strong dependence of the PA elastic bending signal due the recombination processes on the surface defect states. These results show a clear influence of the process of the surface modification on the thermodiffusion, thermoelastic and electronic deformation mechanisms of the PA elastic bending signal.",
journal = "26th International Conference on Microelectronics, Proceedings, MIEL 2008",
title = "Photoacoustic elastic bending method: Investigation of the surface recombination states",
pages = "561-564",
doi = "10.1109/ICMEL.2008.4559347"
}

Todorović, D. M., Rabasović, M.D., Markushev, D.D.,& Smiljanić, M.. (2008). Photoacoustic elastic bending method: Investigation of the surface recombination states. in 26th International Conference on Microelectronics, Proceedings, MIEL 2008, 561-564.
https://doi.org/10.1109/ICMEL.2008.4559347

Todorović DM, Rabasović M, Markushev D, Smiljanić M. Photoacoustic elastic bending method: Investigation of the surface recombination states. in 26th International Conference on Microelectronics, Proceedings, MIEL 2008. 2008;:561-564.
doi:10.1109/ICMEL.2008.4559347 .

Todorović, D. M., Rabasović, M.D., Markushev, D.D., Smiljanić, Miloljub, "Photoacoustic elastic bending method: Investigation of the surface recombination states" in 26th International Conference on Microelectronics, Proceedings, MIEL 2008 (2008):561-564,
https://doi.org/10.1109/ICMEL.2008.4559347 . .