TY  - JOUR
AU  - Baglioni, Gabriele
AU  - Pezone, Roberto
AU  - Vollebregt, Sten
AU  - Cvetanović-Zobenica, Katarina
AU  - Spasenović, Marko
AU  - Todorović, Dejan
AU  - Liu, Hanquing
AU  - Verbiest, Gerard J.
AU  - van der Zant, Herre S. J.
AU  - Steeneken, Peter G.
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/6801
AB  - Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10–15 dB lower than that featured by current MEMS microphones.
PB  - Royal Society of Chemistry
T2  - Nanoscale
T1  - Ultra-sensitive graphene membranes for microphone applications
VL  - 15
VL  - 6352
SP  - 6343
DO  - 10.1039/D2NR05147H
ER  - 

@article{
author = "Baglioni, Gabriele and Pezone, Roberto and Vollebregt, Sten and Cvetanović-Zobenica, Katarina and Spasenović, Marko and Todorović, Dejan and Liu, Hanquing and Verbiest, Gerard J. and van der Zant, Herre S. J. and Steeneken, Peter G.",
year = "2023",
abstract = "Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10–15 dB lower than that featured by current MEMS microphones.",
publisher = "Royal Society of Chemistry",
journal = "Nanoscale",
title = "Ultra-sensitive graphene membranes for microphone applications",
volume = "15, 6352",
pages = "6343",
doi = "10.1039/D2NR05147H"
}

Baglioni, G., Pezone, R., Vollebregt, S., Cvetanović-Zobenica, K., Spasenović, M., Todorović, D., Liu, H., Verbiest, G. J., van der Zant, H. S. J.,& Steeneken, P. G.. (2023). Ultra-sensitive graphene membranes for microphone applications. in Nanoscale
Royal Society of Chemistry., 15, 6343.
https://doi.org/10.1039/D2NR05147H

Baglioni G, Pezone R, Vollebregt S, Cvetanović-Zobenica K, Spasenović M, Todorović D, Liu H, Verbiest GJ, van der Zant HSJ, Steeneken PG. Ultra-sensitive graphene membranes for microphone applications. in Nanoscale. 2023;15:6343.
doi:10.1039/D2NR05147H .

Baglioni, Gabriele, Pezone, Roberto, Vollebregt, Sten, Cvetanović-Zobenica, Katarina, Spasenović, Marko, Todorović, Dejan, Liu, Hanquing, Verbiest, Gerard J., van der Zant, Herre S. J., Steeneken, Peter G., "Ultra-sensitive graphene membranes for microphone applications" in Nanoscale, 15 (2023):6343,
https://doi.org/10.1039/D2NR05147H . .

TY  - JOUR
AU  - Vasić, Borislav
AU  - Ralević, Uroš
AU  - Cvetanović Zobenica, Katarina
AU  - Smiljanić, Milče M.
AU  - Gajić, Radoš
AU  - Spasenović, Marko
AU  - Vollebregt, Sten
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3351
AB  - Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.
PB  - Elsevier
T2  - Applied Surface Science
T1  - Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum
DO  - 10.1016/j.apsusc.2019.144792
ER  - 

@article{
author = "Vasić, Borislav and Ralević, Uroš and Cvetanović Zobenica, Katarina and Smiljanić, Milče M. and Gajić, Radoš and Spasenović, Marko and Vollebregt, Sten",
year = "2020",
abstract = "Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.",
publisher = "Elsevier",
journal = "Applied Surface Science",
title = "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum",
doi = "10.1016/j.apsusc.2019.144792"
}

Vasić, B., Ralević, U., Cvetanović Zobenica, K., Smiljanić, M. M., Gajić, R., Spasenović, M.,& Vollebregt, S.. (2020). Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science
Elsevier..
https://doi.org/10.1016/j.apsusc.2019.144792

Vasić B, Ralević U, Cvetanović Zobenica K, Smiljanić MM, Gajić R, Spasenović M, Vollebregt S. Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science. 2020;.
doi:10.1016/j.apsusc.2019.144792 .

Vasić, Borislav, Ralević, Uroš, Cvetanović Zobenica, Katarina, Smiljanić, Milče M., Gajić, Radoš, Spasenović, Marko, Vollebregt, Sten, "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum" in Applied Surface Science (2020),
https://doi.org/10.1016/j.apsusc.2019.144792 . .

TY  - JOUR
AU  - Vasić, Borislav
AU  - Ralević, Uroš
AU  - Cvetanović Zobenica, Katarina
AU  - Smiljanić, Milče M.
AU  - Gajić, Radoš
AU  - Spasenović, Marko
AU  - Vollebregt, Sten
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/3347
AB  - Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.
PB  - Elsevier
T2  - Applied Surface Science
T1  - Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum
VL  - 509
SP  - 144792
DO  - 10.1016/j.apsusc.2019.144792
ER  - 

@article{
author = "Vasić, Borislav and Ralević, Uroš and Cvetanović Zobenica, Katarina and Smiljanić, Milče M. and Gajić, Radoš and Spasenović, Marko and Vollebregt, Sten",
year = "2020",
abstract = "Chemical vapour deposition (CVD) is a promising method for producing large-scale graphene (Gr). Nevertheless, microscopic inhomogeneity of Gr grown on traditional metal substrates such as copper or nickel results in a spatial variation of Gr properties due to long wrinkles formed when the metal substrate shrinks during the cooling part of the production cycle. Recently, molybdenum (Mo) has emerged as an alternative substrate for CVD growth of Gr, mainly due to a better matching of the thermal expansion coefficient of the substrate and Gr. We investigate the quality of multilayer Gr grown on Mo and the relation between Gr morphology and nanoscale mechanical and electrical properties, and spatial homogeneity of these parameters. With atomic force microscopy (AFM) based scratching, Kelvin probe force microscopy, and conductive AFM, we measure friction and wear, surface potential, and local conductivity, respectively. We find that Gr grown on Mo is free of large wrinkles that are common with growth on other metals, although it contains a dense network of small wrinkles. We demonstrate that as a result of this unique and favorable morphology, the Gr studied here has low friction, high wear resistance, and excellent homogeneity of electrical surface potential and conductivity.",
publisher = "Elsevier",
journal = "Applied Surface Science",
title = "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum",
volume = "509",
pages = "144792",
doi = "10.1016/j.apsusc.2019.144792"
}

Vasić, B., Ralević, U., Cvetanović Zobenica, K., Smiljanić, M. M., Gajić, R., Spasenović, M.,& Vollebregt, S.. (2020). Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science
Elsevier., 509, 144792.
https://doi.org/10.1016/j.apsusc.2019.144792

Vasić B, Ralević U, Cvetanović Zobenica K, Smiljanić MM, Gajić R, Spasenović M, Vollebregt S. Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum. in Applied Surface Science. 2020;509:144792.
doi:10.1016/j.apsusc.2019.144792 .

Vasić, Borislav, Ralević, Uroš, Cvetanović Zobenica, Katarina, Smiljanić, Milče M., Gajić, Radoš, Spasenović, Marko, Vollebregt, Sten, "Low-friction, wear-resistant, and electrically homogeneous multilayer graphene grown by chemical vapor deposition on molybdenum" in Applied Surface Science, 509 (2020):144792,
https://doi.org/10.1016/j.apsusc.2019.144792 . .