Ultra-sensitive graphene membranes for microphone applications
Аутори
Baglioni, GabrielePezone, Roberto
Vollebregt, Sten
Cvetanović-Zobenica, Katarina
Spasenović, Marko
Todorović, Dejan
Liu, Hanquing
Verbiest, Gerard J.
van der Zant, Herre S. J.
Steeneken, Peter G.
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10–15 dB lower than that featured by current MEMS microphone...s.
Кључне речи:
membranes / MEMS / laser vibrometry / graphene membranes / microphonesИзвор:
Nanoscale, 2023, 15, 6343-Издавач:
- Royal Society of Chemistry
Финансирање / пројекти:
- Министарство науке, технолошког развоја и иновација Републике Србије, институционално финансирање - 200026 (Универзитет у Београду, Институт за хемију, технологију и металургију - ИХТМ) (RS-MESTD-inst-2020-200026)
Напомена:
- Archive: https://arxiv.org/abs/2211.03369
DOI: 10.1039/D2NR05147H
ISSN: 2040-3364
PubMed: 36916300
WoS: 000949667000001
Scopus: 2-s2.0-85151038125
Институција/група
IHTMTY - JOUR AU - Baglioni, Gabriele AU - Pezone, Roberto AU - Vollebregt, Sten AU - Cvetanović-Zobenica, Katarina AU - Spasenović, Marko AU - Todorović, Dejan AU - Liu, Hanquing AU - Verbiest, Gerard J. AU - van der Zant, Herre S. J. AU - Steeneken, Peter G. PY - 2023 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/6801 AB - Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10–15 dB lower than that featured by current MEMS microphones. PB - Royal Society of Chemistry T2 - Nanoscale T1 - Ultra-sensitive graphene membranes for microphone applications VL - 15 VL - 6352 SP - 6343 DO - 10.1039/D2NR05147H ER -
@article{ author = "Baglioni, Gabriele and Pezone, Roberto and Vollebregt, Sten and Cvetanović-Zobenica, Katarina and Spasenović, Marko and Todorović, Dejan and Liu, Hanquing and Verbiest, Gerard J. and van der Zant, Herre S. J. and Steeneken, Peter G.", year = "2023", abstract = "Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10–15 dB lower than that featured by current MEMS microphones.", publisher = "Royal Society of Chemistry", journal = "Nanoscale", title = "Ultra-sensitive graphene membranes for microphone applications", volume = "15, 6352", pages = "6343", doi = "10.1039/D2NR05147H" }
Baglioni, G., Pezone, R., Vollebregt, S., Cvetanović-Zobenica, K., Spasenović, M., Todorović, D., Liu, H., Verbiest, G. J., van der Zant, H. S. J.,& Steeneken, P. G.. (2023). Ultra-sensitive graphene membranes for microphone applications. in Nanoscale Royal Society of Chemistry., 15, 6343. https://doi.org/10.1039/D2NR05147H
Baglioni G, Pezone R, Vollebregt S, Cvetanović-Zobenica K, Spasenović M, Todorović D, Liu H, Verbiest GJ, van der Zant HSJ, Steeneken PG. Ultra-sensitive graphene membranes for microphone applications. in Nanoscale. 2023;15:6343. doi:10.1039/D2NR05147H .
Baglioni, Gabriele, Pezone, Roberto, Vollebregt, Sten, Cvetanović-Zobenica, Katarina, Spasenović, Marko, Todorović, Dejan, Liu, Hanquing, Verbiest, Gerard J., van der Zant, Herre S. J., Steeneken, Peter G., "Ultra-sensitive graphene membranes for microphone applications" in Nanoscale, 15 (2023):6343, https://doi.org/10.1039/D2NR05147H . .