TY  - JOUR
AU  - Baglioni, Gabriele
AU  - Pezone, Roberto
AU  - Vollebregt, Sten
AU  - Cvetanović-Zobenica, Katarina
AU  - Spasenović, Marko
AU  - Todorović, Dejan
AU  - Liu, Hanquing
AU  - Verbiest, Gerard J.
AU  - van der Zant, Herre S. J.
AU  - Steeneken, Peter G.
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/6801
AB  - Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10–15 dB lower than that featured by current MEMS microphones.
PB  - Royal Society of Chemistry
T2  - Nanoscale
T1  - Ultra-sensitive graphene membranes for microphone applications
VL  - 15
VL  - 6352
SP  - 6343
DO  - 10.1039/D2NR05147H
ER  - 

@article{
author = "Baglioni, Gabriele and Pezone, Roberto and Vollebregt, Sten and Cvetanović-Zobenica, Katarina and Spasenović, Marko and Todorović, Dejan and Liu, Hanquing and Verbiest, Gerard J. and van der Zant, Herre S. J. and Steeneken, Peter G.",
year = "2023",
abstract = "Microphones exploit the motion of suspended membranes to detect sound waves. Since the microphone performance can be improved by reducing the thickness and mass of its sensing membrane, graphene-based microphones are expected to outperform state-of-the-art microelectromechanical (MEMS) microphones and allow further miniaturization of the device. Here, we present a laser vibrometry study of the acoustic response of suspended multilayer graphene membranes for microphone applications. We address performance parameters relevant for acoustic sensing, including mechanical sensitivity, limit of detection and nonlinear distortion, and discuss the trade-offs and limitations in the design of graphene microphones. We demonstrate superior mechanical sensitivities of the graphene membranes, reaching more than 2 orders of magnitude higher compliances than commercial MEMS devices, and report a limit of detection as low as 15 dBSPL, which is 10–15 dB lower than that featured by current MEMS microphones.",
publisher = "Royal Society of Chemistry",
journal = "Nanoscale",
title = "Ultra-sensitive graphene membranes for microphone applications",
volume = "15, 6352",
pages = "6343",
doi = "10.1039/D2NR05147H"
}

Baglioni, G., Pezone, R., Vollebregt, S., Cvetanović-Zobenica, K., Spasenović, M., Todorović, D., Liu, H., Verbiest, G. J., van der Zant, H. S. J.,& Steeneken, P. G.. (2023). Ultra-sensitive graphene membranes for microphone applications. in Nanoscale
Royal Society of Chemistry., 15, 6343.
https://doi.org/10.1039/D2NR05147H

Baglioni G, Pezone R, Vollebregt S, Cvetanović-Zobenica K, Spasenović M, Todorović D, Liu H, Verbiest GJ, van der Zant HSJ, Steeneken PG. Ultra-sensitive graphene membranes for microphone applications. in Nanoscale. 2023;15:6343.
doi:10.1039/D2NR05147H .

Baglioni, Gabriele, Pezone, Roberto, Vollebregt, Sten, Cvetanović-Zobenica, Katarina, Spasenović, Marko, Todorović, Dejan, Liu, Hanquing, Verbiest, Gerard J., van der Zant, Herre S. J., Steeneken, Peter G., "Ultra-sensitive graphene membranes for microphone applications" in Nanoscale, 15 (2023):6343,
https://doi.org/10.1039/D2NR05147H . .