Milinković, Evgenija

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orcid::0000-0001-9860-1936
  • Milinković, Evgenija (10)
Projects

Author's Bibliography

Self-powered relative humidity sensor based on RF energy harvesting

Bošković, Marko; Vasiljević-Radović, Dana; Smiljanić, Milče; Cvetanović, Katarina; Milinković, Evgenija; Sarajlić, Milija

(Niš, Serbia : Faculty of Electronic Engineering, University of Niš, 2023)

TY  - CONF
AU  - Bošković, Marko
AU  - Vasiljević-Radović, Dana
AU  - Smiljanić, Milče
AU  - Cvetanović, Katarina
AU  - Milinković, Evgenija
AU  - Sarajlić, Milija
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7133
AB  - In this work, a self-powered relative humidity sensor based on RF energy harvesting is presented.
PB  - Niš, Serbia : Faculty of Electronic Engineering, University of Niš
C3  - ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia
T1  - Self-powered relative humidity sensor based on RF energy harvesting
SP  - 45
EP  - 45
UR  - https://hdl.handle.net/21.15107/rcub_cer_7133
ER  - 
@conference{
author = "Bošković, Marko and Vasiljević-Radović, Dana and Smiljanić, Milče and Cvetanović, Katarina and Milinković, Evgenija and Sarajlić, Milija",
year = "2023",
abstract = "In this work, a self-powered relative humidity sensor based on RF energy harvesting is presented.",
publisher = "Niš, Serbia : Faculty of Electronic Engineering, University of Niš",
journal = "ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia",
title = "Self-powered relative humidity sensor based on RF energy harvesting",
pages = "45-45",
url = "https://hdl.handle.net/21.15107/rcub_cer_7133"
}
Bošković, M., Vasiljević-Radović, D., Smiljanić, M., Cvetanović, K., Milinković, E.,& Sarajlić, M.. (2023). Self-powered relative humidity sensor based on RF energy harvesting. in ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia
Niš, Serbia : Faculty of Electronic Engineering, University of Niš., 45-45.
https://hdl.handle.net/21.15107/rcub_cer_7133
Bošković M, Vasiljević-Radović D, Smiljanić M, Cvetanović K, Milinković E, Sarajlić M. Self-powered relative humidity sensor based on RF energy harvesting. in ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia. 2023;:45-45.
https://hdl.handle.net/21.15107/rcub_cer_7133 .
Bošković, Marko, Vasiljević-Radović, Dana, Smiljanić, Milče, Cvetanović, Katarina, Milinković, Evgenija, Sarajlić, Milija, "Self-powered relative humidity sensor based on RF energy harvesting" in ELICSIR Project Symposium, Book of Abstracts, January 25 - 27, 2023, Niš, Serbia (2023):45-45,
https://hdl.handle.net/21.15107/rcub_cer_7133 .

Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements

Lazić, Žarko; Smiljanić, Milče; Tanasković, Dragan; Rašljić Rafajilović, Milena; Cvetanović, Katarina; Milinković, Evgenija; Bošković, Marko V.; Andrić, Stevan; Poljak, Predrag; Frantlović, Miloš

(MDPI, 2023)

TY  - CONF
AU  - Lazić, Žarko
AU  - Smiljanić, Milče
AU  - Tanasković, Dragan
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović, Katarina
AU  - Milinković, Evgenija
AU  - Bošković, Marko V.
AU  - Andrić, Stevan
AU  - Poljak, Predrag
AU  - Frantlović, Miloš
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7419
AB  - The existing instruments for aerodynamic pressure measurements are usually built around
an array of discrete pressure sensors, placed in the same housing together with a few discrete
temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing.
PB  - MDPI
C3  - Engineering proceedings
T1  - Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements
VL  - 58
IS  - 1
SP  - 52
DO  - 10.3390/ecsa-10-16071
ER  - 
@conference{
author = "Lazić, Žarko and Smiljanić, Milče and Tanasković, Dragan and Rašljić Rafajilović, Milena and Cvetanović, Katarina and Milinković, Evgenija and Bošković, Marko V. and Andrić, Stevan and Poljak, Predrag and Frantlović, Miloš",
year = "2023",
abstract = "The existing instruments for aerodynamic pressure measurements are usually built around
an array of discrete pressure sensors, placed in the same housing together with a few discrete
temperature sensors. However, this approach is limiting, especially regarding miniaturization, sensor matching, and thermal coupling. In this work, we intend to overcome these limitations by proposing a novel MEMS multisensor chip, which has a monolithically integrated matrix of four piezoresistive MEMS pressure-sensing elements and two resistive temperature-sensing elements. After finishing the preliminary chip design, we performed computer simulations in order to assess its mechanical behavior when measured pressure is applied. Subsequently, the final chip design was completed, and the first batch was fabricated. The used technological processes included photolithography, thermal oxidation, diffusion, sputtering, micromachining (wet chemical etching), anodic bonding, and wafer dicing.",
publisher = "MDPI",
journal = "Engineering proceedings",
title = "Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements",
volume = "58",
number = "1",
pages = "52",
doi = "10.3390/ecsa-10-16071"
}
Lazić, Ž., Smiljanić, M., Tanasković, D., Rašljić Rafajilović, M., Cvetanović, K., Milinković, E., Bošković, M. V., Andrić, S., Poljak, P.,& Frantlović, M.. (2023). Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements. in Engineering proceedings
MDPI., 58(1), 52.
https://doi.org/10.3390/ecsa-10-16071
Lazić Ž, Smiljanić M, Tanasković D, Rašljić Rafajilović M, Cvetanović K, Milinković E, Bošković MV, Andrić S, Poljak P, Frantlović M. Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements. in Engineering proceedings. 2023;58(1):52.
doi:10.3390/ecsa-10-16071 .
Lazić, Žarko, Smiljanić, Milče, Tanasković, Dragan, Rašljić Rafajilović, Milena, Cvetanović, Katarina, Milinković, Evgenija, Bošković, Marko V., Andrić, Stevan, Poljak, Predrag, Frantlović, Miloš, "Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements" in Engineering proceedings, 58, no. 1 (2023):52,
https://doi.org/10.3390/ecsa-10-16071 . .

Metoda za posmatranje i analizu protoka fluida u Si-Pyrex staklo opto-mikrofluidnim platformama

Smiljanić, Milče M.; Vorkapić, Miloš; Cvetanović, Katarina; Milinković, Evgenija; Lazić, Žarko; Bošković, Marko V.; Svorcan, Jelena

(University of Belgrade - Institute of Chemistry, Technology and Metallurgy, 2023)


                                            

                                            
Smiljanić, M. M., Vorkapić, M., Cvetanović, K., Milinković, E., Lazić, Ž., Bošković, M. V.,& Svorcan, J.. (2023). Metoda za posmatranje i analizu protoka fluida u Si-Pyrex staklo opto-mikrofluidnim platformama. 
University of Belgrade - Institute of Chemistry, Technology and Metallurgy..
https://hdl.handle.net/21.15107/rcub_cer_6659
Smiljanić MM, Vorkapić M, Cvetanović K, Milinković E, Lazić Ž, Bošković MV, Svorcan J. Metoda za posmatranje i analizu protoka fluida u Si-Pyrex staklo opto-mikrofluidnim platformama. 2023;.
https://hdl.handle.net/21.15107/rcub_cer_6659 .
Smiljanić, Milče M., Vorkapić, Miloš, Cvetanović, Katarina, Milinković, Evgenija, Lazić, Žarko, Bošković, Marko V., Svorcan, Jelena, "Metoda za posmatranje i analizu protoka fluida u Si-Pyrex staklo opto-mikrofluidnim platformama" (2023),
https://hdl.handle.net/21.15107/rcub_cer_6659 .

Exploring fullerene derivatives for optoelectronic applications: synthesis and characterization study

Jakšić, Jovana; Milinković, Evgenija; Cvetanović, Katarina; Vujošević, Zorana Tokić; Jovanov, Vladislav; Mitrović, Aleksandra; Maslak, Veselin

(Royal Society of Chemistry (RSC), 2023)

TY  - JOUR
AU  - Jakšić, Jovana
AU  - Milinković, Evgenija
AU  - Cvetanović, Katarina
AU  - Vujošević, Zorana Tokić
AU  - Jovanov, Vladislav
AU  - Mitrović, Aleksandra
AU  - Maslak, Veselin
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/7231
AB  - In this study, we conducted a comprehensive investigation of newly synthesized fullerene derivatives developed for potential application in perovskite solar cells (PSCs). We explored three novel dihydrofuran-fused C60 fullerene derivatives (13, 14, and 15) that were specifically designed to enhance solubility and interaction with the substrate, fluorine-doped tin oxide (FTO). A comparative analysis was performed, with reference to the widely used phenyl-C61-butyric acid methyl ester (PCBM) and compound 12, from which 13, 14, and 15 are derived, to assess the impact of sugar units on materials properties. The synthesized compounds demonstrated significant solubility in common organic solvents, a critical factor in their potential application in wet-processed PSCs. Our investigation included electrochemical property analysis, thin film deposition, surface characterization, and electrochemical impedance spectroscopy (EIS). EIS measurements unveiled key insights into charge transfer properties at the electrode/electrolyte interface, making the compounds attractive candidates for electron transport layers (ETLs) in PSCs.
PB  - Royal Society of Chemistry (RSC)
T2  - Physical Chemistry Chemical Physics
T1  - Exploring fullerene derivatives for optoelectronic applications: synthesis and characterization study
VL  - 26
IS  - 1
SP  - 517
EP  - 523
DO  - 10.1039/D3CP04322C
ER  - 
@article{
author = "Jakšić, Jovana and Milinković, Evgenija and Cvetanović, Katarina and Vujošević, Zorana Tokić and Jovanov, Vladislav and Mitrović, Aleksandra and Maslak, Veselin",
year = "2023",
abstract = "In this study, we conducted a comprehensive investigation of newly synthesized fullerene derivatives developed for potential application in perovskite solar cells (PSCs). We explored three novel dihydrofuran-fused C60 fullerene derivatives (13, 14, and 15) that were specifically designed to enhance solubility and interaction with the substrate, fluorine-doped tin oxide (FTO). A comparative analysis was performed, with reference to the widely used phenyl-C61-butyric acid methyl ester (PCBM) and compound 12, from which 13, 14, and 15 are derived, to assess the impact of sugar units on materials properties. The synthesized compounds demonstrated significant solubility in common organic solvents, a critical factor in their potential application in wet-processed PSCs. Our investigation included electrochemical property analysis, thin film deposition, surface characterization, and electrochemical impedance spectroscopy (EIS). EIS measurements unveiled key insights into charge transfer properties at the electrode/electrolyte interface, making the compounds attractive candidates for electron transport layers (ETLs) in PSCs.",
publisher = "Royal Society of Chemistry (RSC)",
journal = "Physical Chemistry Chemical Physics",
title = "Exploring fullerene derivatives for optoelectronic applications: synthesis and characterization study",
volume = "26",
number = "1",
pages = "517-523",
doi = "10.1039/D3CP04322C"
}
Jakšić, J., Milinković, E., Cvetanović, K., Vujošević, Z. T., Jovanov, V., Mitrović, A.,& Maslak, V.. (2023). Exploring fullerene derivatives for optoelectronic applications: synthesis and characterization study. in Physical Chemistry Chemical Physics
Royal Society of Chemistry (RSC)., 26(1), 517-523.
https://doi.org/10.1039/D3CP04322C
Jakšić J, Milinković E, Cvetanović K, Vujošević ZT, Jovanov V, Mitrović A, Maslak V. Exploring fullerene derivatives for optoelectronic applications: synthesis and characterization study. in Physical Chemistry Chemical Physics. 2023;26(1):517-523.
doi:10.1039/D3CP04322C .
Jakšić, Jovana, Milinković, Evgenija, Cvetanović, Katarina, Vujošević, Zorana Tokić, Jovanov, Vladislav, Mitrović, Aleksandra, Maslak, Veselin, "Exploring fullerene derivatives for optoelectronic applications: synthesis and characterization study" in Physical Chemistry Chemical Physics, 26, no. 1 (2023):517-523,
https://doi.org/10.1039/D3CP04322C . .

Self-Powered Wearable Breath-Monitoring Sensor Enabled by Electromagnetic Harvesting Based on Nano-Structured Electrochemically Active Aluminum

Bošković, Marko; Frantlović, Miloš; Milinković, Evgenija; Poljak, Predrag D.; Vasiljević-Radović, Dana; Stevanović, Jelena N.; Sarajlić, Milija

(Switzerland : Multidisciplinary Digital Publishing Institute (MDPI), 2023)

TY  - JOUR
AU  - Bošković, Marko
AU  - Frantlović, Miloš
AU  - Milinković, Evgenija
AU  - Poljak, Predrag D.
AU  - Vasiljević-Radović, Dana
AU  - Stevanović, Jelena N.
AU  - Sarajlić, Milija
PY  - 2023
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/5595
AB  - Self-powered sensors are gaining a lot of attention in recent years due to their possible
application in the Internet of Things, medical implants and wireless and wearable devices. Human
breath detection has applications in diagnostics, medical therapy and metabolism monitoring. One
possible approach for breath monitoring is detecting the humidity in exhaled air. Here, we present an
extremely sensitive, self-powered sensor for breath humidity monitoring. As a power source, the
sensor uses electromagnetic energy harvested from the environment. Even electromagnetic energy
harvested from the human body is enough for the operation of this sensor. The signal obtained using
the human body as a source was up to 100 mV with an estimated power of 1 nW. The relatively low
amount of energy that could be harvested in this way was producing a signal that was modulated by
an interdigitated capacitor made out of electrochemically activated aluminum. The signal obtained
in this way was rectified by a set of Schottky diodes and measured by a voltmeter. The sensor was
capable of following a variety of different respiration patterns during normal breathing, exercise
and rest, at the same time powered only by electromagnetic energy harvested from the human body.
Everything happened in the normal environment used for everyday work and life, without any
additional sources, and at a safe level of electromagnetic radiation.
PB  - Switzerland : Multidisciplinary Digital Publishing Institute (MDPI)
T2  - Chemosensors
T1  - Self-Powered Wearable Breath-Monitoring Sensor Enabled by Electromagnetic Harvesting Based on Nano-Structured Electrochemically Active Aluminum
VL  - 11
IS  - 1
SP  - 51
DO  - 10.3390/chemosensors11010051
ER  - 
@article{
author = "Bošković, Marko and Frantlović, Miloš and Milinković, Evgenija and Poljak, Predrag D. and Vasiljević-Radović, Dana and Stevanović, Jelena N. and Sarajlić, Milija",
year = "2023",
abstract = "Self-powered sensors are gaining a lot of attention in recent years due to their possible
application in the Internet of Things, medical implants and wireless and wearable devices. Human
breath detection has applications in diagnostics, medical therapy and metabolism monitoring. One
possible approach for breath monitoring is detecting the humidity in exhaled air. Here, we present an
extremely sensitive, self-powered sensor for breath humidity monitoring. As a power source, the
sensor uses electromagnetic energy harvested from the environment. Even electromagnetic energy
harvested from the human body is enough for the operation of this sensor. The signal obtained using
the human body as a source was up to 100 mV with an estimated power of 1 nW. The relatively low
amount of energy that could be harvested in this way was producing a signal that was modulated by
an interdigitated capacitor made out of electrochemically activated aluminum. The signal obtained
in this way was rectified by a set of Schottky diodes and measured by a voltmeter. The sensor was
capable of following a variety of different respiration patterns during normal breathing, exercise
and rest, at the same time powered only by electromagnetic energy harvested from the human body.
Everything happened in the normal environment used for everyday work and life, without any
additional sources, and at a safe level of electromagnetic radiation.",
publisher = "Switzerland : Multidisciplinary Digital Publishing Institute (MDPI)",
journal = "Chemosensors",
title = "Self-Powered Wearable Breath-Monitoring Sensor Enabled by Electromagnetic Harvesting Based on Nano-Structured Electrochemically Active Aluminum",
volume = "11",
number = "1",
pages = "51",
doi = "10.3390/chemosensors11010051"
}
Bošković, M., Frantlović, M., Milinković, E., Poljak, P. D., Vasiljević-Radović, D., Stevanović, J. N.,& Sarajlić, M.. (2023). Self-Powered Wearable Breath-Monitoring Sensor Enabled by Electromagnetic Harvesting Based on Nano-Structured Electrochemically Active Aluminum. in Chemosensors
Switzerland : Multidisciplinary Digital Publishing Institute (MDPI)., 11(1), 51.
https://doi.org/10.3390/chemosensors11010051
Bošković M, Frantlović M, Milinković E, Poljak PD, Vasiljević-Radović D, Stevanović JN, Sarajlić M. Self-Powered Wearable Breath-Monitoring Sensor Enabled by Electromagnetic Harvesting Based on Nano-Structured Electrochemically Active Aluminum. in Chemosensors. 2023;11(1):51.
doi:10.3390/chemosensors11010051 .
Bošković, Marko, Frantlović, Miloš, Milinković, Evgenija, Poljak, Predrag D., Vasiljević-Radović, Dana, Stevanović, Jelena N., Sarajlić, Milija, "Self-Powered Wearable Breath-Monitoring Sensor Enabled by Electromagnetic Harvesting Based on Nano-Structured Electrochemically Active Aluminum" in Chemosensors, 11, no. 1 (2023):51,
https://doi.org/10.3390/chemosensors11010051 . .
6

Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH

Smiljanić, Milče M.; Radjenović, Branislav; Lazić, Žarko; Radmilović Radjenović, Marija; Rašljić Rafajilović, Milena; Cvetanović Zobenica, Katarina; Milinković, Evgenija; Filipović, Ana

(Association of Chemical Engeneers of Serbia, 2021)

TY  - JOUR
AU  - Smiljanić, Milče M.
AU  - Radjenović, Branislav
AU  - Lazić, Žarko
AU  - Radmilović Radjenović, Marija
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović Zobenica, Katarina
AU  - Milinković, Evgenija
AU  - Filipović, Ana
PY  - 2021
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4453
AB  - In  this  paper,  fabrication  of  silicon  microchannels  with  integrated  obstacles  by  using  25 wt.% tetramethylammonium  hydroxide  (TMAH)  aqueous  solution  at  the  temperature  of  80 C  is presented  and  analysed.  We  studied  basic  island  patterns,  which present  union  of  two symmetrical parallelograms with the sides along predetermined crystallographic directions <n10> (2<n<8) and <100>. Acute angles of the parallelograms were smaller than 45o. We have derived analytical  relations  for  determining  dimensions  of  the  integrated  obstacles.  The  developed etching  technique  provides  reduction  of  the  distance  between  the  obstacles.  Before  the experiments, we performed simulations of pattern etching based on the level set method and presented  evolution  of  the  etched basic  patterns  for  the  predetermined  crystallographic directions  <n10>.  Combination  of  basic  patterns  with  sides  along  the  <610>  and  <100> crystallographic  directions  is  used  to  fabricate  a  matrix  of  two  row  of  silicon  obstacles  in  a microchannel.   We   obtained   a   good   agreement   between   the   experimental   results   and simulations.   Our   results   enable   simple  and   cost-effective  fabrication   of  various   complex microfluidic silicon platforms with integrated obstacles.
AB  - U ovom radu je prezentovana i analizirana izrada silicijumskih mikrokanala sa integrisanim preprekama u vodenom rastvoru 25 mas.% tetrametilamonijum hidroksida (TMAH) na temperaturi od 80 oC. Proučavani su osnovni oblici maski koji predstavljaju uniju dva simetrična ostrva u obliku paralelograma čije su stranice duž unapred određenih kristalografskih pravaca (2<n<8) i <100>. Oštri uglovi paralelograma su manji od 45˚. Izvedene su formule za izračunavanje dimenzija integrisanih prepreka. Razvijena je tehnika nagrizanja koja smanjuje rastojanje između prepreka. Pre eksperimenata izvršene su simulacije osnovnih oblika koje se baziraju na metodi implicitno definisanih nivoa (engl. level set method). Prezentovan je razvoj nagrizanih osnovnih oblika maski za unapred određene kristalografske pravce <n10>. Kombinacija osnovnih oblika maski čije su stranice duž kristalografskih pravaca <610> i <100> je iskorišćena za izradu dva reda matrice silicijumskih prepreka u mikrokanalu. Dobijeno je dobro slaganje između eksperimenata i simulacija. Dobijeni rezultati omogućavaju jednostavnu i jeftinu izradu različitih kompleksnih mikrofluidnih silicijumskih platformi sa integrisanim preprekama.
PB  - Association of Chemical Engeneers of Serbia
T2  - Hemijska industrija
T1  - Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH
T1  - Kontrolisan raspored integrisanih prepreka u silicijumskim mikrokanalima nagrizanim u 25 mas.% rastvoru tetrametilamonijum hidroksida
VL  - 75
IS  - 1
SP  - 15
EP  - 24
DO  - 10.2298/HEMIND200807005S
ER  - 
@article{
author = "Smiljanić, Milče M. and Radjenović, Branislav and Lazić, Žarko and Radmilović Radjenović, Marija and Rašljić Rafajilović, Milena and Cvetanović Zobenica, Katarina and Milinković, Evgenija and Filipović, Ana",
year = "2021",
abstract = "In  this  paper,  fabrication  of  silicon  microchannels  with  integrated  obstacles  by  using  25 wt.% tetramethylammonium  hydroxide  (TMAH)  aqueous  solution  at  the  temperature  of  80 C  is presented  and  analysed.  We  studied  basic  island  patterns,  which present  union  of  two symmetrical parallelograms with the sides along predetermined crystallographic directions <n10> (2<n<8) and <100>. Acute angles of the parallelograms were smaller than 45o. We have derived analytical  relations  for  determining  dimensions  of  the  integrated  obstacles.  The  developed etching  technique  provides  reduction  of  the  distance  between  the  obstacles.  Before  the experiments, we performed simulations of pattern etching based on the level set method and presented  evolution  of  the  etched basic  patterns  for  the  predetermined  crystallographic directions  <n10>.  Combination  of  basic  patterns  with  sides  along  the  <610>  and  <100> crystallographic  directions  is  used  to  fabricate  a  matrix  of  two  row  of  silicon  obstacles  in  a microchannel.   We   obtained   a   good   agreement   between   the   experimental   results   and simulations.   Our   results   enable   simple  and   cost-effective  fabrication   of  various   complex microfluidic silicon platforms with integrated obstacles., U ovom radu je prezentovana i analizirana izrada silicijumskih mikrokanala sa integrisanim preprekama u vodenom rastvoru 25 mas.% tetrametilamonijum hidroksida (TMAH) na temperaturi od 80 oC. Proučavani su osnovni oblici maski koji predstavljaju uniju dva simetrična ostrva u obliku paralelograma čije su stranice duž unapred određenih kristalografskih pravaca (2<n<8) i <100>. Oštri uglovi paralelograma su manji od 45˚. Izvedene su formule za izračunavanje dimenzija integrisanih prepreka. Razvijena je tehnika nagrizanja koja smanjuje rastojanje između prepreka. Pre eksperimenata izvršene su simulacije osnovnih oblika koje se baziraju na metodi implicitno definisanih nivoa (engl. level set method). Prezentovan je razvoj nagrizanih osnovnih oblika maski za unapred određene kristalografske pravce <n10>. Kombinacija osnovnih oblika maski čije su stranice duž kristalografskih pravaca <610> i <100> je iskorišćena za izradu dva reda matrice silicijumskih prepreka u mikrokanalu. Dobijeno je dobro slaganje između eksperimenata i simulacija. Dobijeni rezultati omogućavaju jednostavnu i jeftinu izradu različitih kompleksnih mikrofluidnih silicijumskih platformi sa integrisanim preprekama.",
publisher = "Association of Chemical Engeneers of Serbia",
journal = "Hemijska industrija",
title = "Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH, Kontrolisan raspored integrisanih prepreka u silicijumskim mikrokanalima nagrizanim u 25 mas.% rastvoru tetrametilamonijum hidroksida",
volume = "75",
number = "1",
pages = "15-24",
doi = "10.2298/HEMIND200807005S"
}
Smiljanić, M. M., Radjenović, B., Lazić, Ž., Radmilović Radjenović, M., Rašljić Rafajilović, M., Cvetanović Zobenica, K., Milinković, E.,& Filipović, A.. (2021). Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH. in Hemijska industrija
Association of Chemical Engeneers of Serbia., 75(1), 15-24.
https://doi.org/10.2298/HEMIND200807005S
Smiljanić MM, Radjenović B, Lazić Ž, Radmilović Radjenović M, Rašljić Rafajilović M, Cvetanović Zobenica K, Milinković E, Filipović A. Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH. in Hemijska industrija. 2021;75(1):15-24.
doi:10.2298/HEMIND200807005S .
Smiljanić, Milče M., Radjenović, Branislav, Lazić, Žarko, Radmilović Radjenović, Marija, Rašljić Rafajilović, Milena, Cvetanović Zobenica, Katarina, Milinković, Evgenija, Filipović, Ana, "Controllable arrangement of integrated obstacles in silicon microchannels etched in 25 wt % TMAH" in Hemijska industrija, 75, no. 1 (2021):15-24,
https://doi.org/10.2298/HEMIND200807005S . .

A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution

Smiljanić, Milče M.; Lazić, Žarko; Milinković, Evgenija; Cvetanović, Katarina; Rašljić Rafajilović, Milena

(Belgrade : Institute of Electrical and Electronics Engineers Inc., 2021)

TY  - CONF
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Milinković, Evgenija
AU  - Cvetanović, Katarina
AU  - Rašljić Rafajilović, Milena
PY  - 2021
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4855
AB  - In this paper, a new concave corner compensation for etching of (100) silicon substrates in 25 wt % TMAH water solution at the temperature of 80°C is presented and analysed. The aim of developed technique is to reduce area of the etched {111} planes when there is a need to obtain 3D silicon structures with sidewalls vertical to substrate's surface. Appearance of the slow etching {111} planes cannot be eliminated. All crystallographic planes that appeared during evolution of etched compensations are determined. All the parameters necessary to apply developed concave corner compensation in various designs are provided. As a result, the side along the [removed] crystallographic direction in the masking layer of the unwanted {111} planes is reduced approximately 3 times.
PB  - Belgrade : Institute of Electrical and Electronics Engineers Inc.
C3  - 32nd IEEE International Conference on Microelectronics, MIEL 2021
T1  - A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution
SP  - 193
EP  - 196
DO  - 10.1109/MIEL52794.2021.9569186
ER  - 
@conference{
author = "Smiljanić, Milče M. and Lazić, Žarko and Milinković, Evgenija and Cvetanović, Katarina and Rašljić Rafajilović, Milena",
year = "2021",
abstract = "In this paper, a new concave corner compensation for etching of (100) silicon substrates in 25 wt % TMAH water solution at the temperature of 80°C is presented and analysed. The aim of developed technique is to reduce area of the etched {111} planes when there is a need to obtain 3D silicon structures with sidewalls vertical to substrate's surface. Appearance of the slow etching {111} planes cannot be eliminated. All crystallographic planes that appeared during evolution of etched compensations are determined. All the parameters necessary to apply developed concave corner compensation in various designs are provided. As a result, the side along the [removed] crystallographic direction in the masking layer of the unwanted {111} planes is reduced approximately 3 times.",
publisher = "Belgrade : Institute of Electrical and Electronics Engineers Inc.",
journal = "32nd IEEE International Conference on Microelectronics, MIEL 2021",
title = "A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution",
pages = "193-196",
doi = "10.1109/MIEL52794.2021.9569186"
}
Smiljanić, M. M., Lazić, Ž., Milinković, E., Cvetanović, K.,& Rašljić Rafajilović, M.. (2021). A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution. in 32nd IEEE International Conference on Microelectronics, MIEL 2021
Belgrade : Institute of Electrical and Electronics Engineers Inc.., 193-196.
https://doi.org/10.1109/MIEL52794.2021.9569186
Smiljanić MM, Lazić Ž, Milinković E, Cvetanović K, Rašljić Rafajilović M. A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution. in 32nd IEEE International Conference on Microelectronics, MIEL 2021. 2021;:193-196.
doi:10.1109/MIEL52794.2021.9569186 .
Smiljanić, Milče M., Lazić, Žarko, Milinković, Evgenija, Cvetanović, Katarina, Rašljić Rafajilović, Milena, "A Simple Concave Corner Compensation of Etched Si(100) in 25 wt % TMAH Water Solution" in 32nd IEEE International Conference on Microelectronics, MIEL 2021 (2021):193-196,
https://doi.org/10.1109/MIEL52794.2021.9569186 . .

Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin

Cvetanović Zobenica, Katarina; Tadić, Nenad; Lačnjevac, Uroš; Milinković, Evgenija; Rašljić Rafajilović, Milena; Smiljanić, Milče M.; Vasiljević-Radović, Dana; Stanisavljev, Dragomir

(Belgrade : ETRAN Society, 2020)

TY  - CONF
AU  - Cvetanović Zobenica, Katarina
AU  - Tadić, Nenad
AU  - Lačnjevac, Uroš
AU  - Milinković, Evgenija
AU  - Rašljić Rafajilović, Milena
AU  - Smiljanić, Milče M.
AU  - Vasiljević-Radović, Dana
AU  - Stanisavljev, Dragomir
PY  - 2020
UR  - https://www.etran.rs/2020/IcETRAN/About_Conference/
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4001
AB  - Dye Sensitized Solar cells (DSSC) are very attractive due to their low cost fabricating methods and used materials. One of the most important parts of the cells is the photoanode. Many semiconducting materials are used for this purpose, but most common one is titanium dioxide (TiO2). Optimal sintering temperature of anode plays important role in performance of TiO2 layer in DSSC, since it provides good electrical contact between particles, which consequently leads to better electron transfer through the cell, but still restricts unfavorable phase transformation. In this paper two identical cells with natural pigment hypericin as sensitizer were assembled with anodes sintered on two different temperatures (500 °C and 600 °C), so their performance parameters could be compared. The ratios between the maximal power densities (Pmax) and solar to electrical energy conversion efficiencies (η) for the two measured cells are 5 times in favor for the cell sintered at 600 °C, which shows the importance of temperature treatment of TiO2 electrodes for better performance of solar cells.
PB  - Belgrade : ETRAN Society
C3  - Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020
T1  - Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin
UR  - https://hdl.handle.net/21.15107/rcub_cer_4001
ER  - 
@conference{
author = "Cvetanović Zobenica, Katarina and Tadić, Nenad and Lačnjevac, Uroš and Milinković, Evgenija and Rašljić Rafajilović, Milena and Smiljanić, Milče M. and Vasiljević-Radović, Dana and Stanisavljev, Dragomir",
year = "2020",
abstract = "Dye Sensitized Solar cells (DSSC) are very attractive due to their low cost fabricating methods and used materials. One of the most important parts of the cells is the photoanode. Many semiconducting materials are used for this purpose, but most common one is titanium dioxide (TiO2). Optimal sintering temperature of anode plays important role in performance of TiO2 layer in DSSC, since it provides good electrical contact between particles, which consequently leads to better electron transfer through the cell, but still restricts unfavorable phase transformation. In this paper two identical cells with natural pigment hypericin as sensitizer were assembled with anodes sintered on two different temperatures (500 °C and 600 °C), so their performance parameters could be compared. The ratios between the maximal power densities (Pmax) and solar to electrical energy conversion efficiencies (η) for the two measured cells are 5 times in favor for the cell sintered at 600 °C, which shows the importance of temperature treatment of TiO2 electrodes for better performance of solar cells.",
publisher = "Belgrade : ETRAN Society",
journal = "Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020",
title = "Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin",
url = "https://hdl.handle.net/21.15107/rcub_cer_4001"
}
Cvetanović Zobenica, K., Tadić, N., Lačnjevac, U., Milinković, E., Rašljić Rafajilović, M., Smiljanić, M. M., Vasiljević-Radović, D.,& Stanisavljev, D.. (2020). Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin. in Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020
Belgrade : ETRAN Society..
https://hdl.handle.net/21.15107/rcub_cer_4001
Cvetanović Zobenica K, Tadić N, Lačnjevac U, Milinković E, Rašljić Rafajilović M, Smiljanić MM, Vasiljević-Radović D, Stanisavljev D. Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin. in Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020. 2020;.
https://hdl.handle.net/21.15107/rcub_cer_4001 .
Cvetanović Zobenica, Katarina, Tadić, Nenad, Lačnjevac, Uroš, Milinković, Evgenija, Rašljić Rafajilović, Milena, Smiljanić, Milče M., Vasiljević-Radović, Dana, Stanisavljev, Dragomir, "Influence of sintering temperature on the performance of titanium dioxide anode in Dye Sensitized Solar Cells with natural pigment hypericin" in Proccedings - 7th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2020 (2020),
https://hdl.handle.net/21.15107/rcub_cer_4001 .

Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution

Smiljanić, Milče M.; Lazić, Žarko; Rašljić Rafajilović, Milena; Cvetanović Zobenica, Katarina; Milinković, Evgenija; Filipović, Ana

(IOP Publishing, 2020)

TY  - JOUR
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović Zobenica, Katarina
AU  - Milinković, Evgenija
AU  - Filipović, Ana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4002
AB  - In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.
PB  - IOP Publishing
T2  - Journal of Micromechanics and Microengineering
T1  - Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
VL  - 31
SP  - 017001
DO  - 10.1088/1361-6439/abcb67
ER  - 
@article{
author = "Smiljanić, Milče M. and Lazić, Žarko and Rašljić Rafajilović, Milena and Cvetanović Zobenica, Katarina and Milinković, Evgenija and Filipović, Ana",
year = "2020",
abstract = "In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.",
publisher = "IOP Publishing",
journal = "Journal of Micromechanics and Microengineering",
title = "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution",
volume = "31",
pages = "017001",
doi = "10.1088/1361-6439/abcb67"
}
Smiljanić, M. M., Lazić, Ž., Rašljić Rafajilović, M., Cvetanović Zobenica, K., Milinković, E.,& Filipović, A.. (2020). Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering
IOP Publishing., 31, 017001.
https://doi.org/10.1088/1361-6439/abcb67
Smiljanić MM, Lazić Ž, Rašljić Rafajilović M, Cvetanović Zobenica K, Milinković E, Filipović A. Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering. 2020;31:017001.
doi:10.1088/1361-6439/abcb67 .
Smiljanić, Milče M., Lazić, Žarko, Rašljić Rafajilović, Milena, Cvetanović Zobenica, Katarina, Milinković, Evgenija, Filipović, Ana, "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution" in Journal of Micromechanics and Microengineering, 31 (2020):017001,
https://doi.org/10.1088/1361-6439/abcb67 . .

Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution

Smiljanić, Milče M.; Lazić, Žarko; Rašljić Rafajilović, Milena; Cvetanović Zobenica, Katarina; Milinković, Evgenija; Filipović, Ana

(IOP Publishing, 2020)

TY  - JOUR
AU  - Smiljanić, Milče M.
AU  - Lazić, Žarko
AU  - Rašljić Rafajilović, Milena
AU  - Cvetanović Zobenica, Katarina
AU  - Milinković, Evgenija
AU  - Filipović, Ana
PY  - 2020
UR  - https://cer.ihtm.bg.ac.rs/handle/123456789/4003
AB  - In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.
PB  - IOP Publishing
T2  - Journal of Micromechanics and Microengineering
T1  - Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution
VL  - 31
SP  - 017001
DO  - 10.1088/1361-6439/abcb67
ER  - 
@article{
author = "Smiljanić, Milče M. and Lazić, Žarko and Rašljić Rafajilović, Milena and Cvetanović Zobenica, Katarina and Milinković, Evgenija and Filipović, Ana",
year = "2020",
abstract = "In this study, Y-bifurcated microchannels fabricated from a {100} silicon in 25 wt% tetramethylammonium hydroxide water solution at the temperature of 80 °C have been presented and analysed. We studied the etching of acute angles with sides along the <n10> crystallographic directions in the masking layer where 1 < n < 8. We considered symmetrical acute corners in the masking layer with respect to the <100> crystallographic directions. The angles between the appropriate <n10> and <100> crystallographic directions were smaller than 45°. Moreover, we observed asymmetrical acute corners formed by the <n10> and <m10> crystallographic directions, where m ≠ n. We found that the obtained convex corners were not distorted during etching. Consequently, it is not necessary to apply convex corner compensation. These fabricated undistorted convex corners represent the angles of the bifurcations. The sidewalls of the microchannels are defined by etched planes of the {n11} and {100} families. Analytical relations were derived for the widths of the microchannels. The results enable simple and cost-effective fabrication of various complex silicon microfluidic platforms.",
publisher = "IOP Publishing",
journal = "Journal of Micromechanics and Microengineering",
title = "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution",
volume = "31",
pages = "017001",
doi = "10.1088/1361-6439/abcb67"
}
Smiljanić, M. M., Lazić, Ž., Rašljić Rafajilović, M., Cvetanović Zobenica, K., Milinković, E.,& Filipović, A.. (2020). Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering
IOP Publishing., 31, 017001.
https://doi.org/10.1088/1361-6439/abcb67
Smiljanić MM, Lazić Ž, Rašljić Rafajilović M, Cvetanović Zobenica K, Milinković E, Filipović A. Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution. in Journal of Micromechanics and Microengineering. 2020;31:017001.
doi:10.1088/1361-6439/abcb67 .
Smiljanić, Milče M., Lazić, Žarko, Rašljić Rafajilović, Milena, Cvetanović Zobenica, Katarina, Milinković, Evgenija, Filipović, Ana, "Silicon Y-bifurcated microchannels etched in 25 wt% TMAH water solution" in Journal of Micromechanics and Microengineering, 31 (2020):017001,
https://doi.org/10.1088/1361-6439/abcb67 . .