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Photoacoustic elastic bending method: Investigation of the surface recombination states
(26th International Conference on Microelectronics, Proceedings, MIEL 2008, 2008)
The recombination processes of surface modified Si samples by the PA elastic bending method were investigated. The experimental PA elastic bending signals were measured by using special constructed PA cell (the gas-microphone ...
Photothermal vibration spectra of square diaphragm with boss for low-pressure sensor
(26th International Conference on Microelectronics, Proceedings, MIEL 2008, 2008)
The low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser ...