Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures
Само за регистроване кориснике
2009
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.
Кључне речи:
Multilayer adsorption / Adsorption-desorption noise / MEMS/NEMS sensors / OscillatorsИзвор:
Microelectronic Engineering, 2009, 86, 4-6, 1278-1281Издавач:
- Elsevier
DOI: 10.1016/j.mee.2008.11.083
ISSN: 0167-9317
WoS: 000267273300216
Scopus: 2-s2.0-67349208483
Институција/група
IHTMTY - JOUR AU - Đurić, Zoran G. AU - Jokić, Ivana AU - Frantlović, Miloš AU - Radulović, Katarina PY - 2009 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/546 AB - This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented. PB - Elsevier T2 - Microelectronic Engineering T1 - Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures VL - 86 IS - 4-6 SP - 1278 EP - 1281 DO - 10.1016/j.mee.2008.11.083 ER -
@article{ author = "Đurić, Zoran G. and Jokić, Ivana and Frantlović, Miloš and Radulović, Katarina", year = "2009", abstract = "This paper presents for the first time the analysis of fluctuations of both the number of adsorbed particles and the adsorbed mass in the case of multilayer adsorption on the surface of MEMS/NEMS structures, described by the Brunauer-Emmett-Teller (BET) isotherm. This theory is useful for determination of the influence of adsorption/desorption noise on MEMS/NEMS vibrating structures. Our first results for the two-layer adsorption are presented.", publisher = "Elsevier", journal = "Microelectronic Engineering", title = "Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures", volume = "86", number = "4-6", pages = "1278-1281", doi = "10.1016/j.mee.2008.11.083" }
Đurić, Z. G., Jokić, I., Frantlović, M.,& Radulović, K.. (2009). Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures. in Microelectronic Engineering Elsevier., 86(4-6), 1278-1281. https://doi.org/10.1016/j.mee.2008.11.083
Đurić ZG, Jokić I, Frantlović M, Radulović K. Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures. in Microelectronic Engineering. 2009;86(4-6):1278-1281. doi:10.1016/j.mee.2008.11.083 .
Đurić, Zoran G., Jokić, Ivana, Frantlović, Miloš, Radulović, Katarina, "Two-layer adsorption and adsorbed mass fluctuations on micro/nanostructures" in Microelectronic Engineering, 86, no. 4-6 (2009):1278-1281, https://doi.org/10.1016/j.mee.2008.11.083 . .