Multipurpose MEMS thermal sensor based on thermopiles
Само за регистроване кориснике
2008
Аутори
Randjelović, DanijelaPetropoulos, Anastasios
Kaltsas, Grigoris
Stojanovic, Milos
Lazić, Žarko
Đurić, Zoran G.
Matic, Milan
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.
Кључне речи:
thermopile / micromachining / analytical and FEA modelling / thermal converter / flow meter / vacuum detectorИзвор:
Sensors and Actuators, A: Physical, 2008, 141, 2, 404-413Издавач:
- Elsevier Science Sa, Lausanne
DOI: 10.1016/j.sna.2007.10.043
ISSN: 0924-4247
WoS: 000253734900025
Scopus: 2-s2.0-38349136201
Институција/група
IHTMTY - JOUR AU - Randjelović, Danijela AU - Petropoulos, Anastasios AU - Kaltsas, Grigoris AU - Stojanovic, Milos AU - Lazić, Žarko AU - Đurić, Zoran G. AU - Matic, Milan PY - 2008 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/401 AB - This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors. PB - Elsevier Science Sa, Lausanne T2 - Sensors and Actuators, A: Physical T1 - Multipurpose MEMS thermal sensor based on thermopiles VL - 141 IS - 2 SP - 404 EP - 413 DO - 10.1016/j.sna.2007.10.043 ER -
@article{ author = "Randjelović, Danijela and Petropoulos, Anastasios and Kaltsas, Grigoris and Stojanovic, Milos and Lazić, Žarko and Đurić, Zoran G. and Matic, Milan", year = "2008", abstract = "This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors. Thermal isolation is assured using back etching of bulk silicon. Thermopiles have multilayer structure and sandwich membrane consists of layer of residual n-Si and sputtered oxide. Post-etching technique was developed and functional structures with membranes below 3 mu m were fabricated. Steady state and transient behaviour of fabricated structures were anticipated by applying two-zone 1D analytical model and FEA Comsol simulation. Sensors were tested as ac-dc transfer devices, gas flow meters and vacuum detectors.", publisher = "Elsevier Science Sa, Lausanne", journal = "Sensors and Actuators, A: Physical", title = "Multipurpose MEMS thermal sensor based on thermopiles", volume = "141", number = "2", pages = "404-413", doi = "10.1016/j.sna.2007.10.043" }
Randjelović, D., Petropoulos, A., Kaltsas, G., Stojanovic, M., Lazić, Ž., Đurić, Z. G.,& Matic, M.. (2008). Multipurpose MEMS thermal sensor based on thermopiles. in Sensors and Actuators, A: Physical Elsevier Science Sa, Lausanne., 141(2), 404-413. https://doi.org/10.1016/j.sna.2007.10.043
Randjelović D, Petropoulos A, Kaltsas G, Stojanovic M, Lazić Ž, Đurić ZG, Matic M. Multipurpose MEMS thermal sensor based on thermopiles. in Sensors and Actuators, A: Physical. 2008;141(2):404-413. doi:10.1016/j.sna.2007.10.043 .
Randjelović, Danijela, Petropoulos, Anastasios, Kaltsas, Grigoris, Stojanovic, Milos, Lazić, Žarko, Đurić, Zoran G., Matic, Milan, "Multipurpose MEMS thermal sensor based on thermopiles" in Sensors and Actuators, A: Physical, 141, no. 2 (2008):404-413, https://doi.org/10.1016/j.sna.2007.10.043 . .