Effect of substrate type on microhardness of multilayer thin film composite system
Konferencijski prilog (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Thin metallic multilayer films consisting of nanometer layer thickness deposited on different substrates have
shown promising mechanical, electrical and magnetical properties, especially for applications in fabrication of
microelectromechanical (MEMS) structures and wear-resistant applications.
Electrodeposition of Ni/Cu multilayer films on substrates of (111)-oriented single crystal Si and 100μm-thick
electrodeposited Ni film was carried out using dual-bath technique (DBT). The current density values was maintained
at 10 mA cm-2 and projected thickness of deposit was 5μm. Vickers microhardness of Ni/Cu thin multilayer films was
investigated. The substrate starts to contribute the measured hardness at penetration depths of the order of 0.07 - 0.20
times the film thickness. The measured “composite hardness” is a complex value that depends on the microstructure
and the hardness of the film and the substrate and their relative differences.
Ni/Cu films on (111)-oriented Si wafer a...nd 100μm-thick electrodeposited Ni film as the substrates can be thought as
“soft film on hard substrate” composite systems. Chicot-Lesage model based on the model for reinforced composites
can be applied to experimental data for all specimen and the film hardness was calculated for each indentation
diagonal. The values obtained for the film hardness HF are not constant for all types of these composite systems, but
influenced by the applied load.
Ključne reči:
Composite metallic multilayer films / Vickers microhardness / Composite hardness modelsIzvor:
Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrade, Serbia, 2014, 680-683Izdavač:
- Belgrade : Military Technical Institute
Finansiranje / projekti:
- Mikro, nano-sistemi i senzori za primenu u elektroprivredi, procesnoj industriji i zaštiti životne sredine (RS-MESTD-Technological Development (TD or TR)-32008)
Institucija/grupa
IHTMTY - CONF AU - Lamovec, Jelena AU - Jović, Vesna AU - Mladenović, Ivana AU - Popović, Bogdan AU - Radojević, Vesna PY - 2014 UR - http://www.vti.mod.gov.rs/oteh14/index.htm UR - https://cer.ihtm.bg.ac.rs/handle/123456789/3832 AB - Thin metallic multilayer films consisting of nanometer layer thickness deposited on different substrates have shown promising mechanical, electrical and magnetical properties, especially for applications in fabrication of microelectromechanical (MEMS) structures and wear-resistant applications. Electrodeposition of Ni/Cu multilayer films on substrates of (111)-oriented single crystal Si and 100μm-thick electrodeposited Ni film was carried out using dual-bath technique (DBT). The current density values was maintained at 10 mA cm-2 and projected thickness of deposit was 5μm. Vickers microhardness of Ni/Cu thin multilayer films was investigated. The substrate starts to contribute the measured hardness at penetration depths of the order of 0.07 - 0.20 times the film thickness. The measured “composite hardness” is a complex value that depends on the microstructure and the hardness of the film and the substrate and their relative differences. Ni/Cu films on (111)-oriented Si wafer and 100μm-thick electrodeposited Ni film as the substrates can be thought as “soft film on hard substrate” composite systems. Chicot-Lesage model based on the model for reinforced composites can be applied to experimental data for all specimen and the film hardness was calculated for each indentation diagonal. The values obtained for the film hardness HF are not constant for all types of these composite systems, but influenced by the applied load. PB - Belgrade : Military Technical Institute C3 - Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrade, Serbia T1 - Effect of substrate type on microhardness of multilayer thin film composite system SP - 680 EP - 683 UR - https://hdl.handle.net/21.15107/rcub_cer_3832 ER -
@conference{ author = "Lamovec, Jelena and Jović, Vesna and Mladenović, Ivana and Popović, Bogdan and Radojević, Vesna", year = "2014", abstract = "Thin metallic multilayer films consisting of nanometer layer thickness deposited on different substrates have shown promising mechanical, electrical and magnetical properties, especially for applications in fabrication of microelectromechanical (MEMS) structures and wear-resistant applications. Electrodeposition of Ni/Cu multilayer films on substrates of (111)-oriented single crystal Si and 100μm-thick electrodeposited Ni film was carried out using dual-bath technique (DBT). The current density values was maintained at 10 mA cm-2 and projected thickness of deposit was 5μm. Vickers microhardness of Ni/Cu thin multilayer films was investigated. The substrate starts to contribute the measured hardness at penetration depths of the order of 0.07 - 0.20 times the film thickness. The measured “composite hardness” is a complex value that depends on the microstructure and the hardness of the film and the substrate and their relative differences. Ni/Cu films on (111)-oriented Si wafer and 100μm-thick electrodeposited Ni film as the substrates can be thought as “soft film on hard substrate” composite systems. Chicot-Lesage model based on the model for reinforced composites can be applied to experimental data for all specimen and the film hardness was calculated for each indentation diagonal. The values obtained for the film hardness HF are not constant for all types of these composite systems, but influenced by the applied load.", publisher = "Belgrade : Military Technical Institute", journal = "Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrade, Serbia", title = "Effect of substrate type on microhardness of multilayer thin film composite system", pages = "680-683", url = "https://hdl.handle.net/21.15107/rcub_cer_3832" }
Lamovec, J., Jović, V., Mladenović, I., Popović, B.,& Radojević, V.. (2014). Effect of substrate type on microhardness of multilayer thin film composite system. in Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrade, Serbia Belgrade : Military Technical Institute., 680-683. https://hdl.handle.net/21.15107/rcub_cer_3832
Lamovec J, Jović V, Mladenović I, Popović B, Radojević V. Effect of substrate type on microhardness of multilayer thin film composite system. in Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrade, Serbia. 2014;:680-683. https://hdl.handle.net/21.15107/rcub_cer_3832 .
Lamovec, Jelena, Jović, Vesna, Mladenović, Ivana, Popović, Bogdan, Radojević, Vesna, "Effect of substrate type on microhardness of multilayer thin film composite system" in Proceedings - 6th International scientific conference on defensive technologies-proceedings, Belgrade, Serbia (2014):680-683, https://hdl.handle.net/21.15107/rcub_cer_3832 .