Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method
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2017
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Rectangular silicon cantilevers are studied by the photoacoustic (PA) elastic bending method. Experimental signals versus modulation frequency of the excitation optical beam are measured and analyzed in a frequency range from 20 Hz to 50 000 Hz. The procedure for experimental signal correction to eliminate the frequency characteristics of the measuring system is given. The corrected experimental signal shows a good correlation with theoretically calculated PA signal at frequencies below 32 000 Hz. The corrected experimental PA elastic bending signals for cantilevers with different thicknesses are analyzed. The experimental results allow identifying the resonant frequency (the first resonant mode) of the cantilever vibrations. These values are in good agreement with the theoretically computed values. A theoretical model of the optically excited Si cantilever is derived, taking into account plasmaelastic, thermoelastic, and thermodiffusion mechanisms. Dynamic relations for the amplitude ...and phase of electronic and thermal elastic vibrations in optically excited cantilevers are derived. The theoretical model is compared to the experimental results.
Ključne reči:
Cantilever / Photoacoustic / Plasmaelastic / ThermoelasticIzvor:
International Journal of Thermophysics, 2017, 38, 3Izdavač:
- Springer/Plenum Publishers, New York
Finansiranje / projekti:
- Atomski sudarni procesi i fotoakustička spektrometrija molekula i čvrstih tela (RS-MESTD-Basic Research (BR or ON)-171016)
DOI: 10.1007/s10765-016-2175-5
ISSN: 0195-928X
WoS: 000394983900006
Scopus: 2-s2.0-85008395848
Institucija/grupa
IHTMTY - JOUR AU - Todorović, D. M. AU - Rabasovic, M. D. AU - Markushev, D. D. AU - Jović, Vesna AU - Radulović, Katarina PY - 2017 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2193 AB - Rectangular silicon cantilevers are studied by the photoacoustic (PA) elastic bending method. Experimental signals versus modulation frequency of the excitation optical beam are measured and analyzed in a frequency range from 20 Hz to 50 000 Hz. The procedure for experimental signal correction to eliminate the frequency characteristics of the measuring system is given. The corrected experimental signal shows a good correlation with theoretically calculated PA signal at frequencies below 32 000 Hz. The corrected experimental PA elastic bending signals for cantilevers with different thicknesses are analyzed. The experimental results allow identifying the resonant frequency (the first resonant mode) of the cantilever vibrations. These values are in good agreement with the theoretically computed values. A theoretical model of the optically excited Si cantilever is derived, taking into account plasmaelastic, thermoelastic, and thermodiffusion mechanisms. Dynamic relations for the amplitude and phase of electronic and thermal elastic vibrations in optically excited cantilevers are derived. The theoretical model is compared to the experimental results. PB - Springer/Plenum Publishers, New York T2 - International Journal of Thermophysics T1 - Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method VL - 38 IS - 3 DO - 10.1007/s10765-016-2175-5 ER -
@article{ author = "Todorović, D. M. and Rabasovic, M. D. and Markushev, D. D. and Jović, Vesna and Radulović, Katarina", year = "2017", abstract = "Rectangular silicon cantilevers are studied by the photoacoustic (PA) elastic bending method. Experimental signals versus modulation frequency of the excitation optical beam are measured and analyzed in a frequency range from 20 Hz to 50 000 Hz. The procedure for experimental signal correction to eliminate the frequency characteristics of the measuring system is given. The corrected experimental signal shows a good correlation with theoretically calculated PA signal at frequencies below 32 000 Hz. The corrected experimental PA elastic bending signals for cantilevers with different thicknesses are analyzed. The experimental results allow identifying the resonant frequency (the first resonant mode) of the cantilever vibrations. These values are in good agreement with the theoretically computed values. A theoretical model of the optically excited Si cantilever is derived, taking into account plasmaelastic, thermoelastic, and thermodiffusion mechanisms. Dynamic relations for the amplitude and phase of electronic and thermal elastic vibrations in optically excited cantilevers are derived. The theoretical model is compared to the experimental results.", publisher = "Springer/Plenum Publishers, New York", journal = "International Journal of Thermophysics", title = "Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method", volume = "38", number = "3", doi = "10.1007/s10765-016-2175-5" }
Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, V.,& Radulović, K.. (2017). Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method. in International Journal of Thermophysics Springer/Plenum Publishers, New York., 38(3). https://doi.org/10.1007/s10765-016-2175-5
Todorović DM, Rabasovic MD, Markushev DD, Jović V, Radulović K. Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method. in International Journal of Thermophysics. 2017;38(3). doi:10.1007/s10765-016-2175-5 .
Todorović, D. M., Rabasovic, M. D., Markushev, D. D., Jović, Vesna, Radulović, Katarina, "Study of Silicon Cantilevers by the Photoacoustic Elastic Bending Method" in International Journal of Thermophysics, 38, no. 3 (2017), https://doi.org/10.1007/s10765-016-2175-5 . .