Analytical modelling of the transient response of thermopile-based MEMS sensors
Апстракт
This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The presented model takes into account all these parameters. This model was sucessfully implemented for the study of transient behaviour of our multifunctional sensors with p+Si/Al thermocouples and a bulk micromachined bilayered membrane. Simulations were performed for different gases of interest and conclusions were deduced regarding the influence of relevant parameters on the thermal time constant. This analytical approach is general and flexible enough to be implemented for analysis of the transient behaviour of thermopile-based sensors when used for different applications.
Кључне речи:
Analytical modelling / MEMS sensors / Thermopile / Transient responseИзвор:
Electronics, 2015, 19, 2, 70-73Издавач:
- University of Banja Luka
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
Институција/група
IHTMTY - JOUR AU - Randjelović, Danijela AU - Kozlov, A.G. AU - Jakšić, Olga AU - Smiljanić, Milče AU - Poljak, Predrag PY - 2015 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/1831 AB - This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The presented model takes into account all these parameters. This model was sucessfully implemented for the study of transient behaviour of our multifunctional sensors with p+Si/Al thermocouples and a bulk micromachined bilayered membrane. Simulations were performed for different gases of interest and conclusions were deduced regarding the influence of relevant parameters on the thermal time constant. This analytical approach is general and flexible enough to be implemented for analysis of the transient behaviour of thermopile-based sensors when used for different applications. PB - University of Banja Luka T2 - Electronics T1 - Analytical modelling of the transient response of thermopile-based MEMS sensors VL - 19 IS - 2 SP - 70 EP - 73 DO - 10.7251/ELS1519070R ER -
@article{ author = "Randjelović, Danijela and Kozlov, A.G. and Jakšić, Olga and Smiljanić, Milče and Poljak, Predrag", year = "2015", abstract = "This work presents an analytical model dedicated to study of the transient response of multipurpose MEMS devices based on thermopile sensors. In general, thermopile sensors response depends on ambient temperature, thermal conductivity of the gas inside the housing and the pressure of the gas. The presented model takes into account all these parameters. This model was sucessfully implemented for the study of transient behaviour of our multifunctional sensors with p+Si/Al thermocouples and a bulk micromachined bilayered membrane. Simulations were performed for different gases of interest and conclusions were deduced regarding the influence of relevant parameters on the thermal time constant. This analytical approach is general and flexible enough to be implemented for analysis of the transient behaviour of thermopile-based sensors when used for different applications.", publisher = "University of Banja Luka", journal = "Electronics", title = "Analytical modelling of the transient response of thermopile-based MEMS sensors", volume = "19", number = "2", pages = "70-73", doi = "10.7251/ELS1519070R" }
Randjelović, D., Kozlov, A.G., Jakšić, O., Smiljanić, M.,& Poljak, P.. (2015). Analytical modelling of the transient response of thermopile-based MEMS sensors. in Electronics University of Banja Luka., 19(2), 70-73. https://doi.org/10.7251/ELS1519070R
Randjelović D, Kozlov A, Jakšić O, Smiljanić M, Poljak P. Analytical modelling of the transient response of thermopile-based MEMS sensors. in Electronics. 2015;19(2):70-73. doi:10.7251/ELS1519070R .
Randjelović, Danijela, Kozlov, A.G., Jakšić, Olga, Smiljanić, Milče, Poljak, Predrag, "Analytical modelling of the transient response of thermopile-based MEMS sensors" in Electronics, 19, no. 2 (2015):70-73, https://doi.org/10.7251/ELS1519070R . .