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Investigation of the microcantilevers by the photoacoustic elastic bending method
(Institute of Electrical and Electronics Engineers Inc., 2014)
The amplitude of the photoacoustic (PA) elastic bending signals vs. the modulation frequency of the excitation optical beam for the chip with Si cantilevers were measured and analyzed. The experimental PA elastic bending ...
Stochastic Time Response of Adsorption-based Micro/Nanobiosensors with a Fluidic Reaction Chamber: the Influence of Mass Transfer
(Institute of Electrical and Electronics Engineers Inc., 2017)
An approximate model for efficient analysis of stochastic time response of microfluidic biosensors is presented, that considers a random AD process coupled with mass transfer (convection and diffusion) of target substance ...
Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant
(Institute of Electrical and Electronics Engineers Inc., 2014)
In this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considered in this work consists of thermopiles and thermally isolating membrane structure. The operating principle of such sensor ...
Numerical Simulation of Transient Response of Chemical and Biological Micro/Nanofabricated Sensors Operating in Multianalyte Environments
(Institute of Electrical and Electronics Engineers Inc., 2014)
In different kinds of surface-based chemical and biological micro/nanosensors, interpretation of the experimentally obtained data is performed based on approximate solutions for the sensor response, valid for the case of ...
Plasmonic Metamaterial with Fishnet Superlattice for Enhanced Chemical Sensing
(Institute of Electrical and Electronics Engineers Inc., 2014)
In this work we consider a novel type of superlattice fishnet metamaterial for chemical sensing. By superimposing two fishnet metamaterial lattices we aim to achieve increased functionality compared to the standard fishnet ...
Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors
(Institute of Electrical and Electronics Engineers Inc., 2014)
In industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive ...
Highly sensitive graphene-based chemical and biological sensors with selectivity achievable through low-frequency noise measurement-Theoretical considerations
(Institute of Electrical and Electronics Engineers Inc., 2014)
We have developed a theory of the low-frequency noise caused by interaction of the analyte with the active area of chemical and biological sensors. The main result is an analytical expression for the spectral density of ...
RF MEMS and NEMS Components and Adsorption-Desorption Induced Phase Noise
(Institute of Electrical and Electronics Engineers Inc., 2014)
Radio frequency micro- and nanoelectromechanical systems (RF MEMS and RF NEMS) and technologies have a great potential to overcome the constraints of conventional IC technologies in realization of fully integrated transceivers ...
Lagergren Kinetic Model and Multianalyte Detection by Plasmonic Sensors
(Institute of Electrical and Electronics Engineers Inc., 2014)
This work is dedicated to modeling of adsorption processes in plasmonic sensors. We give a generalization of the Lagergren first order reaction kinetic model to the situations where adsorption takes place in multianalyte ...
Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching
(Institute of Electrical and Electronics Engineers Inc., 2014)
This paper presents microcantilever fabrication on {100} oriented Si substrate using bulk micromachining technique. Detailed characteristics of convex corner compensation design for {100} oriented beam for two etching ...