Silicon resonant cavity enhanced UV flame detector
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The need for selectively sensitive UV photodetectors poses a requirement both for novel detector structures and for new materials and technologies to produce them. In this paper we consider, for the first time, a possibility to use resonant cavity enhanced detector structures with a silicon absorption layer to increasse selectivity and speed of UV detectors. A special emphasis is given to the UV photodetectors used in flame detection.
Keywords:Silicon / Resonance / Photodetectors / Optical surface waves / Radiation detectors / Electromagnetic wave absorption / Semiconductor radiation detectors / Photodiodes / Surface treatment
Source:23rd International Conference on Microelectronics, MIEL 2002 - Proceedings, 2002, 1, 239-242
- IEEE Computer Society