Influence of adsorption-desorption process on resonant frequency and noise of micro-and nanocantilevers
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Scientists in the field of NEMS today are focused on the problem of achieving the lowest detectable mass of the atomic force microscope and molecular microscope probes. This paper deals with this problem starting from the theory of the adsorptiondesorption noise and also the noise caused by temperature fluctuations and Johnson's noise. We found that the adsorptiondesorption noise clearly exceeds the noise of the other sources at lower frequencies. According to the results we obtained for a typical microcantilever fabricated by NEMS processes, the order of magnitude of the noise equivalent mass (NEM) is NEM∼104 D (1 D=1.710-27 kg).
Keywords:Resonant frequency / Atomic force microscopy / Nanoelectromechanical systems / Frequency measurement / Noise measurement / Micromechanical devices / Force measurement
Source:23rd International Conference on Microelectronics, MIEL 2002 - Proceedings, 2002, 1, 243-246
- IEEE Computer Society