Scientists in the field of NEMS today are focused on the problem of achieving the lowest detectable mass of the atomic force microscope and molecular microscope probes. This paper deals with this problem starting from the theory of the adsorptiondesorption noise and also the noise caused by temperature fluctuations and Johnson's noise. We found that the adsorptiondesorption noise clearly exceeds the noise of the other sources at lower frequencies. According to the results we obtained for a typical microcantilever fabricated by NEMS processes, the order of magnitude of the noise equivalent mass (NEM) is NEM∼104 D (1 D=1.710-27 kg).
Keywords:
Resonant frequency / Atomic force microscopy / Nanoelectromechanical systems / Frequency measurement / Noise measurement / Micromechanical devices / Force measurement
Source:
23rd International Conference on Microelectronics, MIEL 2002 - Proceedings, 2002, 1, 243-246
TY - CONF
AU - Đurić, Zoran G.
AU - Jokić, Ivana
AU - Frantlović, Miloš
AU - Jakšić, Olga
PY - 2002
UR - http://cer.ihtm.bg.ac.rs/handle/123456789/87
AB - Scientists in the field of NEMS today are focused on the problem of achieving the lowest detectable mass of the atomic force microscope and molecular microscope probes. This paper deals with this problem starting from the theory of the adsorptiondesorption noise and also the noise caused by temperature fluctuations and Johnson's noise. We found that the adsorptiondesorption noise clearly exceeds the noise of the other sources at lower frequencies. According to the results we obtained for a typical microcantilever fabricated by NEMS processes, the order of magnitude of the noise equivalent mass (NEM) is NEM∼104 D (1 D=1.710-27 kg).
PB - IEEE Computer Society
C3 - 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings
T1 - Influence of adsorption-desorption process on resonant frequency and noise of micro-and nanocantilevers
VL - 1
SP - 243
EP - 246
DO - 10.1109/MIEL.2002.1003185
ER -
@conference{
author = "Đurić, Zoran G. and Jokić, Ivana and Frantlović, Miloš and Jakšić, Olga",
year = "2002",
url = "http://cer.ihtm.bg.ac.rs/handle/123456789/87",
abstract = "Scientists in the field of NEMS today are focused on the problem of achieving the lowest detectable mass of the atomic force microscope and molecular microscope probes. This paper deals with this problem starting from the theory of the adsorptiondesorption noise and also the noise caused by temperature fluctuations and Johnson's noise. We found that the adsorptiondesorption noise clearly exceeds the noise of the other sources at lower frequencies. According to the results we obtained for a typical microcantilever fabricated by NEMS processes, the order of magnitude of the noise equivalent mass (NEM) is NEM∼104 D (1 D=1.710-27 kg).",
publisher = "IEEE Computer Society",
journal = "23rd International Conference on Microelectronics, MIEL 2002 - Proceedings",
title = "Influence of adsorption-desorption process on resonant frequency and noise of micro-and nanocantilevers",
volume = "1",
pages = "243-246",
doi = "10.1109/MIEL.2002.1003185"
}
Đurić, Z. G., Jokić, I., Frantlović, M.,& Jakšić, O. (2002). Influence of adsorption-desorption process on resonant frequency and noise of micro-and nanocantilevers.
23rd International Conference on Microelectronics, MIEL 2002 - Proceedings
IEEE Computer Society., 1, 243-246.
https://doi.org/10.1109/MIEL.2002.1003185
Đurić ZG, Jokić I, Frantlović M, Jakšić O. Influence of adsorption-desorption process on resonant frequency and noise of micro-and nanocantilevers. 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings. 2002;1:243-246
Đurić Zoran G., Jokić Ivana, Frantlović Miloš, Jakšić Olga, "Influence of adsorption-desorption process on resonant frequency and noise of micro-and nanocantilevers" 23rd International Conference on Microelectronics, MIEL 2002 - Proceedings, 1 (2002):243-246,
https://doi.org/10.1109/MIEL.2002.1003185 .
